Patent US5956590A successfully refreshed from Google Patents.
US5956590A
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Process of forming a field effect transistor without spacer mask edge defects
Assignee: United Microelectronics Corp
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Filing: 1997-08-06
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Granted: 1999-09-21
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Expires: 2017-08-06
Abstract
Abstract A field effect transistor which is not susceptible to mask edge detects at its gate spacer oxides. The transistor is formed upon a semiconductor substrate through successive layering of a gate oxide, a gate electrode and a gate cap oxide. A pair of curved gate spacer oxides are then formed covering opposite edges of the stack of the gate oxide, the gate electrode and the gate cap oxide. The semiconductor substrate is then etched to provide a smooth topographic transition from the gate spacer oxides to the etched semiconductor surface. Source/drain electrodes are then implanted into the etched semiconductor substrate and annealed to yield the finished transistor. A second embodiment of the field effect transistor possesses a polysilicon gate. Alter removal of the gate cap oxide, a metal layer may be deposited and sintered upon the polysilicon gate and the source/drain electrodes. The metal salicide layers formed upon the electrodes of the transistor have limited susceptibility to parasitic current leakage.
Inventors
- 👤 Yong-Fen Hsieh
- 👤 Shu-Jen Chen
- 👤 Joe Ko
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:59
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/13; H10D62/149; H10D62/151; H10D62/01; H10D62/021; H10P; H10P30/00; H10P30/20; H10P30/22; H10P30/222; H10D30/00; H10D30/01; H10D30/021; H10D30/0212
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
220 words
A method for forming a field effect transistor not susceptible to mask edge defects at its gate spacer oxide edges comprising: providing a semiconductor substrate having formed thereupon a gate electrode on a gate oxide and a gate cap layer over the gate electrode, the semiconductor substrate having a horizontal primary surface; forming a pair of curved, insulating gate spacers covering a pair of opposite edges of the gate electrode and the gate cap layer; etching the semiconductor substrate adjoining the gate spacers to provide a pair of etched semiconductor substrate surfaces smoothly curving from the lower edges of the gate spacers to horizontal portions of the etched semiconductor substrate surfaces to provide a smooth topographic transition from the gate spacers to the horizontal portions; implanting a dopant into the semiconductor substrate beneath the etched semiconductor substrate surfaces using the gate electrode, the gate cap layer and the gate spacers as a mask to form a pair of source/drain electrodes within the semiconductor substrate, wherein the dopant is implanted at a dosage and energy sufficient to render the pair of source/drain electrodes amorphous; and annealing the semiconductor substrate to provide a pair of source/drain electrodes consisting essentially of doped silicon regions on either side of the gate electrode so that surfaces of the source/drain electrodes consist essentially of doped silicon.
Claim 2
Independent Claim
220 words
A method for forming a field effect transistor not susceptible to mask edge defects at its gate spacer oxide edges comprising: providing a semiconductor substrate having formed thereupon a gate electrode on a gate oxide and a gate cap layer over the gate electrode, the semiconductor substrate having a horizontal primary surface; forming a pair of curved, insulating gate spacers covering a pair of opposite edges of the gate electrode and the gate cap layer; etching the semiconductor substrate adjoining the gate spacers to provide a pair of etched semiconductor substrate surfaces smoothly curving from the lower edges of the gate spacers to horizontal portions of the etched semiconductor substrate surfaces to provide a smooth topographic transition from the gate spacers to the horizontal portions; implanting a dopant into the semiconductor substrate beneath the etched semiconductor substrate surfaces using the gate electrode, the gate cap layer and the gate spacers as a mask to form a pair of source/drain electrodes within the semiconductor substrate, wherein the dopant is implanted at a dosage and energy sufficient to render the pair of source/drain electrodes amorphous; and annealing the semiconductor substrate to provide a pair of source/drain electrodes consisting essentially of doped silicon regions on either side of the gate electrode so that surfaces of the source/drain electrodes consist essentially of doped silicon.
Claim 3
Dependent Claim
44 words
The method of claim 1 wherein the gate cap layer is an oxide layer from about 250 to about 1000 angstroms thick, and the oxide layer is formed through a Low Pressure Chemical Vapor Deposition process employing Tetra Ethyl Ortho Silicate as a source.
Claim 4
Dependent Claim
45 words
The method of claim 1 wherein the gate spacers are formed through an anistropic Reactive Ion Etch of a blanket silicon oxide layer formed upon the semiconductor substrate through a Low Pressure Chemical Vapor Deposition (LPCVD) process using a Tetra Ethyl Ortho Silicate (TEOS) source.
