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US5997997A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for reducing seed deposition in electroless plating

Assignee: International Business Machines Corp
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Filing: 1997-06-13
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Granted: 1999-12-07
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Expires: 2017-06-13
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Abstract

Abstract The present invention provides a novel method of reducing the amount of seed deposited on polymeric dielectric surfaces. The method comprises the following steps: providing a work-piece coated with a polymeric dielectric layer; baking the work-piece to modify the surface of the polymeric dielectric layer; then applying the seed to polymeric dielectric layer and electrolessly plating metal to the seed layer. The invention also relates to a circuit board produced by the method of the present invention.

Inventors

  • 👤 Anastasios Peter Angelopoulos
  • 👤 Gerald Walter Jones
  • 👤 Luis Jesus Matienzo
  • 👤 Thomas Richard Miller
  • 👤 Voya Rista Markovich

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 20:54
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/20; C23C18/2006; C23C18/2026; C23C18/2033; C23C18/1601; C23C18/1603; C23C18/1605; C23C18/2046; C23C18/2073; C23C18/2086; C23C18/28; C23C18/285; C23C18/30; H; H05; H05K; H05K3/00; H05K3/38; H05K3/386; H05K3/387; H05K2203/00; H05K2203/11; H05K2203/1105; H05K2203/12; H05K2203/122; H05K3/10; H05K3/18; H05K3/181; H05K3/381; H05K3/389; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/31504; Y10T428/31511; Y10T428/31515; Y10T428/31522

