US5456756A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Holding apparatus, a metal deposition system, and a wafer processing method which preserve topographical marks on a semiconductor wafer
Assignee: GlobalFoundries Inc
•
Filing: 1994-09-02
•
Granted: 1995-10-10
•
Expires: 2014-09-02
Abstract
Abstract A holding apparatus, a metal deposition system and a wafer processing method which preserve topographical marks, including those used as alignment targets, on a semiconductor wafer by preventing metal from depositing on such marks during metal deposition. The invention eliminates the need to use window mask and etch techniques to provide replication of topographical marks on a newly formed metal layer when a CMP planarization technique is used prior to metal deposition. As a result, cost, cycle time and yield loss due to the additional window mask and etch steps can be eliminated. The holding apparatus includes a wafer retainer for retaining a wafer which has at least one topographical mark and a clamp ring with at least one tab. The wafer is pressed against the clamp ring by the retainer for securing the wafer in the retainer. Each tab is positioned directly above a corresponding one of the topographical mark and has an area big enough to cover such mark for avoiding metal being deposited on such mark during metal deposition of the wafer. The metal deposition system comprises a depositing system for depositing a layer of a selected metal onto the wafer. The metal deposition system also includes a holding apparatus constructed in accordance with the present invention for holding the wafer during metal deposition. The processing method comprises forming an optically transparent oxide layer over the wafer which includes at least one topographical mark and providing a metallized layer over the wafer except over such mark.
Inventors
- 👤 Seshadri Ramaswami
- 👤 Darin A. Chan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:34
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; H10P72/7614; H10W; H10W46/00; H10W46/201
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
125 words
An apparatus for holding a semiconductor wafer during metal deposition thereon, the wafer having at least one topographical mark, comprising: a wafer retainer for retaining the wafer; and a clamp ring having at least one tab, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said at least one tab on said clamp ring being positioned to be located directly above a corresponding one of the at least one topographical mark and having an area big enough to cover each of the corresponding one of the at least one topographical mark for avoiding metal being deposited on each one of the at least one topographical mark during metal deposition of the wafer.
Claim 2
Independent Claim
125 words
An apparatus for holding a semiconductor wafer during metal deposition thereon, the wafer having at least one topographical mark, comprising: a wafer retainer for retaining the wafer; and a clamp ring having at least one tab, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said at least one tab on said clamp ring being positioned to be located directly above a corresponding one of the at least one topographical mark and having an area big enough to cover each of the corresponding one of the at least one topographical mark for avoiding metal being deposited on each one of the at least one topographical mark during metal deposition of the wafer.
Claim 3
Independent Claim
120 words
An apparatus for holding a semiconductor wafer during metal deposition thereon, the wafer having a plurality of alignment targets, comprising: a wafer retainer for retaining the wafer; and a clamp ring having a plurality of tabs, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one of the plurality of alignment targets and having an area big enough to cover each of the corresponding one of the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 4
Independent Claim
120 words
An apparatus for holding a semiconductor wafer during metal deposition thereon, the wafer having a plurality of alignment targets, comprising: a wafer retainer for retaining the wafer; and a clamp ring having a plurality of tabs, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one of the plurality of alignment targets and having an area big enough to cover each of the corresponding one of the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 5
Dependent Claim
19 words
The holding apparatus as recited in claim 2, wherein said plurality of tabs are integral with said clamp ring.
Claim 6
Dependent Claim
21 words
The holding apparatus as recited in claim 2, wherein said clamp ring and said plurality of tabs are formed of metal.
Claim 7
Dependent Claim
21 words
The holding apparatus as recited in claim 4, wherein said clamp ring and said plurality of tabs are formed of titanium.
Claim 8
Independent Claim
140 words
An apparatus for holding a semiconductor wafer during metal deposition thereon, the wafer having a plurality of alignment targets, comprising: a wafer retainer for retaining the wafer, and a clamp ring having a plurality of tabs, said plurality of tabs being integral with said clamp ring, wherein said clamp ring and tabs are formed of metal, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one of the plurality of alignment targets and having an area big enough to cover each of the corresponding one of the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 9
Independent Claim
140 words
An apparatus for holding a semiconductor wafer during metal deposition thereon, the wafer having a plurality of alignment targets, comprising: a wafer retainer for retaining the wafer, and a clamp ring having a plurality of tabs, said plurality of tabs being integral with said clamp ring, wherein said clamp ring and tabs are formed of metal, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one of the plurality of alignment targets and having an area big enough to cover each of the corresponding one of the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 10
Dependent Claim
20 words
The apparatus as recited in claim 6, wherein said clamp ring and said plurality of tabs are formed of titanium.
