US5998066A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass
Assignee: Marburg Technology Inc
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Filing: 1997-05-16
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Granted: 1999-12-07
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Expires: 2017-05-16
Abstract
Abstract A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 Å. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist film on an inorganic substrate. The selenium germanium photoresist film may then transfer the gray scale to the substrate.
Inventors
- 👤 Barry Block
- 👤 Arnold O. Thornton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:42
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/54; G03F1/50; G03F7/00; G03F7/0005; G03F7/0007; G03F7/001; G03F7/004; G03F7/0042; G03F7/0043; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24926
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
110 words
A method comprising: producing a gray scale mask, said step of producing comprising: depositing a chalcogenide glass on a first substrate; depositing a layer containing silver on said chalcogenide glass; irradiating said layer containing silver in a gray scale pattern such that silver is diffused into said chalcogenide glass in said gray scale pattern; etching said layer containing silver in an acid solution wherein the removal of silver uncovers said chalcogenide glass and the silver diffused into said chalcogenide glass is not removed; and etching the uncovered chalcogenide glass in an alkaline solution, wherein a layer of silver-diffused chalcogenide glass remains on said first substrate representing said gray scale pattern.
Claim 2
Independent Claim
110 words
A method comprising: producing a gray scale mask, said step of producing comprising: depositing a chalcogenide glass on a first substrate; depositing a layer containing silver on said chalcogenide glass; irradiating said layer containing silver in a gray scale pattern such that silver is diffused into said chalcogenide glass in said gray scale pattern; etching said layer containing silver in an acid solution wherein the removal of silver uncovers said chalcogenide glass and the silver diffused into said chalcogenide glass is not removed; and etching the uncovered chalcogenide glass in an alkaline solution, wherein a layer of silver-diffused chalcogenide glass remains on said first substrate representing said gray scale pattern.
Claim 3
Dependent Claim
11 words
The method of claim 1, wherein said chalcogenide glass comprises selenium.
Claim 4
Dependent Claim
11 words
The method of claim 1, wherein said chalcogenide glass comprises germanium.
Claim 5
Dependent Claim
30 words
The method of claim 1, wherein said step of etching said layer containing silver is performed using an acid solution, and said acid solution is HNO 3 --HCl--H 2 O.
Claim 6
Dependent Claim
12 words
Method of claim 1, wherein said alkaline aqueous solution is a hydroxide.
Claim 7
Dependent Claim
16 words
The method of claim 1, wherein said layer containing silver is irradiated with an electron beam.
Claim 8
Dependent Claim
15 words
The method of claim 1, wherein said layer containing silver is irradiated with ultraviolet light.
Claim 9
Dependent Claim
33 words
The method of claim 1, further comprising: transferring a representation of said gray scale pattern into said first substrate by etching through said layer of silver-diffused chalcogenide glass and into said first substrate.
Claim 10
Independent Claim
67 words
A method comprising: producing a gray scale mask, said step of producing comprising: depositing a chalcogenide glass on a first substrate; irradiating said chalcogenide glass in a gray scale pattern; and etching said chalcogenide glass in an alkaline aqueous solution until the irradiated chalcogenide glass in said gray scale pattern is dissolved leaving a layer of chalcogenide glass on said first substrate representing said gray scale pattern.
Claim 11
Independent Claim
67 words
A method comprising: producing a gray scale mask, said step of producing comprising: depositing a chalcogenide glass on a first substrate; irradiating said chalcogenide glass in a gray scale pattern; and etching said chalcogenide glass in an alkaline aqueous solution until the irradiated chalcogenide glass in said gray scale pattern is dissolved leaving a layer of chalcogenide glass on said first substrate representing said gray scale pattern.
Claim 12
Dependent Claim
97 words
The method of claim 1 further comprising: transferring a depth pattern, said step of transferring comprising: depositing a chalcogenide glass resist on a second substrate; placing said first substrate with said layer of silver-diffused chalcogenide glass over said chalcogenide glass resist; illuminating said chalcogenide glass resist through said gray scale pattern; etching said chalcogenide glass resist in an alkaline solution, such that a modulated thickness of chalcogenide glass resist remains; and transferring a representation of said modulated thickness into said second substrate by etching through said modulated thickness of chalcogenide glass resist and into said second substrate.
