US5959957A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe and a cantilever formed with same material
Assignee: Canon Inc
•
Filing: 1997-01-21
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Granted: 1999-09-28
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Expires: 2017-01-21
Abstract
Abstract A probe has a metal tip on a cantilever. A diffused layer made from a metal silicide is formed at an interface between the tip and the cantilever. In the diffused layer, a material for forming the cantilever and a material for forming the tip are diffused.
Inventors
- 👤 Tsutomu Ikeda
- 👤 Takayuki Yagi
- 👤 Yasuhiro Shimada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:32
CPC Classifications
G; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1409; G01; G01Q; G01Q60/00; G01Q60/02; G01Q60/04; G01Q70/00; G01Q70/08; G01Q70/14; G11B9/1418; B; B82; B82Y; B82Y10/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/873
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
41 words
A probe having a metal tip on a cantilever, comprising: a diffused layer which is formed at an interface between said tip and said cantilever and in which a material forming said cantilever and a material forming said tip are diffused.
Claim 2
Dependent Claim
41 words
A probe having a metal tip on a cantilever, comprising: a diffused layer which is formed at an interface between said tip and said cantilever and in which a material forming said cantilever and a material forming said tip are diffused.
Claim 3
Dependent Claim
14 words
A probe according to claim 1, wherein said cantilever is made from single-crystal Si.
Claim 4
Dependent Claim
28 words
A probe according to claim 2, wherein said tip is made from a material selected from the group consisting of Au, Pt, and Ir and an alloy thereof.
Claim 5
Dependent Claim
16 words
A probe according to claim 3, wherein said diffused layer is made from a metal silicide.
Claim 6
Independent Claim
67 words
A method of manufacturing a probe having a metal tip on a cantilever, comprising the steps of: forming a cantilever on a first substrate; forming a tip on a second substrate; and joining the tip to the cantilever by forming a diffused layer, in which a material forming the cantilever and a material forming the tip are diffused, at an interface between the tip and the cantilever.
Claim 7
Independent Claim
67 words
A method of manufacturing a probe having a metal tip on a cantilever, comprising the steps of: forming a cantilever on a first substrate; forming a tip on a second substrate; and joining the tip to the cantilever by forming a diffused layer, in which a material forming the cantilever and a material forming the tip are diffused, at an interface between the tip and the cantilever.
Claim 8
Dependent Claim
16 words
A method according to claim 5, wherein the diffused layer is made from a metal silicide.
Claim 9
Dependent Claim
68 words
A probe unit including a probe having a metal tip on a cantilever, comprising: a substrate on which a signal processing IC is formed; a cantilever supported by said substrate; a tip joined on said cantilever; and a diffused layer which is formed at an interface between said tip and said cantilever and in which a material forming said cantilever and a material forming said tip are diffused.
Claim 10
Dependent Claim
68 words
A probe unit including a probe having a metal tip on a cantilever, comprising: a substrate on which a signal processing IC is formed; a cantilever supported by said substrate; a tip joined on said cantilever; and a diffused layer which is formed at an interface between said tip and said cantilever and in which a material forming said cantilever and a material forming said tip are diffused.
Claim 11
Dependent Claim
15 words
A probe unit according to claim 7, wherein said substrate is a single-crystal Si substrate.
Claim 12
Dependent Claim
98 words
An information recording/reproducing apparatus for performing recording and reproduction of information on a recording medium by using a probe having a metal tip on a cantilever, comprising: a probe unit comprising a substrate on which a signal processing IC is formed, a cantilever supported by said substrate, a tip joined on said cantilever, and a diffused layer which is formed at an interface between said tip and said cantilever and in which a material forming said cantilever and a material forming said tip are diffused; and means for applying a voltage between said tip and said recording medium.
Claim 13
Dependent Claim
98 words
An information recording/reproducing apparatus for performing recording and reproduction of information on a recording medium by using a probe having a metal tip on a cantilever, comprising: a probe unit comprising a substrate on which a signal processing IC is formed, a cantilever supported by said substrate, a tip joined on said cantilever, and a diffused layer which is formed at an interface between said tip and said cantilever and in which a material forming said cantilever and a material forming said tip are diffused; and means for applying a voltage between said tip and said recording medium.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-27 | 2003-03-29 | 2003-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-27 | 2007-03-29 | 2007-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-27 | 2011-03-29 | 2011-09-28 | $7700.00 | Window Closed / Lapsed |