Claim 11
Dependent Claim
154 words
A metal deposition system for use in depositing a selected metal onto a semiconductor wafer, the wafer having at least one topographical mark, comprising: means for depositing a layer of the selected metal onto the wafer; and a holding apparatus for holding the wafer during said metal deposition, comprising: a wafer retainer for retaining the wafer; and a clamp ring having at least one tab, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said at least one tab on said clamp ring being positioned to be located directly above a corresponding one of the at least one topographical mark and having an area big enough to cover each of the corresponding one of the at least one topographical mark for avoiding metal being deposited on each one of the at least one topographical mark during metal deposition of the wafer.
Claim 12
Dependent Claim
154 words
A metal deposition system for use in depositing a selected metal onto a semiconductor wafer, the wafer having at least one topographical mark, comprising: means for depositing a layer of the selected metal onto the wafer; and a holding apparatus for holding the wafer during said metal deposition, comprising: a wafer retainer for retaining the wafer; and a clamp ring having at least one tab, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said at least one tab on said clamp ring being positioned to be located directly above a corresponding one of the at least one topographical mark and having an area big enough to cover each of the corresponding one of the at least one topographical mark for avoiding metal being deposited on each one of the at least one topographical mark during metal deposition of the wafer.
Claim 13
Dependent Claim
130 words
A metal deposition system for use in depositing a selected metal onto a semiconductor wafer, the wafer having a plurality of alignment targets, comprising: means for depositing a layer of the selected metal onto the wafer; and a holding apparatus for holding the wafer during said metal deposition, comprising: a wafer retainer for retaining the wafer; and a clamp ring having a plurality of tabs, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one or the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 14
Dependent Claim
130 words
A metal deposition system for use in depositing a selected metal onto a semiconductor wafer, the wafer having a plurality of alignment targets, comprising: means for depositing a layer of the selected metal onto the wafer; and a holding apparatus for holding the wafer during said metal deposition, comprising: a wafer retainer for retaining the wafer; and a clamp ring having a plurality of tabs, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one or the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 15
Dependent Claim
20 words
The metal deposition system as recited in claim 9, wherein said plurality of tabs are integral with said clamp ring.
Claim 16
Dependent Claim
22 words
The metal deposition system as recited in claim 9, wherein said clamp ring and said plurality of tabs are formed of metal.
Claim 17
Dependent Claim
22 words
The metal deposition system as recited in claim 11, wherein said clamp ring and said plurality of tabs are formed of titanium.
Claim 18
Dependent Claim
20 words
The metal deposition system as recited in claim 9, wherein said metal deposition means uses a sputtering technique for deposition.
Claim 19
Dependent Claim
20 words
The metal deposition system as recited in claim 9, wherein said metal deposition means uses an evaporation technique for deposition.
Claim 20
Dependent Claim
169 words
A metal deposition system for use in depositing a selected metal onto a semiconductor wafer, the wafer having a plurality of alignment targets, comprising: means for depositing a layer of the selected metal onto the wafer; and a holding apparatus for holding the wafer during the metal deposition, comprising: a wafer retainer for retaining the wafer, and a clamp ring having a plurality of tabs, said plurality of tabs being integral with said clamp ring, wherein said clamp ring and tabs are formed of metal, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one of the plurality of alignment targets and having an area big enough to cover each of the corresponding one of the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 21
Dependent Claim
169 words
A metal deposition system for use in depositing a selected metal onto a semiconductor wafer, the wafer having a plurality of alignment targets, comprising: means for depositing a layer of the selected metal onto the wafer; and a holding apparatus for holding the wafer during the metal deposition, comprising: a wafer retainer for retaining the wafer, and a clamp ring having a plurality of tabs, said plurality of tabs being integral with said clamp ring, wherein said clamp ring and tabs are formed of metal, said clamp ring and said retainer being constructed for securing the wafer against said clamp ring by said retainer, each one of said plurality of tabs on said clamp ring being positioned to be located directly above a corresponding one of the plurality of alignment targets and having an area big enough to cover each of the corresponding one of the plurality of alignment targets for avoiding metal being deposited on each one the plurality of alignment targets during metal deposition of the wafer.
Claim 22
Dependent Claim
20 words
The metal deposition system as recited in claim 15, wherein said clamp ring and said tabs are formed of titanium.
Claim 23
Dependent Claim
21 words
The metal deposition system as recited in claim 15, wherein said metal deposition means uses a sputtering technique for metal deposition.
Claim 24
Dependent Claim
21 words
The metal deposition system as recited in claim 15, wherein said metal deposition means uses an evaporation technique for metal deposition.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-09 | 1999-04-10 | 1999-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-09 | 2003-04-10 | 2003-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-09 | 2007-04-10 | 2007-10-10 | $7700.00 | Window Closed / Lapsed |