US4127414A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pattern-forming materials having a radiation sensitive chalcogenide layer and a method of forming patterns with such materials
Assignee: NTT Inc
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Filing: 1977-06-08
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Granted: 1978-11-28
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Expires: 1997-06-08
Abstract
Abstract A pattern-forming material comprises a substrate and a radiation sensitive chalcogenide layer disposed thereon. The radiation sensitive chalcogenide layer consists of an amorphous layer having a chemical composition of 75 to 95 mol% of selenium and 5 to 25 mol% of germanium and a silver layer superimposed thereon. The pattern-forming materials having the radiation sensitive chalcogenide layer of the invention are particularly useful in lithographic applications.
Inventors
- 👤 Akira Yoshikawa
- 👤 Haruo Nagai
- 👤 Osamu Ochi
- 👤 Kazuko Nakano
- 👤 Yoshihiko Mizushima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:33
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/54; G03F7/00; G03F7/004; G03F7/0042; G03F7/0044
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
48 words
A pattern-forming material comprising a radiation sensitive chalcogenide layer disposed on a substrate; said chalcogenide layer consisting of an amorphous layer having a chemical composition of 75 to 95 mol% of selenium and 5 to 25 mol% of germanium and a silver layer superimposed on said amorphous layer.
Claim 2
Dependent Claim
48 words
A pattern-forming material comprising a radiation sensitive chalcogenide layer disposed on a substrate; said chalcogenide layer consisting of an amorphous layer having a chemical composition of 75 to 95 mol% of selenium and 5 to 25 mol% of germanium and a silver layer superimposed on said amorphous layer.
Claim 3
Dependent Claim
27 words
A pattern-forming material as claimed in claim 1, wherein said silver layer is formed by an electroless or an electro-plating process with a solution containing silver ion.
Claim 4
Dependent Claim
17 words
The pattern-forming material of claim 1, wherein said silver layer is an electrolessly or an electro-plated layer.
References Cited (Backward Citations)
US3707372A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-11-27 | 1982-05-29 | 1982-11-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-11-27 | 1986-05-29 | 1986-11-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-11-27 | 1990-05-29 | 1990-11-28 | $7700.00 | Window Closed / Lapsed |