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 91 words
A circuit structure produced by the following method: a. providing a workpiece comprising a substrate coated with a polymeric dielectric layer; wherein the polymeric dielectric layer comprises hydroxyl groups, and scavenging groups having sulfur moieties or atoms; b. baking the workpieces; c. then applying a polymeric surfactant to the polymeric dielectric layer, wherein the polymeric surfactant is capable of hydrogen bonding to the hydroxyl groups on the polymeric dielectric layer; d. then applying a seed to the dielectric layer; and e. electrolessly plating metal to the seed deposited in step d.
Claim 2
Dependent Claim 91 words
A circuit structure produced by the following method: a. providing a workpiece comprising a substrate coated with a polymeric dielectric layer; wherein the polymeric dielectric layer comprises hydroxyl groups, and scavenging groups having sulfur moieties or atoms; b. baking the workpieces; c. then applying a polymeric surfactant to the polymeric dielectric layer, wherein the polymeric surfactant is capable of hydrogen bonding to the hydroxyl groups on the polymeric dielectric layer; d. then applying a seed to the dielectric layer; and e. electrolessly plating metal to the seed deposited in step d.
Claim 3
Dependent Claim 46 words
The circuitized structure of claim 1, further comprising the steps of applying a photoresist to the seeded polymeric dielectric, and then photopatterning the photoresist, after step d and before step e, wherein in step e the seed areas which are not covered with photoresist are plated.
Claim 4
Dependent Claim 38 words
The circuitized structure of claim 1, wherein the weak acidic groups are hydroxyl groups, the scavenging groups are sulfur moieties or sulfur atoms, polymeric surfactant is a polyelectrolyte and the bake temperature is at least about 100° C.
Claim 5
Dependent Claim 92 words
The circuitized structure of claim 3, wherein the polymeric dielectric has solids which are comprised of: from about 10 to 80%, of phenoxy polyol resin which is the condensation product of epichlorohydrin and bisphenol A, having a molecular weight of from about 40,000 to 130,000; from about 20 to 90%, of an epoxidized multifunctional bisphenol A formaldehyde novolac resin having a molecular weight of from about 4,000 to 10,000; and from 0 to 50%, of a halogenated, diglycidyl ether of bisphenol A having a molecular weight of from about 600 to 2,500.
Claim 6
Dependent Claim 199 words
The circuitized structure of claim 4, wherein the polymeric dielectric has solids which are comprised of: from about 20 to 40%, of the phenoxy polyol resin, wherein the phenoxy polyol resin has a weight average molecular weight of about 60,000 to 90,000 and an epoxide value of from about 0.01 to about 0.3 equivalents per kg, a weight per epoxide, of from about 20,000 to about 50,000, and a glass transition temperature of from about 90 to about 110° C.; from about 25 to 30%, of the epoxidized multifunctional bisphenol A formaldehyde novolac resin having a molecular weight of from about 5,000 to 7,000 and an epoxide value of from about 3 to about 6, equivalents per kilogram, a weight per epoxide of from about 190 to about 230, and a melting point of from about 70° C. to about 90° C.; from about 35 to 50%, of a diglycidyl ether of bisphenol A having a molecular weight of from about 1,000 to 1,700 an epoxide value of from about 1 to about 3, equivalents per kilogram, a weight per epoxide of from about 80 to about 110° C.; a cationic photoinitiator having a sulfur moiety or sulfur atoms.
Claim 7
Dependent Claim 46 words
A circuit structure comprising: A substrate coated with a polymeric dielectric layer comprising hydroxyl groups and scavenging groups including sulfur moieties or atoms; surfactant, disposed on the polymeric dielectric layer; seed layer disposed on the polymeric dielectric layer; and metal electrolessly plated to the seed layer.
Claim 8
Dependent Claim 46 words
A circuit structure comprising: A substrate coated with a polymeric dielectric layer comprising hydroxyl groups and scavenging groups including sulfur moieties or atoms; surfactant, disposed on the polymeric dielectric layer; seed layer disposed on the polymeric dielectric layer; and metal electrolessly plated to the seed layer.
Claim 9
Dependent Claim 21 words
The circuitized structure of claim 6, wherein the seed is present in an amount of about 13.5 μg/cm 2 or less.
Claim 10
Dependent Claim 21 words
The circuitized structure of claim 6, wherein the seed is present in an amount of about 9 μg/cm 2 or less.
Claim 11
Dependent Claim 117 words
The circuitized structure of claim 6, wherein the polymeric dielectric has solids which are comprised of: from about 10 to 80%, of phenoxy polyol resin which is the condensation product of epichlorohydrin and bisphenol A, having a molecular weight of from about 40,000 to 130,000; from about 20 to 90%, of an epoxidized multifunctional bisphenol A formaldehyde novolac resin having a molecular weight of from about 4,000 to 10,000; from 0 to 50%, of a halogenated, diglycidyl ether of bisphenol A having a molecular weight of from about 600 to 2,500; and from about 0.1 parts to about 15 parts by weight of the total resin weight of a cationic photoinitiator containing sulfur moieties or sulfur atoms.
Claim 12
Dependent Claim 223 words
The circuitized structure of claim 9, wherein the polymeric dielectric has solids which are comprised of: from about 20 to 40%, o the phenoxy polyol resin, wherein the phenoxy polyol resin has a weight average molecular weight of about 60,000 to 90,000 and an epoxide value of from about 0.01 to about 0.3 equivalents per kg, a weight per epoxide, of from about 20,000 to about 50,000, and a glass transition temperature of from about 90 to about 110° C.; from about 25 to 30%, of the epoxidized multifunctional bishpenol A formaldehyde novolac resin having a molecular weight of from about 5,000 to 7,000 and an epoxide value of from about 3 to about 6, equivalents per kilogram, a weight per epoxide of from about 190 to about 230, and a melting point of from about 70° C. to about 90° C.; from about 35 to 50%, of a diglycidyl ether of bisphenol A having: a molecular weight of from about 1,000 to 1,700; an epoxide value of from about 1 to about 3, equivalents per kilogram, a weight per epoxide of from about 500 to about 750, and a melting point of from 80 to about 110° C.; and from about 0.1 to 15 parts, by weight of the total resin of a cationic photoinitiator containing a sulfur moiety or sulfur atoms.
Claim 13
Dependent Claim 23 words
The circuitized structure of claim 6, wherein the polymeric surfactant is a polyelectrolyte, and the dielectric layer comprises epoxy resin having hydroxyl groups.
Claim 14
Dependent Claim 44 words
The circuitized structure of claim 11, wherein the surface of the baked polymeric dielectric displays a wetting force in 1N sodium hydroxide that is from about 35% greater to about 10% less, than the wetting force of such surface in water at pH 5.2.
Claim 15
Dependent Claim 25 words
The circuitized structure of claim 11, wherein the surfactant has amide groups and a molecular weight of from about 10 5 to 10 7 .
Claim 16
Dependent Claim 18 words
The circuitized structure of claim 13, wherein the surfactant comprises cationic polyacrylamide polyelectrolyte or a cationic polyamidoamide polyelectrolyte.
Claim 17
Dependent Claim 201 words
The circuitized structure of claim 14, wherein the polymeric dielectric has solids which are comprised of: from about 20 to 40%, of the phenoxy polyol resin, wherein the phenoxy polyol resin has a weight average molecular weight of about 60,000 to 90,000 and an epoxide value of from about 0.01 to about 0.3 equivalents per kg, a weight per epoxide, of from about 20,000 to about 50,000, and a glass transition temperature of from about 90 to about 110° C.; from about 25 to 30%, of the epoxidized multifunctional bisphenol A formaldehyde novolac resin having a molecular weight of from about 5,000 to 7,000 and an epoxide value of from about about 3 to about 6, equivalents per kilogram, a weight per epoxide of from about 190 to about 230, and a melting point of from about 70° C. to about 90° C.; from about 35 to 50%, of a diglycidyl ether of bisphenol A having a molecular weight of from about 1,000 to 1,700 an epoxide value of from about 1 to about 3, equivalents per kilogram, a weight per epoxide of from about 500 to about 750, and a melting point of from about 80 to about 110° C.
Claim 18
Dependent Claim 141 words
The circuitized structure of claim 15, wherein the polymeric dielectric solids are comprised of: about 30%, of the phenoxy polyol resin, wherein the phenoxy polyol resin has an epoxide value of about 0.03 equivalents per kg, a weight per epoxide, of about 37,000 and a glass transition temperature of about 98° C.; from about 25 to 30%, of the epoxidized multifunctional bisphenol A formaldehyde novolac resin has an epoxide value of from about 4.7, equivalents per kilogram, a weight per epoxide of from about 215, and a melting point of about 82° C.; from about 35 to 50%, of a brominated, diglycidyl ether of bisphenol A having: an epoxide of about 1.5 equivalents per kilogram; a weight per epoxide of about 675; and a melting point of about 97° C.; and wherein the cationic photoinitiator comprises a complex triarylsulfonium hexafluoroantimonate salt.
Claim 19
Dependent Claim 14 words
The circuitized structure of claim 14, wherein the surfactant is a cationic polyacrylamide polyelectrolyte.
Claim 20
Dependent Claim 15 words
The circuitized structure of claim 14, wherein the surfactant is a cationic polyamido amine polyelectrolyte.

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