US5116462A
Expired / Lapsed
US
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Method of producing micromechanical sensors for the afm/stm profilometry
Assignee: International Business Machines Corp
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Filing: 1990-08-16
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Granted: 1992-05-26
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Expires: 2010-08-16
Abstract
Abstract A micromechanical sensor is described for the AFM/STM profilometry, incorporating a cantilever beam with at least one tip at its end and a mounting block at the opposite end. A method is described incorporating the steps of coating a wafer substrate with an insulating layer, forming a mask in the insulating layer, etching a trench in the wafer substrate, removing the insulating layer, coating the desired cantilever beam and tip material, respectively, etching the cantilever beam and tip material, and removing at least a portion of the supporting wafer material from the bottom side. The invention overcomes the problem of forming a micromechanical sensor having a cantilever beam, a tip with a predetermined shape and a mounting block.
Inventors
- 👤 Johann W. Bartha
- 👤 Thomas Bayer
- 👤 Johann Greschner
- 👤 Georg Kraus
- 👤 Helga Weiss
- 👤 Olaf Wolter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:11
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/02; G01Q60/04; G01Q70/00; G01Q70/16
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
175 words
A method of producing micromechanical sensors for the AFM/STM profilometry, which consist of a cantilever beam with at least one tip at its end and a mounting piece at the opposite, comprising the following steps: first, coating the top and bottom sides of a wafer substrate to form a first and second insulating layer respectively; second, producing a mask in said first insulating layer on the top side of the wafer third, producing a mask in said second insulating layer on the bottom side of the wafer; fourth, etching a trench in the wafer substrate utilizing said first layer mask; fifth, removing said first insulating layer from the top side of said wafer substrate by etching; sixth, coating the top side of the wafer and the trench with the desired. cantilever beam and tip material respectively; seventh, forming said cantilever beam and tip in a second photolithographic step and dry or wet etching steps, respectively; and eighth, removing the supporting wafer material from the bottom side of said wafer by etching through said second layer.
Claim 2
Independent Claim
175 words
A method of producing micromechanical sensors for the AFM/STM profilometry, which consist of a cantilever beam with at least one tip at its end and a mounting piece at the opposite, comprising the following steps: first, coating the top and bottom sides of a wafer substrate to form a first and second insulating layer respectively; second, producing a mask in said first insulating layer on the top side of the wafer third, producing a mask in said second insulating layer on the bottom side of the wafer; fourth, etching a trench in the wafer substrate utilizing said first layer mask; fifth, removing said first insulating layer from the top side of said wafer substrate by etching; sixth, coating the top side of the wafer and the trench with the desired. cantilever beam and tip material respectively; seventh, forming said cantilever beam and tip in a second photolithographic step and dry or wet etching steps, respectively; and eighth, removing the supporting wafer material from the bottom side of said wafer by etching through said second layer.
Claim 3
Dependent Claim
23 words
The method of claim 1, wherein the wafer substrate is selected from the group consisting of monocrystalline silicon, silicon dioxide, GaAs, and polyimide.
Claim 4
Dependent Claim
29 words
The method of claim 1, wherein said step of second producing includes the ninth step of producing a silicon dioxide layer to a layer thickness of about 1 μm.
Claim 5
Dependent Claim
59 words
The method of claim 3, wherein said ninth step includes a tenth step of applying about 3 μm thick photoresist layer to the silicon dioxide layer on the top side of the wafer, and wherein said second producing step includes an eleventh photographic step whereby the desired mask pattern is defined in said photoresist layer on the top side.
Claim 6
Dependent Claim
31 words
The method of claim 4, wherein said step of second producing includes a twelfth step of transferring said mask pattern in the photoresist layer into said silicon dioxide layer by etching.
Claim 7
Dependent Claim
36 words
The method of claim 5, wherein said tenth step, said eleventh photolithographic step and said twelfth step of transferring are simultaneously made respectively in the second insulating layer on the bottom side of said wafer substrate.
Claim 8
Dependent Claim
49 words
The method of claim 1, wherein a trench is etched into the silicon wafer substrate to a depth in the range of about 2 to 20 μm by reactive ion etching with 10% of total flow chlorine/residue argon as etch gas, and with a pressure of about 100.sup.μ bar.
Claim 9
Dependent Claim
26 words
The method of claim 1, wherein a pyramidal shaped groove is etched into the silicon wafer substrate by anisotropic wet etching with an aqueous KOH solution.
Claim 10
Dependent Claim
29 words
The method of claim 1, wherein the silicon dioxide layer is removed from the top side of the wafer by wet etching with 5 : 1 buffered hydrofluoric acid.
Claim 11
Dependent Claim
54 words
The method of claim 8, wherein the wafer surface including said deep trench or said pyramidal shaped groove is coated with the cantilever beam and tip material which is selected from the group consisting of thermally grown silicon dioxide, PECVD silicon dioxide, diamond-like carbon, CVD silicon nitride, CVD silicon carbide and PECVD silicon carbide.
Claim 12
Dependent Claim
45 words
The method of claim 10, wherein the wafer surface is coated with silicon nitride which is deposited from a SiC1 2 H 2 , ammonia, and argon containing atmosphere at a pressure of about 0.25 to 1.3 mbar, and a temperature of about 625° C.
Claim 13
Dependent Claim
40 words
The method of claim 11, wherein the silicon nitride cantilever beam including the tip is bared in a second photolithographic step, followed by reactive ion etching with CF 4 as etch gas, and with a pressure of about 50 μbar.
Claim 14
Dependent Claim
28 words
The method of claim 1, wherein the supporting silicon wafer material is removed from the bottom side by anisotropic wet etching with an aqueous KOH solution (37.5 wt%).
Claim 15
Dependent Claim
48 words
The method of claim 1, further comprising the steps of bonding the area on the top side of the cantilever beam corresponding to the remaining piece of wafer on the bottom side with a block of glass, and subsequently removing the remaining piece of wafer by selective etching.
Claim 16
Dependent Claim
35 words
The method of claim 14, wherein the block of glass is bonded with the cantilever beam via `mallory` bonding at a temperature of about 300° C. and by applying a voltage of about 1000 V.
Claim 17
Dependent Claim
64 words
The method of claim 1, further comprising the steps of: coating the surface of the wafer and the trench with several layers of different materials; baring cantilever beam and tip in the top layer by a second photolithographic step and dry or wet etching steps, respectively; and removing the supporting wafer material and the respective layers by selective etching through the bottom side mask.
Claim 18
Dependent Claim
42 words
The method of claim 16, wherein the surface of the wafer substrate and the trench is coated in a first step with a material which shows nonconformal step coverage, and in a second step with a material which shows conformal step coverage.
Claim 19
Dependent Claim
31 words
The method of claim 17, wherein the material with nonconformal step coverage during plasma deposition is selected from the group consisting of silicon nitride, silicon dioxide, amorphous silicon, and tungsten silicide.
Claim 20
Dependent Claim
97 words
The method of claim 16, wherein the surface of the silicon wafer substrate and the trench is coated in a first step with PECVD silicon nitride, and in a second step with poly-silicon; the cantilever beam and the tip are bared in the polysilicon layer by photolithography and reactive ion etching with CF 4 as etch gas, and with a pressure of about 25 μbar; and wherein the silicon wafer substrate and the silicon nitride layer are removed by wet etching through the bottom side mask with aqueous KOH solution, and concentrated aqueous hydrogen fluoride solution, respectively.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-26 | 1995-11-25 | 1996-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-26 | 1999-11-25 | 2000-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-26 | 2003-11-25 | 2004-05-26 | $7700.00 | Window Closed / Lapsed |