US5546375A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing a tip for scanning tunneling microscope using peeling layer
Assignee: Canon Inc
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Filing: 1995-11-08
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Granted: 1996-08-13
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Expires: 2015-11-08
Abstract
Abstract After a recessed portion 2 is formed in a first substrate made of single crystal silicon by crystal axis anisotropic etching, a peeling layer and a material of a fine tip which may be a noble metal or a noble metal alloy are formed. A second substrate is joined to the fine tip, and peeling is performed on the peeling layer, whereby the fine tip is formed on the second substrate.
Inventors
- 👤 Yasuhiro Shimada
- 👤 Yoshimasa Okamura
- 👤 Osamu Takamatsu
- 👤 Masaru Nakayama
- 👤 Yoshihiro Yanagisawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:21
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/04; B; B82; B82Y; B82Y35/00; G01Q60/00; G01Q60/10; G01Q60/16; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1409; G11B9/1418; B82Y10/00; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/875; Y10S977/888
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
101 words
A method of manufacturing a fine tip for detecting a fine current or force, said method comprising at least the following steps of: (a) forming a recessed portion in a surface of a first substrate; (b) forming a peeling layer on said first substrate; (c) laminating a fine tip material on said peeling layer; (d) joining said fine tip on said peeling layer to a second substrate; and (e) performing a peeling on an interface between said peeling layer and said first substrate or between said peeling layer and said fine tip to transfer said fine tip onto said second substrate.
Claim 2
Independent Claim
101 words
A method of manufacturing a fine tip for detecting a fine current or force, said method comprising at least the following steps of: (a) forming a recessed portion in a surface of a first substrate; (b) forming a peeling layer on said first substrate; (c) laminating a fine tip material on said peeling layer; (d) joining said fine tip on said peeling layer to a second substrate; and (e) performing a peeling on an interface between said peeling layer and said first substrate or between said peeling layer and said fine tip to transfer said fine tip onto said second substrate.
Claim 3
Dependent Claim
21 words
The fine tip manufacturing method according to claim 1, wherein said second substrate has a signal processing circuit element formed thereon.
Claim 4
Dependent Claim
30 words
The fine tip manufacturing method according to claim 1, wherein said first substrate is a single crystal substrate, and wherein said recessed portion is formed by crystal axis anisotropic etching.
Claim 5
Dependent Claim
30 words
The fine tip manufacturing method according to claim 2, wherein said first substrate is a single crystal substrate, and wherein said recessed portion is formed by crystal axis anisotropic etching.
Claim 6
Dependent Claim
23 words
The fine tip manufacturing method according to claim 1, wherein said fine tip material is a noble metal or a noble metal alloy.
Claim 7
Dependent Claim
23 words
The fine tip manufacturing method according to claim 2, wherein said fine tip material is a noble metal or a noble metal alloy.
Claim 8
Dependent Claim
23 words
The fine tip manufacturing method according to claim 3, wherein said fine tip material is a noble metal or a noble metal alloy.
Claim 9
Dependent Claim
17 words
A fine tip manufactured by the fine tip manufacturing method set forth in one of claims 1-7.
Claim 10
Independent Claim
109 words
A method of manufacturing a probe unit comprising a lever including a fine tip for detecting a tunneling current or minute force, said method comprising the steps of: (a) forming a recessed portion in a surface of a first substrate; (b) forming a peeling layer on said first substrate; (c) providing a fine tip material on said peeling layer; (d) joining said fine tip on said peeling layer to a lever provided on a second substrate; and (e) performing a peeling on an interface between said peeling layer and said first substrate or between said peeling layer and said fine tip to transfer said fine tip onto said lever.
Claim 11
Independent Claim
109 words
A method of manufacturing a probe unit comprising a lever including a fine tip for detecting a tunneling current or minute force, said method comprising the steps of: (a) forming a recessed portion in a surface of a first substrate; (b) forming a peeling layer on said first substrate; (c) providing a fine tip material on said peeling layer; (d) joining said fine tip on said peeling layer to a lever provided on a second substrate; and (e) performing a peeling on an interface between said peeling layer and said first substrate or between said peeling layer and said fine tip to transfer said fine tip onto said lever.
Claim 12
Dependent Claim
18 words
The method according to claim 9, wherein said second substrate has a signal processing circuit element formed thereon.
Claim 13
Dependent Claim
27 words
The method according to claim 9, wherein said first substrate is a single crystal substrate, and wherein said recessed portion is formed by crystal axis anisotropic etching.
Claim 14
Dependent Claim
20 words
The method according to claim 9, wherein said fine tip material is a noble metal or a noble metal alloy.
Claim 15
Dependent Claim
14 words
The method according to claim 12, wherein the noble metal is Au or Pt.
Claim 16
Dependent Claim
14 words
The method according to claim 9, wherein the peeling layer comprises Ag or Cr.
Claim 17
Dependent Claim
15 words
A probe unit manufactured by the probe unit manufacturing method set forth in claim 9.
Claim 18
Dependent Claim
62 words
A scanning tunneling microscope comprising: (a) said probe unit set forth in claim 15; (b) driving means for displacing said probe unit; (c) control means for controlling said driving means; (d) a sample; (e) means for adjusting a distance between said tip in said probe unit and the sample; and (f) means for applying a voltage between said tip and the sample.
Claim 19
Dependent Claim
61 words
A data processing apparatus comprising: (a) said probe unit set forth in claim 15; (b) driving means for displacing said probe unit; (c) control means for controlling said driving means; (d) a recording medium; (e) means for adjusting a distance between said tip and the recording medium; and (f) means for applying a voltage between said tip and the recording medium.
Claim 20
Dependent Claim
19 words
The data processing apparatus according to claim 17, wherein said voltage application means is a pulse voltage application means.
Claim 21
Dependent Claim
19 words
The data processing apparatus according to claim 17, wherein said voltage application means is a bias voltage application means.
Claim 22
Dependent Claim
50 words
The scanning tunneling microscope according to claim 16, wherein said control means changes a bias voltage which displaces said lever of said probe unit based on detection of a fine current which flows between the recording sample and said fine tip and applies a bias voltage signal to said lever.
Claim 23
Dependent Claim
50 words
The data processing apparatus according to claim 17, wherein said control means changes a bias voltage which displaces said lever of said probe unit based on detection of a fine current which flows between the recording medium and said fine tip and applies a bias voltage signal to said lever.
Claim 24
Dependent Claim
17 words
The data processing apparatus according to claim 17, wherein the recording medium has an electric memory effect.
Claim 25
Dependent Claim
16 words
The data processing apparatus according to claim 17, wherein the recording medium has a non-conductive surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-13 | 2000-02-12 | 2000-08-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-13 | 2004-02-12 | 2004-08-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-13 | 2008-02-12 | 2008-08-13 | $7700.00 | Window Closed / Lapsed |