US5958800A
Expired / Lapsed
US
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Method for post planarization metal photolithography
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1999-03-31
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Granted: 1999-09-28
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Expires: 2019-03-31
Abstract
Abstract A method of removing a planarized insulating layer from over an alignment mark on a wafer. The invention allows steppers to see alignment marks without the difficulty of viewing the alignment marks through the insulating layer overlying the alignment marks. The method begins by chemical mechanical polishing a conformal oxide layer over a substrate. Next, a first photoresist layer is formed over the conformal oxide layer. Then vias are etched in the conformal oxide layer in the device area and etch the conformal oxide layer in the alignment mark area. Subsequently, we form a second photoresist layer over the first photoresist layer and the conformal oxide layer. The second photoresist layer filling the vias, but not the alignment mark resist opening. Then etch the second photoresist layer leaving sidewall spacers on the sidewall of the first photoresist layer in the alignment mark area and leaving photoresist plugs filling the vias. Next, anisotropically etch the conformal oxide layer in the alignment mark area exposing the alignment mark patterns. Then, a metal layer is formed over the surface. The metal layer is patterned.
Inventors
- 👤 Chen-Hua Yu
- 👤 Syun-Ming Jang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:50
CPC Classifications
H; H10; H10W; H10W46/00; H10W46/101; H10W46/501; Y; Y10; Y10S; Y10S438/00; Y10S438/975
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
248 words
A method of removing an insulating layer from over an alignment mark area on said substrate, the method comprising: a) providing a semiconductor structure with a device area and an alignment mark area, said alignment mark area containing alignment mark patterns over said substrate; said device area having conductive lines over said substrate surface; b) forming a conformal insulating layer over the semiconductor structure surface; c) planarizing said conformal insulating layer; d) forming a first photoresist layer over said conformal insulating layer, said first photoresist layer having via openings over said conductive lines in said device area and an alignment mark resist opening over said alignment mark area; e) etching vias in said conformal insulating layer in said device area and etching alignment mark openings in said conformal insulating layer in said alignment mark area; said alignment mark opening has a larger diameter than said vias; f) forming a second photoresist layer over said first photoresist layer and said conformal oxide layer, said second photoresist layer filling said vias, and covering said conformal insulating layer in said alignment mark opening; g) etching said second photoresist layer leaving sidewall spacers on the sidewall of said first photoresist layer in said alignment mark area and leaving photoresist plugs filling said vias; h) etching said conformal insulating layer in said alignment mark area exposing said alignment mark patterns; i) removing said first photoresist layer and said second photoresist layer exposing said alignment mark patterns and said conductive lines under said vias.
Claim 2
Independent Claim
248 words
A method of removing an insulating layer from over an alignment mark area on said substrate, the method comprising: a) providing a semiconductor structure with a device area and an alignment mark area, said alignment mark area containing alignment mark patterns over said substrate; said device area having conductive lines over said substrate surface; b) forming a conformal insulating layer over the semiconductor structure surface; c) planarizing said conformal insulating layer; d) forming a first photoresist layer over said conformal insulating layer, said first photoresist layer having via openings over said conductive lines in said device area and an alignment mark resist opening over said alignment mark area; e) etching vias in said conformal insulating layer in said device area and etching alignment mark openings in said conformal insulating layer in said alignment mark area; said alignment mark opening has a larger diameter than said vias; f) forming a second photoresist layer over said first photoresist layer and said conformal oxide layer, said second photoresist layer filling said vias, and covering said conformal insulating layer in said alignment mark opening; g) etching said second photoresist layer leaving sidewall spacers on the sidewall of said first photoresist layer in said alignment mark area and leaving photoresist plugs filling said vias; h) etching said conformal insulating layer in said alignment mark area exposing said alignment mark patterns; i) removing said first photoresist layer and said second photoresist layer exposing said alignment mark patterns and said conductive lines under said vias.