Claim 5
Dependent Claim
27 words
The method of claim 3 wherein the gate spacer oxides are about 1500 to about 2500 angstroms thick at the point of contact to the semiconductor substrate.
Claim 6
Dependent Claim
23 words
The method of claim 1 wherein the etching of the semiconductor substrate removes about 250 to about 1000 angstroms of the semiconductor substrate.
Claim 7
Dependent Claim
45 words
The method of claim 5 wherein the etching of the semiconductor substrate is accomplished through a selective Reactive Ion Etch process, wherein the selective Reactive Ion Etch process has an etch rate for silicon in excess of seven times an etch rate for silicon oxide.
Claim 8
Dependent Claim
16 words
The method of claim 1 wherein the source/drain electrodes are formed using an arsenic ion implant.
Claim 9
Dependent Claim
35 words
The method of claim 7 wherein the arsenic ion implant is undertaken at about 1E15 to about 1E16 ions per square centimeter ion implant dose and about 40 to about 80 keV ion implant energy.
Claim 10
Dependent Claim
26 words
The method of claim 1 wherein the source/drain electrodes are annealed at about 550 to about 900 degrees centigrade for about 30 to about 60 minutes.
Claim 11
Dependent Claim
18 words
The method of claim 1 further comprising a Lightly Doped Drain ion implant structure within the semiconductor substrate.
Claim 12
Dependent Claim
53 words
The method of claim 10 wherein the Lightly Doped Drain ion implant structure is formed from a low dose ion implant into the semiconductor substrate using a phosphorus ion implant at about 1E12 to about 1E13 ions per square centimeter ion implant dose and about 30 to about 50 keV ion implant energy.
Claim 13
Dependent Claim
18 words
The method of claim 1 further comprising a Doubly Doped Drain ion implant structure within the semiconductor substrate.
Claim 14
Dependent Claim
30 words
The method of claim 1, including the step of positioning the gate spacer oxides to be in contact with the gate oxide, gate electrode, gate cap oxide and semiconductor substrate.
Claim 15
Independent Claim
250 words
A method for forming a field effect transistor not susceptible to mask edge defects at its gate spacer oxide edges comprising: providing a semiconductor substrate having formed thereupon a polysilicon gate electrode aligned over a gate oxide and a gate cap oxide aligned over the polysilicon gate electrode, the semiconductor substrate having a horizontal primary surface; forming a pair of curved gate spacer oxides covering a pair of opposite edges of the gate oxide, the polysilicon gate electrode and the gate cap oxide; etching the semiconductor substrate adjoining the gate spacer oxides to provide a pair of etched semiconductor substrate surfaces which provide a smooth topographic transition from lower edges of the gate spacer oxides to horizontal surfaces of the etched semiconductor substrate surfaces; implanting into the semiconductor substrate beneath the etched semiconductor surfaces using the polysilicon gate electrode, the gate cap oxide and the gate spacer oxides as a mask to form a pair of source/drain electrodes within the semiconductor substrate, wherein the dopant is implanted at a dosage and energy sufficient to render the pair of source/drain electrodes amorphous; removing the gate cap oxide to expose the polysilicon gate electrode subsequent to said implanting; forming a metal layer upon the polysilicon gate electrode and the source/drain electrodes; and annealing the source/drain electrodes and sintering the metal layer to form a gate electrode metal salicide layer and a pair of source/drain electrode metal salicide layers, the steps of annealing the source/drain electrodes and sintering the metal layer performed simultaneously.
Claim 16
Independent Claim
250 words
A method for forming a field effect transistor not susceptible to mask edge defects at its gate spacer oxide edges comprising: providing a semiconductor substrate having formed thereupon a polysilicon gate electrode aligned over a gate oxide and a gate cap oxide aligned over the polysilicon gate electrode, the semiconductor substrate having a horizontal primary surface; forming a pair of curved gate spacer oxides covering a pair of opposite edges of the gate oxide, the polysilicon gate electrode and the gate cap oxide; etching the semiconductor substrate adjoining the gate spacer oxides to provide a pair of etched semiconductor substrate surfaces which provide a smooth topographic transition from lower edges of the gate spacer oxides to horizontal surfaces of the etched semiconductor substrate surfaces; implanting into the semiconductor substrate beneath the etched semiconductor surfaces using the polysilicon gate electrode, the gate cap oxide and the gate spacer oxides as a mask to form a pair of source/drain electrodes within the semiconductor substrate, wherein the dopant is implanted at a dosage and energy sufficient to render the pair of source/drain electrodes amorphous; removing the gate cap oxide to expose the polysilicon gate electrode subsequent to said implanting; forming a metal layer upon the polysilicon gate electrode and the source/drain electrodes; and annealing the source/drain electrodes and sintering the metal layer to form a gate electrode metal salicide layer and a pair of source/drain electrode metal salicide layers, the steps of annealing the source/drain electrodes and sintering the metal layer performed simultaneously.
