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US5953592A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of fabricating semiconductor having through hole

Assignee: Socionext Inc
•
Filing: 1998-07-28
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Granted: 1999-09-14
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Expires: 2018-07-28
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Abstract

Abstract The semiconductor device includes a semiconductor chip, a tape for mounting the semiconductor chip thereto, an adhesive resin layer interposed between the semiconductor chip and the tape, and solder balls attached to the tape. The method of fabricating the semiconductor chip comprises the step of forming at least one hole in the tape, after fixing the semiconductor chip to the tape through the adhesive resin layer. Also, the TAB tape is made of polyimide having high water permeability.

Inventors

  • 👤 Fumihiko Taniguchi
  • 👤 Koji Honna
  • 👤 Yoshikazu Kumagaya

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 14:29
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/071; H10W72/073; H10W72/30; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/681; H10W72/07331; H10W72/07337; H10W72/351; H10W72/353; H10W72/354; H10W72/851; H10W72/874; H10W72/884; H10W74/00; H10W74/10; H10W74/15; H10W90/00; H10W90/701; H10W90/721; H10W90/724; H10W90/731; H10W90/734; H10W90/751; H10W90/754

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 81 words
A method of fabricating a semiconductor device comprising a semiconductor chip, a tape for mounting said semiconductor chip thereto, an adhesive resin layer interposed between said semiconductor chip and said tape, and solder balls arranged on said tape, said method comprising the steps of: fixing said semiconductor chip to said tape by said adhesive resin layer; and forming at least one hole in said tape after the step of fixing said semiconductor chip to said tape through said adhesive resin layer.
Claim 2
Independent Claim 81 words
A method of fabricating a semiconductor device comprising a semiconductor chip, a tape for mounting said semiconductor chip thereto, an adhesive resin layer interposed between said semiconductor chip and said tape, and solder balls arranged on said tape, said method comprising the steps of: fixing said semiconductor chip to said tape by said adhesive resin layer; and forming at least one hole in said tape after the step of fixing said semiconductor chip to said tape through said adhesive resin layer.
Claim 3
Dependent Claim 23 words
A method of fabricating a semiconductor device according to claim 1, further comprising the step of attaching said solder balls to said tape.
Claim 4
Dependent Claim 51 words
A method of fabricating a semiconductor device according to claim 2, characterized in that said step of attaching solder balls to said tape is executed after the step of fixing said semiconductor chip to said tape by said adhesive resin layer and before the step of forming at least one hole.
Claim 5
Dependent Claim 46 words
A method of fabricating a semiconductor device according to claim 1, characterized in that said step of forming at least one hole is executed such that said at least one hole is formed through said tape using a laser beam and reaches said adhesive resin layer.
Claim 6
Dependent Claim 24 words
A method of fabricating a semiconductor device according to claim 1, further comprising the step of sealing said semiconductor chip with a sealing resin.
Claim 7
Dependent Claim 41 words
A method of fabricating a semiconductor device according to claim 1, characterized in that said step of fixing said semiconductor chip to the tape by said adhesive resin layer includes the step of applying a die bonding material to said tape.
Claim 8
Dependent Claim 53 words
A method of fabricating a semiconductor device according to claim 1, characterized in that said step of fixing said semiconductor chip to the tape by the adhesive resin layer includes the step of attaching a buffer material to said tape and the step of applying a die bonding material to said buffer material.
Claim 9
Dependent Claim 58 words
A method of fabricating a semiconductor device according to claim 1, characterized in that said step of fixing said semiconductor chip to the tape by said adhesive resin layer includes the step of connecting said semiconductor chip to said tape by protruding electrodes and the step of filling an under-filling material between said semiconductor chip and said tape.

References Cited (Backward Citations)

US4483067A Cited
US5063171A Cited
JPH04148554A Cited
US5753535A Cited
US5756379A Cited
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US5731231A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-09-13 2003-03-15 2003-09-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-09-13 2007-03-15 2007-09-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-09-13 2011-03-15 2011-09-14 $7700.00 Window Closed / Lapsed

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