US5321685A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same
Assignee: Canon Inc
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Filing: 1992-11-20
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Granted: 1994-06-14
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Expires: 2012-11-20
Abstract
Abstract A cantilever type probe comprising a piezoelectric bimorph cantilever containing a piezoelectric material provided between driving electrodes for driving a cantilever, a probe formed thereon and a drawing electrode for a probe provided along the surface where a probe is formed, wherein there is provided a shielding electrode for electrically isolating the probe and the drawing electrode from the driving electrodes.
Inventors
- 👤 Hiroyasu Nose
- 👤 Kunihiro Sakai
- 👤 Toshimitsu Kawase
- 👤 Toshihiko Miyazaki
- 👤 Katsuhiko Shinjo
- 👤 Yutaka Hirai
- 👤 Takayuki Yagi
- 👤 Katsunori Hatanaka
- 👤 Keisuke Yamamoto
- 👤 Yuki Kasanuki
- 👤 Yoshio Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:55
CPC Classifications
G; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1409; B; B82; B82Y; B82Y35/00; G01; G01Q; G01Q10/00; G01Q10/04; G01Q10/045; G01Q60/00; G01Q60/10; G01Q60/16; G11B9/1418; G11B9/1427; G11B9/1436; B82Y10/00; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/724; Y10S977/732; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/873; Y10S977/88; Y10S977/881; Y10S977/902; Y10S977/932; Y10S977/943; Y10S977/947
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
133 words
A cantilever probe, comprising: a piezoelectric bimorph cantilever, said cantilever containing a plurality of driving electrodes for receiving driving signals and a piezoelectric material provided between three pairs of said driving electrodes each of which is divided in the longitudinal direction of a corresponding plane; and a probe and a drawing electrode for the probe formed on a common plane as one of the three pairs of driving electrodes which is located on an uppermost layer, wherein a first shielding electrode which electrically isolates the probe member and the drawing electrode from the driving electrode is provided in the same plane as another one of the three pairs of driving electrodes which are located on an intermediate portion of the cantilever and below the common plane of the probe and the drawing electrode.
Claim 2
Dependent Claim
133 words
A cantilever probe, comprising: a piezoelectric bimorph cantilever, said cantilever containing a plurality of driving electrodes for receiving driving signals and a piezoelectric material provided between three pairs of said driving electrodes each of which is divided in the longitudinal direction of a corresponding plane; and a probe and a drawing electrode for the probe formed on a common plane as one of the three pairs of driving electrodes which is located on an uppermost layer, wherein a first shielding electrode which electrically isolates the probe member and the drawing electrode from the driving electrode is provided in the same plane as another one of the three pairs of driving electrodes which are located on an intermediate portion of the cantilever and below the common plane of the probe and the drawing electrode.
Claim 3
Dependent Claim
30 words
A cantilever probe according to claim 1, wherein there is further provided a second shielding electrode to sandwich the probe and the drawing electrode together with the first shielding electrode.
Claim 4
Dependent Claim
138 words
An information processing apparatus comprising a cantilever probe, comprising: a piezoelectric bimorph cantilever, said cantilever containing a plurality of driving electrodes for receiving driving signals and a piezoelectric material provided between three pairs of said driving electrodes each of which is divided in the longitudinal direction of a corresponding plane; and a probe and a drawing electrode for the probe formed on a common plane as one of the three pairs of driving electrodes which is located on an uppermost layer, wherein a first shielding electrode which electrically isolates the probe member and the drawing electrode from the driving electrode is provided in the same plane as another one of the three pairs of driving electrodes which are located on an intermediate portion of the cantilever and below the common plane of the probe and the drawing electrode.
Claim 5
Dependent Claim
138 words
An information processing apparatus comprising a cantilever probe, comprising: a piezoelectric bimorph cantilever, said cantilever containing a plurality of driving electrodes for receiving driving signals and a piezoelectric material provided between three pairs of said driving electrodes each of which is divided in the longitudinal direction of a corresponding plane; and a probe and a drawing electrode for the probe formed on a common plane as one of the three pairs of driving electrodes which is located on an uppermost layer, wherein a first shielding electrode which electrically isolates the probe member and the drawing electrode from the driving electrode is provided in the same plane as another one of the three pairs of driving electrodes which are located on an intermediate portion of the cantilever and below the common plane of the probe and the drawing electrode.
Claim 6
Dependent Claim
35 words
An information processing apparatus comprising a cantilever probe according to claim 3, wherein there is further provided a second shielding electrode to sandwich the probe and the drawing electrode together with the first shielding electrode.
References Cited (Backward Citations)
US4680769A
Cited
US4747650A
Cited
US4831614A
Cited
JPH01179488A
Cited
JPH01186695A
Cited
WO1989007258A2
Cited
US4904045A
Cited
US4880975A
Cited
JPH0291836A
Cited
US4998016A
Cited
US5053995A
Cited
US5079958A
Cited
US5047637A
Cited
US5075548A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-13 | 1997-12-13 | 1998-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-13 | 2001-12-13 | 2002-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-13 | 2005-12-13 | 2006-06-14 | $7700.00 | Window Closed / Lapsed |