Patent US5968693A successfully refreshed from Google Patents.
US5968693A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Lithography tool adjustment utilizing latent imagery
Assignee: Old Carco LLC
•
Filing: 1999-02-09
•
Granted: 1999-10-19
•
Expires: 2019-02-09
Abstract
Abstract A method to achieve good stepper focus and exposure over an entire wafer for a particular mask level before the start of a product run is described. This method can also be used to produce a characterization of lens field curvature (i.e., a surface of optimum focus across the lens) and to characterize lens astigmatism, defocus sensitivity, relative resolution, and other characteristics, and to check the stepper for optical column tilt. The process prevents the complexities of resist development from affecting determination of focus. The process involves forming an array of latent images in a resist and examining the scattered light from the edges of the latent images. Analysis of the scattered light quickly provides information on correct exposure and focus together with lens characteristics over the printing field.
Inventors
- 👤 Thomas Evans Adams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 17:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G03F7/70216; G03F7/70241; G03F7/70591; G03F7/706; G03F7/70605; G03F7/70616; G03F7/70641; G03F7/70653; G03F7/70675; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7026
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
46 words
A method of lithography tool adjustment comprising: providing a lens system; providing a substrate having a resist; creating a latent image in said resist; interrogating said latent image to thereby determine a lens system parameter; adjusting said lens system or lithography tool to improve said parameter.
Claim 2
Independent Claim
46 words
A method of lithography tool adjustment comprising: providing a lens system; providing a substrate having a resist; creating a latent image in said resist; interrogating said latent image to thereby determine a lens system parameter; adjusting said lens system or lithography tool to improve said parameter.
Claim 3
Dependent Claim
31 words
The method of claim 1 in which said lens system parameter is chosen from the group consisting of astigmatism, defocus sensitivity, depth of focus, resolution, coma, spherical aberration, and field curvature.
Claim 4
Independent Claim
153 words
A method of lithography tool adjustment comprising: providing a lens system having a printing field; providing a substrate having a resist; forming at least two sets of pluralities of latent images, each plurality having a set of lines parallel to a lens radius and a set of lines perpendicular to said lens radius in said resist, each said latent image having an associated focus; interrogating each said latent image to determine its scattered energy as a function of its respective focus; in each plurality of images, for each set of parallel latent images and each set of perpendicular latent images, determining the respective maximum scattered energy; determining the maximum amount of defocus required to make the scattered energy from each set of parallel latent images nearly equal to the scattered energy from each set of perpendicular latent images, said maximum amount being here termed coma; adjusting said lens system to reduce said coma.
Claim 5
Independent Claim
153 words
A method of lithography tool adjustment comprising: providing a lens system having a printing field; providing a substrate having a resist; forming at least two sets of pluralities of latent images, each plurality having a set of lines parallel to a lens radius and a set of lines perpendicular to said lens radius in said resist, each said latent image having an associated focus; interrogating each said latent image to determine its scattered energy as a function of its respective focus; in each plurality of images, for each set of parallel latent images and each set of perpendicular latent images, determining the respective maximum scattered energy; determining the maximum amount of defocus required to make the scattered energy from each set of parallel latent images nearly equal to the scattered energy from each set of perpendicular latent images, said maximum amount being here termed coma; adjusting said lens system to reduce said coma.
Claim 6
Independent Claim
102 words
A method of lithography tool adjustment comprising: providing a multi-element lens system; providing a substrate having a resist; forming a multiplicity of pluralities of latent images in said resist, said multiplicity spanning a substantial portion of the printing field of said lens system, each of said pluralities being associated with a location in the said printing field; interrogating each said plurality of latent images to determine a preferred focus associated with each plurality; said preferred focuses being associated with locations in said printing field and defining a field curvature surface; adjusting said lens system to make said surface of preferred focus flatter.
Claim 7
Independent Claim
102 words
A method of lithography tool adjustment comprising: providing a multi-element lens system; providing a substrate having a resist; forming a multiplicity of pluralities of latent images in said resist, said multiplicity spanning a substantial portion of the printing field of said lens system, each of said pluralities being associated with a location in the said printing field; interrogating each said plurality of latent images to determine a preferred focus associated with each plurality; said preferred focuses being associated with locations in said printing field and defining a field curvature surface; adjusting said lens system to make said surface of preferred focus flatter.
Claim 8
Dependent Claim
41 words
The method of claim 4 wherein said lens system is exposed to incident energy starting at a first time and ending at a second time, and said field curvature surface is determined for both said first time and said second time.
Claim 9
Dependent Claim
41 words
The method of claim 4 wherein the temperature of said lens system is permitted to rise from a first temperature to a second temperature, and a said field curvature surface is determined for both said first temperature and said second temperature.
Claim 10
Independent Claim
137 words
A method comprising: providing a substrate, having a resist, to a lithography tool; forming a full field array having first elements of latent images in said resist; each first element of said full field array being a sub field array having second elements; each second element of said sub field array being a feature clump having third elements; each element of said feature clump being a feature group having fourth elements; each feature clump being characterized by at least one predetermined lithographic parameter; interrogating selected feature groups to measure scattered energy; displaying for each sub field array the scattered energy of each said feature group as a function of the associated lithographic parameter of its respective feature clump; adjusting said lithography tool so that the said scattered energies of selected feature groups tend towards a desired value.
Claim 11
Independent Claim
137 words
A method comprising: providing a substrate, having a resist, to a lithography tool; forming a full field array having first elements of latent images in said resist; each first element of said full field array being a sub field array having second elements; each second element of said sub field array being a feature clump having third elements; each element of said feature clump being a feature group having fourth elements; each feature clump being characterized by at least one predetermined lithographic parameter; interrogating selected feature groups to measure scattered energy; displaying for each sub field array the scattered energy of each said feature group as a function of the associated lithographic parameter of its respective feature clump; adjusting said lithography tool so that the said scattered energies of selected feature groups tend towards a desired value.
Claim 12
Dependent Claim
18 words
The method of claim 7 in which each of said feature groups is characterized by a different linewidth.
Claim 13
Dependent Claim
15 words
The method claim 7 in which each said full field array is a 7×7 array.
Claim 14
Dependent Claim
16 words
The method of claim 7 in which each said sub field array is a 4×4 array.
Claim 15
Dependent Claim
20 words
The method of claim 7 in which said lithographic parameter is chosen from the group consisting of focus and exposure.
References Cited (Backward Citations)
US4092164A
Cited
US4569717A
Cited
US4474864A
Cited
JPS60238836A
Cited
JPS61114529A
Cited
US4741622A
Cited
JPS61201427A
Cited
US4640619A
Cited
US4982226A
Cited
EP0338200A2
Cited
JPH0293877A
Cited
CH676395A5
Cited
US5124216A
Cited
US5674652A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-18 | 2003-04-19 | 2003-10-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-18 | 2007-04-19 | 2007-10-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-18 | 2011-04-19 | 2011-10-19 | $7700.00 | Window Closed / Lapsed |