US5970374A
Expired / Lapsed
US
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Method for forming contacts and vias with improved barrier metal step-coverage
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1996-10-18
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Granted: 1999-10-19
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Expires: 2016-10-18
Abstract
Abstract A method is described for overcoming the non-conformity and poor step coverage incurred when materials such as metals and barrier materials are deposited into contact or via openings by physical-vapor-deposition (PVD) techniques such as sputtering and evaporation. Conventional PVD deposition into a vertical walled opening results in the formations of cusps along the walls at the mouth of the opening. These cusps obstruct the material stream into the depth of the opening, resulting in inadequate coverage at the base of the opening particularly at the corners. This increases the chance of failure of the barrier material resulting in a reliability exposure. In addition, the cusps, if not removed, cause the formation of voids in subsequently deposited conductive plugs. The invention teaches the insulative layer, wherein the openings are formed, to be deposited to a greater thickness than required by the design. The openings are then formed and filled with a spin-on-glass. The insulative layer is then polished to the design thickness, removing the cusps. The spin-on-glass, which protects the openings from damage and contamination during polishing, is removed and an adhesion layer is applied prior to the deposition of the conductive material of the contact or via.
Inventors
- 👤 Yeow Meng Teo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:25
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/054; H10W20/033; H10W20/035; H10W20/056
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
157 words
A method of improving step coverage of material deposited by a PVD technique in vertical walled openings in an insulative layer, said vertical walled openings having an aspect ratio greater than one, comprising: providing a substrate having an insulative layer formed over its surface; forming vertical walled openings with aspect ratios greater than one through said insulative layer; depositing a first layer onto said substrate; depositing a second layer onto said substrate by a PVD technique whereby cusps are formed at the mouths of said vertical walled openings; depositing a spin-on-glass (SOG) over said substrate, whereby said SOG fills said vertical walled openings to above the lower portion of said cusps; partially curing said SOG; subjecting said substrate chemical-mechanical-polishing, until said SOG has been penetrated and said cusps are removed; removing said SOG; and depositing a third layer onto said substrate. group consisting of rf sputtering, rf magnetron sputtering, dc sputtering, dc magnetron sputtering and vacuum evaporation.
Claim 2
Independent Claim
157 words
A method of improving step coverage of material deposited by a PVD technique in vertical walled openings in an insulative layer, said vertical walled openings having an aspect ratio greater than one, comprising: providing a substrate having an insulative layer formed over its surface; forming vertical walled openings with aspect ratios greater than one through said insulative layer; depositing a first layer onto said substrate; depositing a second layer onto said substrate by a PVD technique whereby cusps are formed at the mouths of said vertical walled openings; depositing a spin-on-glass (SOG) over said substrate, whereby said SOG fills said vertical walled openings to above the lower portion of said cusps; partially curing said SOG; subjecting said substrate chemical-mechanical-polishing, until said SOG has been penetrated and said cusps are removed; removing said SOG; and depositing a third layer onto said substrate. group consisting of rf sputtering, rf magnetron sputtering, dc sputtering, dc magnetron sputtering and vacuum evaporation.
Claim 3
Dependent Claim
29 words
The method of claim 1 wherein said PVD technique is selected from the group consisting of rf sputtering, rf magnetron sputtering, dc sputtering, dc magnetron sputtering and vacuum evaporation.
Claim 4
Dependent Claim
17 words
The method of claim 1 wherein said insulative layer is between about 1.0 and 1.5 microns thick.
Claim 5
Dependent Claim
23 words
The method of claim 1 wherein said insulative layer is selected from the group consisting of silicon oxide, phosphosilicate glass, and borophosphosilicate glass.
Claim 6
Dependent Claim
28 words
The method of claim 1 wherein said first layer is selected from the group consisting of Ti and Pt and is between about 400 and 800 Angstroms thick.
Claim 7
Dependent Claim
28 words
The method of claim 1 wherein said second layer is selected from the group consisting of TiN and TiW and is between about 1,500 and 2,500 Angstroms thick.
Claim 8
Dependent Claim
20 words
The method of claim 1 wherein said SOG is selected from the group consisting of a siloxane and a silicate.
Claim 9
Dependent Claim
29 words
The method of claim 1 wherein said third layer is selected from the group consisting of Ti, Ti/TiN and Ti/TiW and is between about 400 and 800 Angstroms thick.
