US5977519A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heating element with a diamond sealing material
Assignee: AKT Inc
•
Filing: 1997-02-28
•
Granted: 1999-11-02
•
Expires: 2017-02-28
Abstract
Abstract A substrate support plate including a heating element for use in a process chamber is described. The heating element includes an outer sheath, a heating filament and a thermally-conductive and electrically insulative sealing material. The sealing material comprises a diamond powder.
Inventors
- 👤 Carl A. Sorensen
- 👤 Daniel Winkler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:43
CPC Classifications
H; H05; H05B; H05B3/00; H05B3/40; H05B3/42; H05B3/48; C; C23; C23C; C23C16/00; C23C16/44; C23C16/46
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
33 words
A heating element comprising: a heating filament; a sheath surrounding the heating element; and a sealing material disposed between the sheath and the heating filament and comprising a diamond powder and magnesium oxide.
Claim 2
Dependent Claim
33 words
A heating element comprising: a heating filament; a sheath surrounding the heating element; and a sealing material disposed between the sheath and the heating filament and comprising a diamond powder and magnesium oxide.
Claim 3
Dependent Claim
33 words
A heating element comprising: a heating filament; a sheath surrounding the heating element; and a sealing material disposed between the sheath and the heating filament and comprising a diamond powder and boron nitride.
Claim 4
Dependent Claim
33 words
A heating element comprising: a heating filament; a sheath surrounding the heating element; and a sealing material disposed between the sheath and the heating filament and comprising a diamond powder and boron nitride.
Claim 5
Dependent Claim
40 words
A heating element comprising: a heating filament; a sheath surrounding the heating element; and a sealing material disposed between the sheath and the heating filament and comprising a diamond powder with a particle size of about five to fifty microns.
Claim 6
Dependent Claim
40 words
A heating element comprising: a heating filament; a sheath surrounding the heating element; and a sealing material disposed between the sheath and the heating filament and comprising a diamond powder with a particle size of about five to fifty microns.
Claim 7
Dependent Claim
23 words
The heating element of claim 3 wherein the diamond powder has a particle size greater than fifteen and less than about thirty microns.
Claim 8
Dependent Claim
75 words
A substrate support structure for use in a processing chamber, comprising: a plate having a top surface for supporting a substrate; and a heating element associated with the plate, the heating element including a heating filament, a sheath surrounding the heating filament, and an electrically insulating sealing material including a diamond powder characterized by a particles size range of about 5 microns to about 50 microns and disposed between the sheath and the heating filament.
Claim 9
Dependent Claim
75 words
A substrate support structure for use in a processing chamber, comprising: a plate having a top surface for supporting a substrate; and a heating element associated with the plate, the heating element including a heating filament, a sheath surrounding the heating filament, and an electrically insulating sealing material including a diamond powder characterized by a particles size range of about 5 microns to about 50 microns and disposed between the sheath and the heating filament.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-11-01 | 2003-05-03 | 2003-11-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-11-01 | 2007-05-03 | 2007-11-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-11-01 | 2011-05-03 | 2011-11-02 | $7700.00 | Window Closed / Lapsed |