Claim 3
Dependent Claim
77 words
The method of claim 1 which further includes: a) forming a metal layer over the said alignment mark patterns and covering said vias; b) forming a third photoresist layer over said metal layer, said third photoresist layer having a first opening over said alignment mark area; c) etching said metal layer using said third photoresist layer as a mask and removing said metal layer from over said alignment mark patterns; and d) removing said third photoresist layer.
Claim 4
Dependent Claim
111 words
The method of claim 1 which further includes: a) forming a metal layer over the said alignment mark patterns and covering said vias; b) forming a third photoresist layer over said metal layer, said third photoresist layer having a first opening over said alignment mark area; said first opening in said third photoresist layer is formed by exposing, developing and etching said third photoresist layer; said exposure performed by a stepper using said alignment mark patterns to align said stepper; c) etching said metal layer using said third photoresist layer as a mask and removing said metal layer from over said alignment mark patterns; and d) removing said third photoresist layer.
Claim 5
Dependent Claim
33 words
The method of claim 1 wherein step (c) comprises: chemical-mechanical polishing said conformal insulating layer, where the remaining conformal insulating layer is thicker over said alignment mark area than over said device area.
Claim 6
Dependent Claim
26 words
The method of claim 1 wherein said conductive lines are formed of a material selected from the group consisting of polysilicon, tungsten silicide, AlCu and AlSiCu.
Claim 7
Dependent Claim
37 words
The method of claim 1 wherein said alignment mark patterns have a height in the range of between about 1100 Å and 1300 Å and a width in the range of between about 7 and 11 μm.
Claim 8
Dependent Claim
26 words
The method of claim 1 wherein said alignment mark area has a length and a width in the range of between about 270 and 460 μm.
Claim 9
Dependent Claim
39 words
The method of claim 1 wherein said conformal insulating layer is formed of a material selected from the group consisting of silicon oxide and spin-on-glass, and has a thickness in the range of between about 20,000 and 25,000 Å.
Claim 10
Dependent Claim
53 words
The method of claim 1 wherein after the planarization of said conformal insulating layer, said conformal insulating layer has a thickness, in said alignment mark area in a range of between about 11,000 and 16,000 Å and a thickness in said device area in the range of between about 8000 and 12,000 Å.
Claim 11
Dependent Claim
21 words
The method of claim 1 wherein said vias have a diameter in the range of between about 0.35 and 0.5 μm.
Claim 12
Dependent Claim
23 words
The method of claim 1 wherein said second photoresist layer has a thickness in the range of between about 1000 and 3000 Å.
Claim 13
Independent Claim
362 words
A method of forming a metal layer over a planarized insulating layer on a substrate and removing said insulating layer from an alignment mark area on said substrate, the method comprising: a) providing a substrate with a device area and an alignment mark area said alignment mark area containing alignment mark patterns over said substrate, said device area having conductive lines over said substrate surface; b) forming a conformal oxide layer over the substrate surface; c) chemical mechanical polishing said conformal oxide layer, the remaining conformal oxide layer is thicker over said alignment mark area than over said device area; d) forming a first photoresist layer over said conformal oxide layer said first photoresist layer having via openings over said conductive lines in said device area and an alignment mark resist opening over said alignment mark area; said alignment mark resist opening has a diameter larger than the diameters of said vias openings; e) anisotropically etching vias in said conformal oxide layer in said device area and partially etching an alignment mark opening said conformal oxide layer in said alignment mark area; f) forming a second photoresist layer over said first photoresist layer and said conformal oxide layer, said second photoresist layer filling said vias, and covering said conformal oxide layer in said alignment mark opening; g) anisotropically etching said second photoresist layer leaving sidewall spacers on the sidewall of said first photoresist layer and said alignment mark opening in said alignment mark area and leaving photoresist plugs filling said vias; h) etching said conformal oxide layer in said alignment mark area to form an alignment mark opening exposing said alignment mark patterns; i) removing said first photoresist layer and said second photoresist layer exposing said alignment mark pattern and said conductive lines under said vias; j) forming a metal layer over the said alignment mark patterns and filling said vias; k) forming a third photoresist layer over said metal layer, said third photoresist layer having an opening over said alignment mark opening; l) etching said metal layer using said third photoresist layer as a mask and removing said metal layer over said alignment marks; and m) removing said third photoresist layer.