Claim 13
Dependent Claim
167 words
The method of claim 1 further comprising: transferring a depth pattern, said step of transferring comprising: depositing a chalcogenide glass resist on a second substrate; depositing a second layer containing silver on said chalcogenide glass resist; placing said first substrate with said layer of silver-diffused chalcogenide glass over said second layer containing silver; illuminating said second layer containing silver through said gray scale pattern, such that illuminated silver within said second layer is diffused into said chalcogenide glass resist as a function of said gray scale pattern; etching said second layer containing silver in an acid solution wherein the removal of silver uncovers chalcogenide glass resist and the silver diffused into said chalcogenide glass is not removed; etching said chalcogenide glass resist in an alkaline solution, such that a modulated thickness of silver diffused chalcogenide glass resist remains; and transferring a representation of said modulated thickness into said second substrate by etching through said modulated thickness of silver diffused chalcogenide glass resist and into said second substrate.
Claim 14
Dependent Claim
97 words
The method of claim 9 further comprising: transferring a depth pattern, said step of transferring comprising: depositing a chalcogenide glass resist on a second substrate; placing said first substrate with said layer of silver-diffused chalcogenide glass over said chalcogenide glass resist; illuminating said chalcogenide glass resist through said gray scale pattern; etching said chalcogenide glass resist in an alkaline solution, such that a modulated thickness of chalcogenide glass resist remains; and transferring a representation of said modulated thickness into said second substrate by etching through said modulated thickness of chalcogenide glass resist and into said second substrate.
Claim 15
Dependent Claim
165 words
The method of claim 9 further comprising: transferring a depth pattern, said step of transferring comprising: depositing a chalcogenide glass resist on a second substrate; depositing a second layer containing silver on said chalcogenide glass resist; placing said first substrate with said layer of silver-diffused chalcogenide glass over said second layer containing silver; illuminating said second layer containing silver through said gray scale pattern, such that said illuminated silver is diffused into said chalcogenide glass resist as a function of said gray scale pattern; etching said second layer containing silver in an acid solution wherein the removal of silver uncovers said chalcogenide glass resist and the silver diffused into said chalcogenide glass is not removed; etching said chalcogenide glass resist in an alkaline solution, such that a modulated thickness of silver diffused chalcogenide glass resist remains; and transferring a representation of said modulated thickness into said second substrate by etching through said modulated thickness of silver diffused chalcogenide glass resist and into said second substrate.
Claim 16
Dependent Claim
50 words
Method comprising the steps of: depositing a chalcogenide glass layer on a substrate; selectively irradiating said chalcogenide glass to form a thickness profile in said chalcogenide glass in which at least portions of said profile have a continuous thickness variation; transferring the profile in said chalcogenide glass to said substrate.
Claim 17
Dependent Claim
50 words
Method comprising the steps of: depositing a chalcogenide glass layer on a substrate; selectively irradiating said chalcogenide glass to form a thickness profile in said chalcogenide glass in which at least portions of said profile have a continuous thickness variation; transferring the profile in said chalcogenide glass to said substrate.
Claim 18
Dependent Claim
26 words
Method of claim 14 wherein said substrate is transparent, and said profile, including said portions of said profile, causes said substrate to act as a lens.
Claim 19
Dependent Claim
47 words
Method for using a gray scale mask, said gray scale mask comprising a thickness modulated chalcogenide glass layer, said method comprising irradiating a resist layer through said thickness modulated chalcogenide glass layer to thereby transfer the thickness pattern in said chalcogenide glass layer to said resist layer.
Claim 20
Dependent Claim
47 words
Method for using a gray scale mask, said gray scale mask comprising a thickness modulated chalcogenide glass layer, said method comprising irradiating a resist layer through said thickness modulated chalcogenide glass layer to thereby transfer the thickness pattern in said chalcogenide glass layer to said resist layer.
Claim 21
Dependent Claim
13 words
Method of claim 16 wherein said resist layer is another chalcogenide glass layer.
Claim 22
Dependent Claim
54 words
Method for using a gray scale mask, said gray scale mask comprising a chalcogenide layer in which portions of said chalcogenide layer have been selectively removed, said method comprising the step of irradiating a resist layer through said chalcogenide layer to thereby transfer gray scale information in said chalcogenide layer to said resist layer.
Claim 23
Dependent Claim
54 words
Method for using a gray scale mask, said gray scale mask comprising a chalcogenide layer in which portions of said chalcogenide layer have been selectively removed, said method comprising the step of irradiating a resist layer through said chalcogenide layer to thereby transfer gray scale information in said chalcogenide layer to said resist layer.
Claim 24
Dependent Claim
22 words
Method of claim 18 wherein said gray scale information is encoded in said chalcogenide layer by providing pixels in said chalcogenide layer.
References Cited (Backward Citations)
JPS51136287A
Cited
US4127414A
Cited
US4320191A
Cited
US4350541A
Cited
JPS57105739A
Cited
US4454221A
Cited
GB2179472A
Cited
US5314772A
Cited
US5177567A
Cited
US5480764A
Cited
DE4435022A1
Cited
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