US5981398A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Hard mask method for forming chlorine containing plasma etched layer
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-04-10
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Granted: 1999-11-09
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Expires: 2018-04-10
Abstract
Abstract A method for forming a chlorine containing plasma etched patterned layer. There is first provided a substrate 10 employed within a microelectronics fabrication. There is then formed over the substrate a blanket target layer 12 formed of a material susceptible to etching within a second plasma employing a chlorine containing etchant gas composition. There is then formed upon the blanket target a blanket hard mask layer 14 formed of a material selected from the group consisting of silsesquioxane spin-on-glass (SOG) materials and amorphous carbon materials. There is then formed upon the blanket hard mask layer a patterned photoresist layer 16. There is then etched while employing the patterned photoresist layer as a first etch mask layer and while employing a first plasma employing a fluorine containing etchant gas composition the blanket hard mask layer to form a patterned hard mask layer. Finally, there is then etched while employing at least the patterned hard mask layer as a second etch mask layer and while employing the second plasma employing the chlorine containing etchant gas composition the blanket target layer to form the patterned target layer.
Inventors
- 👤 Chia-Shiung Tsai
- 👤 Chao-Cheng Chen
- 👤 Hun-Jan Tao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:36
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268; H10P50/71
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
152 words
A method for forming a chlorine containing plasma etched patterned layer comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate a blanket target layer formed of a material susceptible to etching within a second plasma employing a chlorine containing etchant gas composition; forming upon the blanket target a blanket hard mask layer formed employing a silsesquioxane spin-on-glass (SOG) material; forming upon the blanket hard mask layer a patterned photoresist layer; etching while employing the patterned photoresist layer as a first etch mask layer and while employing a first plasma employing a fluorine containing etchant gas composition the blanket hard mask layer to form a patterned hard mask layer; and etching while employing at least the patterned hard mask layer as a second etch mask layer and while employing the second plasma employing the chlorine containing etchant gas composition the blanket target layer to form a patterned target layer.
Claim 2
Independent Claim
152 words
A method for forming a chlorine containing plasma etched patterned layer comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate a blanket target layer formed of a material susceptible to etching within a second plasma employing a chlorine containing etchant gas composition; forming upon the blanket target a blanket hard mask layer formed employing a silsesquioxane spin-on-glass (SOG) material; forming upon the blanket hard mask layer a patterned photoresist layer; etching while employing the patterned photoresist layer as a first etch mask layer and while employing a first plasma employing a fluorine containing etchant gas composition the blanket hard mask layer to form a patterned hard mask layer; and etching while employing at least the patterned hard mask layer as a second etch mask layer and while employing the second plasma employing the chlorine containing etchant gas composition the blanket target layer to form a patterned target layer.
Claim 3
Dependent Claim
41 words
The method of claim 1 wherein: the second plasma etch method also employs a reducing material; and the patterned hard mask layer is reduction resistant within the second plasma in comparison with a patterned hard mask layer formed of silicon dioxide.
Claim 4
Dependent Claim
34 words
The method of claim 1 wherein the microelectronics fabrication is selected from the group consisting of integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.
Claim 5
Dependent Claim
36 words
The method of claim 1 wherein the blanket target layer is formed from a chlorine containing plasma etchable material selected from the group consisting of metals, metal alloys, metal silicides, polysilicon and polycides (polysilicon/metal silicide stacks).
Claim 6
Dependent Claim
22 words
The method of claim 1 wherein the silsesquioxane spin-on-glass (SOG) material is selected from the group consisting of trialkoxysilanes, methyltrialkoxysilanes and trifluoromethyltrialkoxysilanes.
Claim 7
Dependent Claim
24 words
The method of claim 1 wherein the blanket hard mask layer is formed to a thickness of from about 2000 to about 4000 angstroms.
Claim 8
Independent Claim
151 words
A method for forming a chlorine containing plasma etched patterned layer comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate a blanket target layer formed of a material susceptible to etching within a second plasma employing a chlorine containing etchant gas composition; forming upon the blanket target a blanket hard mask layer formed employing an amorphous carbon material; forming upon the blanket hard mask layer a patterned photoresist layer; etching while employing the patterned photoresist layer as a first etch mask layer and while employing a first plasma employing a fluorine containing etchant gas composition the blanket hard mask layer to form a patterned hard mask layer; and etching while employing at least the patterned hard mask layer as a second etch mask layer and while employing the second plasma employing the chlorine containing etchant gas composition the blanket target layer to form a patterned target layer.
Claim 9
Independent Claim
151 words
A method for forming a chlorine containing plasma etched patterned layer comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate a blanket target layer formed of a material susceptible to etching within a second plasma employing a chlorine containing etchant gas composition; forming upon the blanket target a blanket hard mask layer formed employing an amorphous carbon material; forming upon the blanket hard mask layer a patterned photoresist layer; etching while employing the patterned photoresist layer as a first etch mask layer and while employing a first plasma employing a fluorine containing etchant gas composition the blanket hard mask layer to form a patterned hard mask layer; and etching while employing at least the patterned hard mask layer as a second etch mask layer and while employing the second plasma employing the chlorine containing etchant gas composition the blanket target layer to form a patterned target layer.
Claim 10
Dependent Claim
28 words
The method of claim 7 further comprising stripping from the substrate the patterned photoresist layer and the patterned hard mask layer employing an oxygen containing plasma stripping method.
Claim 11
Dependent Claim
34 words
The method of claim 7 wherein the microelectronics fabrication is selected from the group consisting of integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.
Claim 12
Dependent Claim
36 words
The method of claim 7 wherein the blanket target layer is formed from a chlorine containing plasma etchable material selected from the group consisting of metals, metal alloys, metal salacities, polysilicon and polycides (polysilicon/metal silicide stacks).
Claim 13
Dependent Claim
23 words
The method of claim 7 wherein the amorphous carbon material is selected from the group consisting of amorphous carbon and fluorinated amorphous carbon.
Claim 14
Dependent Claim
24 words
The method of claim 7 wherein the blanket hard mask layer is formed to a thickness of from about 2000 to about 4000 angstroms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-11-08 | 2003-05-10 | 2003-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-11-08 | 2007-05-10 | 2007-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-11-08 | 2011-05-10 | 2011-11-09 | $7700.00 | Window Closed / Lapsed |