Claim 14
Independent Claim
362 words
A method of forming a metal layer over a planarized insulating layer on a substrate and removing said insulating layer from an alignment mark area on said substrate, the method comprising: a) providing a substrate with a device area and an alignment mark area said alignment mark area containing alignment mark patterns over said substrate, said device area having conductive lines over said substrate surface; b) forming a conformal oxide layer over the substrate surface; c) chemical mechanical polishing said conformal oxide layer, the remaining conformal oxide layer is thicker over said alignment mark area than over said device area; d) forming a first photoresist layer over said conformal oxide layer said first photoresist layer having via openings over said conductive lines in said device area and an alignment mark resist opening over said alignment mark area; said alignment mark resist opening has a diameter larger than the diameters of said vias openings; e) anisotropically etching vias in said conformal oxide layer in said device area and partially etching an alignment mark opening said conformal oxide layer in said alignment mark area; f) forming a second photoresist layer over said first photoresist layer and said conformal oxide layer, said second photoresist layer filling said vias, and covering said conformal oxide layer in said alignment mark opening; g) anisotropically etching said second photoresist layer leaving sidewall spacers on the sidewall of said first photoresist layer and said alignment mark opening in said alignment mark area and leaving photoresist plugs filling said vias; h) etching said conformal oxide layer in said alignment mark area to form an alignment mark opening exposing said alignment mark patterns; i) removing said first photoresist layer and said second photoresist layer exposing said alignment mark pattern and said conductive lines under said vias; j) forming a metal layer over the said alignment mark patterns and filling said vias; k) forming a third photoresist layer over said metal layer, said third photoresist layer having an opening over said alignment mark opening; l) etching said metal layer using said third photoresist layer as a mask and removing said metal layer over said alignment marks; and m) removing said third photoresist layer.
Claim 15
Dependent Claim
40 words
The method of claim 12 where in said opening in said third photoresist layer is formed by exposing, developing and etching said third photoresist layer; said exposure performed by a stepper using said alignment mark patterns to align said stepper.
Claim 16
Dependent Claim
26 words
The method of claim 12 wherein said conductive lines are formed of a material selected from the group consisting of polysilicon, tungsten silicide, AlCu and AlSiCu.
Claim 17
Dependent Claim
37 words
The method of claim 12 wherein said alignment mark patterns have a height in the range of between about 1100 Å and 1300 Å and a width in the range of between about 7 and 11 μm.
Claim 18
Dependent Claim
26 words
The method of claim 12 wherein said alignment mark area has a length and a width in the range of between about 270 and 460 μm.
Claim 19
Dependent Claim
39 words
The method of claim 12 wherein said conformal insulating layer is formed of a material selected from the group consisting of silicon oxide and spin-on-glass, and has a thickness in the range of between about 20,000 and 25,000 Å.
Claim 20
Dependent Claim
53 words
The method of claim 12 wherein after the planarization of said conformal insulating layer, said conformal insulating layer has a thickness, in said alignment mark area in the range of between about 11,000 and 16,000 Å and a thickness in said device area in the range of between about 8000 and 12,000 Å.
Claim 21
Dependent Claim
21 words
The method of claim 12 wherein said vias have a diameter in the range of between about 0.35 and 0.5 μm.
Claim 22
Dependent Claim
23 words
The method of claim 12 wherein said second photoresist layer has a thickness in the range of between about 1000 and 3000 Å.
References Cited (Backward Citations)
US5635337A
Cited
US5393233A
Cited
US5401691A
Cited
US5503962A
Cited
US5456756A
Cited
US5741626A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-27 | 2003-03-29 | 2003-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-27 | 2007-03-29 | 2007-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-27 | 2011-03-29 | 2011-09-28 | $7700.00 | Window Closed / Lapsed |