Claim 10
Independent Claim
175 words
A method for forming metal contacts to active areas of integrated circuit devices formed within the surface of a semiconductor wafer comprising: providing a semiconductor wafer having integrated circuit semiconductor devices formed within its surface and having an insulative layer over said semiconductor devices with vertical walled openings patterned and etched in said insulative layer, exposing subjacent contact regions of said semiconductor devices; depositing a refractory metal over said insulative layer; depositing a barrier material over said refractory metal by a PVD technique whereby cusps of are formed at the mouths of said vertical walled openings; depositing a spin-on-glass (SOG) over said semiconductor wafer, whereby said SOG fills said vertical walled openings to above a lower portion of said cusps; partially curing said SOG; subjecting said semiconductor wafer to chemical-mechanical-polishing, until said SOG has been penetrated and said cusps are removed; removing said SOG; depositing a glue layer on said semiconductor wafer; depositing a metal layer over said glue layer; and etching said metal layer with a unidirectional dry etching technique to form metal plugs.
Claim 11
Independent Claim
175 words
A method for forming metal contacts to active areas of integrated circuit devices formed within the surface of a semiconductor wafer comprising: providing a semiconductor wafer having integrated circuit semiconductor devices formed within its surface and having an insulative layer over said semiconductor devices with vertical walled openings patterned and etched in said insulative layer, exposing subjacent contact regions of said semiconductor devices; depositing a refractory metal over said insulative layer; depositing a barrier material over said refractory metal by a PVD technique whereby cusps of are formed at the mouths of said vertical walled openings; depositing a spin-on-glass (SOG) over said semiconductor wafer, whereby said SOG fills said vertical walled openings to above a lower portion of said cusps; partially curing said SOG; subjecting said semiconductor wafer to chemical-mechanical-polishing, until said SOG has been penetrated and said cusps are removed; removing said SOG; depositing a glue layer on said semiconductor wafer; depositing a metal layer over said glue layer; and etching said metal layer with a unidirectional dry etching technique to form metal plugs.
Claim 12
Dependent Claim
29 words
The method of claim 9 wherein said PVD technique is selected from the group consisting of rf sputtering, rf magnetron sputtering, dc sputtering, dc magnetron sputtering and vacuum evaporation.
Claim 13
Dependent Claim
17 words
The method of claim 9 wherein said insulative layer is between about 1.0 and 1.5 microns thick.
Claim 14
Dependent Claim
23 words
The method of claim 9 wherein said insulative layer is selected from the group consisting of silicon oxide, phosphosilicate glass, and borophosphosilicate glass.
Claim 15
Dependent Claim
28 words
The method of claim 9 wherein said refractory metal is selected from the group consisting of Ti and Pt, and is between about 400 and 800 Angstroms thick.
Claim 16
Dependent Claim
28 words
The method of claim 9 wherein said barrier material is selected from the group consisting of TiN and TiW, and is between about 1,500 and 2,500 Angstroms thick.
Claim 17
Dependent Claim
20 words
The method of claim 9 wherein said SOG is selected from the group consisting of a siloxane and a silicate.
Claim 18
Dependent Claim
19 words
The method of claim 9 wherein said glue layer is selected from the group consisting of Ti/TiN, and Ti/TiW.
Claim 19
Dependent Claim
22 words
The method of claim 16 further comprising subjecting said semiconductor wafer to a rapid thermal anneal after said glue layer is deposited.
Claim 20
Dependent Claim
40 words
The method of claim 12 wherein said metal layer is tungsten deposited at a temperature between about 440° C. and 480° C. in a cold walled, low temperature CVD system by the reduction of WF 6 with H 2 .
Claim 21
Dependent Claim
17 words
The method of claim 18 wherein said metal layer is between about 3,000 and 5,000 Angstroms thick.
Claim 22
Dependent Claim
11 words
The method of claim 9 wherein said glue layer is Ti.
Claim 23
Dependent Claim
28 words
The method of claim 20 further comprising subjecting said semiconductor wafer to a rapid thermal anneal before said glue layer is deposited and after said SOG is removed.
Claim 24
Dependent Claim
15 words
The method of claim 21 wherein said metal layer is aluminum or an aluminum alloy.
