US5948700A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of planarization of an intermetal dielectric layer using chemical mechanical polishing
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1996-05-20
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Granted: 1999-09-07
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Expires: 2016-05-20
Abstract
Abstract A method of planarizing integrated circuit wafers using chemical mechanical polishing with an automatic end point and without using an etchback step. An electrode pattern is formed in a layer of soft metal, such as Al/Cu/Si, capped with a layer of hard metal such as tungsten. A layer of first oxide, a layer of spin on glass, and a layer of second oxide are formed over the electrode pattern. The layer of first oxide, the layer of spin on glass, and the layer of second oxide are then planarized using chemical mechanical polishing. The hard metal cap on the electrode pattern can not be removed by the chemical mechanical polishing and forms an automatic end point. The electric current powering the motor driving the chemical mechanical polishing changes when the hard metal cap is reached and this change can be used to detect the end point.
Inventors
- 👤 Jia Zhen Zheng
- 👤 Lap Chan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 08:29
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
235 words
A method of planarization, comprising the steps of: providing an integrated circuit wafer with devices formed therein; forming a layer of first metal on said integrated circuit wafer; forming a layer of second metal, having a first surface and a second surface, on said layer of first metal wherein said second metal has a Knoop hardness value equal to or greater than 485 kg/nm 2 , said second surface of said layer of said second metal contacts said layer of first metal, and said first surface of said layer of said second metal forms a first plane wherein said layer of said second metal and said layer of first metal are below said first plane; forming a first pattern in said layer of first metal and said layer of second metal; forming a layer of first dielectric on said integrated circuit wafer covering said first pattern formed in said layer of first metal and said layer of second metal, wherein part of said layer of first dielectric is above said first plane; removing that part of said layer of first dielectric above said first plane using chemical mechanical polishing, thereby planarizing said layer of first dielectric, wherein said chemical mechanical polishing continues until stopped by said first pattern formed in said layer of second metal; cleaning said layer of first dielectric; and forming a layer of second dielectric on said planarized layer of first dielectric.
Claim 2
Independent Claim
235 words
A method of planarization, comprising the steps of: providing an integrated circuit wafer with devices formed therein; forming a layer of first metal on said integrated circuit wafer; forming a layer of second metal, having a first surface and a second surface, on said layer of first metal wherein said second metal has a Knoop hardness value equal to or greater than 485 kg/nm 2 , said second surface of said layer of said second metal contacts said layer of first metal, and said first surface of said layer of said second metal forms a first plane wherein said layer of said second metal and said layer of first metal are below said first plane; forming a first pattern in said layer of first metal and said layer of second metal; forming a layer of first dielectric on said integrated circuit wafer covering said first pattern formed in said layer of first metal and said layer of second metal, wherein part of said layer of first dielectric is above said first plane; removing that part of said layer of first dielectric above said first plane using chemical mechanical polishing, thereby planarizing said layer of first dielectric, wherein said chemical mechanical polishing continues until stopped by said first pattern formed in said layer of second metal; cleaning said layer of first dielectric; and forming a layer of second dielectric on said planarized layer of first dielectric.
Claim 3
Dependent Claim
118 words
The method of claim 1 wherein forming said layer of first dielectric comprises the steps of: forming a layer of first oxide on said integrated circuit wafer covering said first pattern formed in said layer of first metal and said layer of second metal, wherein part of said layer of first oxide is above said first plane; forming a layer of spin on glass on said layer of first oxide, wherein part of said layer of spin on glass is above said first plane; curing said layer of spin on glass; and forming a layer of second oxide on said layer of spin on glass, wherein part of said layer of second oxide is above said first plane.
Claim 4
Dependent Claim
28 words
The method of claim 2 wherein said layer of first oxide has a thickness of between about 500 and 6000 Angstroms and is formed using chemical vapor deposition.
Claim 5
Dependent Claim
22 words
The method of claim 2 wherein said layer of spin on glass has a thickness of between about 2000 and 8000 Angstroms.
Claim 6
Dependent Claim
30 words
The method of claim 2 wherein said layer of second oxide has a thickness of between about 3000 and 20,000 Angstroms and is formed using plasma assisted chemical vapor deposition.
Claim 7
Dependent Claim
21 words
The method of claim 1 wherein said first metal is Aluminum/Silicon/Copper having a thickness of between about 3000 and 10,000 Angstroms.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein said first metal is Aluminum/Copper having a thickness of between about 3000 and 10,000 Angstroms.