Claim 17
Dependent Claim
44 words
The method of claim 14 wherein the gate cap oxide is from about 250 to about 1000 angstroms thick, and the gate cap oxide is formed through a Low Pressure Chemical Vapor Deposition process employing Tetra Ethyl Ortho Silicate as a silicon source material.
Claim 18
Dependent Claim
48 words
The method or claim 14 wherein the gate spacer oxides are formed through an anisotropic Reactive Ion Etch of a blanket silicon oxide layer formed upon the semiconductor substrate through a Low Pressure Chemical Vapor Deposition (LPCVD) process using a Tetra Ethyl Ortho Silicate (TEOS) silicon source material.
Claim 19
Dependent Claim
27 words
The method of claim 16 wherein the gate spacer oxides are about 1500 to about 2500 angstroms thick at the point of contact to the semiconductor substrate.
Claim 20
Dependent Claim
63 words
The method of claim 14 wherein the etching of the semiconductor substrate removes about 250 to about 1000 angstroms of the semiconductor substrate and the etching of the semiconductor substrate is accomplished through a selective Reactive Ion Etch process, wherein the selective Reactive Ion Etch process has an etch rate for silicon in excess of seven times an etch rate for silicon oxide.
Claim 21
Dependent Claim
39 words
The method of claim 14 wherein the step of implanting includes a phosphorus ion implant undertaken at about 1E14 to about 1E15 ions per square centimeter ion implant dose and about 30 to about 80 keV ion implant energy.
Claim 22
Dependent Claim
19 words
The method of claim 14 wherein the gate cap oxide is removed through a selective Reactive Ion Etch process.
Claim 23
Dependent Claim
18 words
The method of claim 14 further comprising a Lightly Doped Drain ion implant structure within the semiconductor substrate.
Claim 24
Dependent Claim
18 words
The method of claim 14 further comprising a Doubly Doped Drain ion implant structure within the semiconductor substrate.
Claim 25
Dependent Claim
30 words
The method of claim 14, including the step of positioning the gate spacer oxides to be in contact with the gate oxide, gate electrode, gate cap oxide and semiconductor substrate.
Claim 26
Independent Claim
172 words
A method for forming a field effect transistor not susceptible to mask edge defects at its gate spacer oxide edges comprising: providing a semiconductor substrate having formed thereupon a gate electrode aligned over a gate oxide and a gate cap oxide aligned over the gate electrode, the semiconductor substrate having a horizontal primary surface; forming a pair of curved gate spacer oxides in contact with the semiconductor substrate and in contact with and covering a pair of opposite edges of the gate oxide, the gate electrode and the gate cap oxide; etching the semiconductor substrate adjoining the gate spacer oxides to provide a pair of etched semiconductor substrate surfaces which provide a smooth topographic transition from the lower edges of the gate spacer oxides to the horizontal surfaces of the etched semiconductor substrate; forming a pair of source/drain electrodes comprising amorphous ion implanted regions beneath the etched semiconductor substrate surface; and annealing the source/drain electrodes to form drain regions extending beneath the gate spacer oxides and along the etched semiconductor substrate surfaces.
Claim 27
Independent Claim
172 words
A method for forming a field effect transistor not susceptible to mask edge defects at its gate spacer oxide edges comprising: providing a semiconductor substrate having formed thereupon a gate electrode aligned over a gate oxide and a gate cap oxide aligned over the gate electrode, the semiconductor substrate having a horizontal primary surface; forming a pair of curved gate spacer oxides in contact with the semiconductor substrate and in contact with and covering a pair of opposite edges of the gate oxide, the gate electrode and the gate cap oxide; etching the semiconductor substrate adjoining the gate spacer oxides to provide a pair of etched semiconductor substrate surfaces which provide a smooth topographic transition from the lower edges of the gate spacer oxides to the horizontal surfaces of the etched semiconductor substrate; forming a pair of source/drain electrodes comprising amorphous ion implanted regions beneath the etched semiconductor substrate surface; and annealing the source/drain electrodes to form drain regions extending beneath the gate spacer oxides and along the etched semiconductor substrate surfaces.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-20 | 2003-03-22 | 2003-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-20 | 2007-03-22 | 2007-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-20 | 2011-03-22 | 2011-09-21 | $7700.00 | Window Closed / Lapsed |