Claim 25
Independent Claim
201 words
A method for forming vias between levels of wiring metallization of integrated circuit devices formed in a semiconductor wafer comprising: providing a semiconductor wafer having integrated circuit semiconductor devices formed within its surface and having at least one level of wiring metallization connected to said semiconductor devices; depositing an insulative layer over said wiring metallization; depositing a photoresist layer over said insulative layer; patterning said photoresist layer to define vias; etching said vias using reactive-ion-etching to produce vertical walled openings exposing subjacent wiring metallization; removing said photoresist layer; depositing a refractory metal over said insulative layer; depositing a barrier material over said refractory metal by a PVD technique whereby cusps of are formed at the mouths of said vertical walled openings; depositing a spin-on-glass (SOG) on said semiconductor wafer, whereby said SOG glass fills said vertical walled openings to above the lower portion of said cusps; partially curing said SOG; subjecting said semiconductor wafer to chemical-mechanical-polishing, until said SOG has been penetrated and said cusps are removed; removing said SOG; depositing a glue layer on said semiconductor wafer; depositing a metal layer over said glue layer; and etching said metal layer with a unidirectional dry etching technique to form metal plugs.
Claim 26
Independent Claim
201 words
A method for forming vias between levels of wiring metallization of integrated circuit devices formed in a semiconductor wafer comprising: providing a semiconductor wafer having integrated circuit semiconductor devices formed within its surface and having at least one level of wiring metallization connected to said semiconductor devices; depositing an insulative layer over said wiring metallization; depositing a photoresist layer over said insulative layer; patterning said photoresist layer to define vias; etching said vias using reactive-ion-etching to produce vertical walled openings exposing subjacent wiring metallization; removing said photoresist layer; depositing a refractory metal over said insulative layer; depositing a barrier material over said refractory metal by a PVD technique whereby cusps of are formed at the mouths of said vertical walled openings; depositing a spin-on-glass (SOG) on said semiconductor wafer, whereby said SOG glass fills said vertical walled openings to above the lower portion of said cusps; partially curing said SOG; subjecting said semiconductor wafer to chemical-mechanical-polishing, until said SOG has been penetrated and said cusps are removed; removing said SOG; depositing a glue layer on said semiconductor wafer; depositing a metal layer over said glue layer; and etching said metal layer with a unidirectional dry etching technique to form metal plugs.
Claim 27
Dependent Claim
29 words
The method of claim 23 wherein said PVD technique is selected from the group consisting of rf sputtering, rf magnetron sputtering, dc sputtering, dc magnetron sputtering and vacuum evaporation.
Claim 28
Dependent Claim
17 words
The method of claim 23 wherein said insulative layer is between about 1.0 and 1.5 microns thick.
Claim 29
Dependent Claim
23 words
The method of claim 23 wherein said insulative layer is selected from the group consisting of silicon oxide, phosphosilicate glass, and borophosphosilicate glass.
Claim 30
Dependent Claim
28 words
The method of claim 23 wherein said refractory metal is selected from the group consisting of Ti and Pt, and is between about 400 and 800 Angstroms thick.
Claim 31
Dependent Claim
28 words
The method of claim 23 wherein said barrier material is selected from the group consisting of TiN and TiW, and is between about 1,500 and 2,500 Angstroms thick.
Claim 32
Dependent Claim
20 words
The method of claim 23 wherein said SOG is selected from the group consisting of a siloxane and a silicate.
Claim 33
Dependent Claim
19 words
The method of claim 23 wherein said glue layer is selected from the group consisting of Ti/TiN, and Ti/TiW.
Claim 34
Dependent Claim
40 words
The method of claim 30 wherein said metal layer is tungsten deposited at a temperature between about 440° C. and 480° C. in a cold walled, low temperature CVD system by the reduction of WF 6 with H 2 .
Claim 35
Dependent Claim
17 words
The method of claim 31 wherein said metal layer is between about 3,000 and 5,000 Angstroms thick.
Claim 36
Dependent Claim
11 words
The method of claim 23 wherein said glue layer is Ti.
Claim 37
Dependent Claim
15 words
The method of claim 33 wherein said metal layer is aluminum or an aluminum alloy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-18 | 2003-04-19 | 2003-10-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-18 | 2007-04-19 | 2007-10-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-18 | 2011-04-19 | 2011-10-19 | $7700.00 | Window Closed / Lapsed |