Claim 9
Dependent Claim
21 words
The method of claim 1 wherein said second metal is Tungsten having a thickness of between about 200 and 2000 Angstroms.
Claim 10
Dependent Claim
22 words
The method of claim 1 wherein said second metal is Tungsten Nitride having a thickness of between about 200 and 2000 Angstroms.
Claim 11
Dependent Claim
22 words
The method of claim 1 wherein said second metal is Titanium Nitride having a thickness of between about 200 and 2000 Angstroms.
Claim 12
Dependent Claim
14 words
The method of claim 1 wherein said chemical mechanical polishing uses an oxide slurry.
Claim 13
Independent Claim
252 words
A method of planarization, comprising the steps of: providing an integrated circuit wafer with devices formed therein; forming a layer of first metal on said integrated circuit wafer; forming a layer of second metal, having a first surface and a second surface, on said layer of first metal wherein said second metal has a Knoop hardness value equal to or greater than 485 kg/nm 2 , said second surface of said layer of said second metal contacts said layer of first metal, and said first surface of said layer of said second metal forms a first plane wherein said layer of said second metal and said layer of first metal are below said first plane; forming a first pattern in said layer of first metal and said layer of second metal; forming a layer of first dielectric on said integrated circuit wafer covering said first pattern formed in said layer of first metal and said layer of second metal, wherein part of said layer of first dielectric is above said first plane; removing that part of said layer of first dielectric above said first plane using chemical mechanical polishing, thereby planarizing said layer of first dielectric, wherein said chemical mechanical polishing uses an electric motor powered by an electric current, said chemical mechanical polishing is continued until an endpoint is reached, and said endpoint is determined by monitoring said electric current; cleaning said planarized layer of first dielectric; and forming a layer of second dielectric on said planarized layer of first dielectric.
Claim 14
Independent Claim
252 words
A method of planarization, comprising the steps of: providing an integrated circuit wafer with devices formed therein; forming a layer of first metal on said integrated circuit wafer; forming a layer of second metal, having a first surface and a second surface, on said layer of first metal wherein said second metal has a Knoop hardness value equal to or greater than 485 kg/nm 2 , said second surface of said layer of said second metal contacts said layer of first metal, and said first surface of said layer of said second metal forms a first plane wherein said layer of said second metal and said layer of first metal are below said first plane; forming a first pattern in said layer of first metal and said layer of second metal; forming a layer of first dielectric on said integrated circuit wafer covering said first pattern formed in said layer of first metal and said layer of second metal, wherein part of said layer of first dielectric is above said first plane; removing that part of said layer of first dielectric above said first plane using chemical mechanical polishing, thereby planarizing said layer of first dielectric, wherein said chemical mechanical polishing uses an electric motor powered by an electric current, said chemical mechanical polishing is continued until an endpoint is reached, and said endpoint is determined by monitoring said electric current; cleaning said planarized layer of first dielectric; and forming a layer of second dielectric on said planarized layer of first dielectric.
Claim 15
Dependent Claim
118 words
The method of claim 12 wherein forming said layer of first dielectric comprises the steps of: forming a layer of first oxide on said integrated circuit wafer covering said first pattern formed in said layer of first metal and said layer of second metal, wherein part of said layer of first oxide is above said first plane; forming a layer of spin on glass on said layer of first oxide, wherein part of said layer of spin on glass is above said first plane; curing said layer of spin on glass; and forming a layer of second oxide on said layer of spin on glass, wherein part of said layer of second oxide is above said first plane.
Claim 16
Dependent Claim
28 words
The method of claim 13 wherein said layer of first oxide has a thickness of between about 500 and 6000 Angstroms and is formed using chemical vapor deposition.
Claim 17
Dependent Claim
22 words
The method of claim 13 wherein said layer of spin on glass has a thickness of between about 2000 and 8000 Angstroms.
Claim 18
Dependent Claim
30 words
The method of claim 13 wherein said layer of second oxide has a thickness of between about 3000 and 20,000 Angstroms and is formed using plasma assisted chemical vapor deposition.
Claim 19
Dependent Claim
21 words
The method of claim 12 wherein said first metal is Aluminum/Silicon/Copper having a thickness of between about 3000 and 10,000 Angstroms.
Claim 20
Dependent Claim
21 words
The method of claim 12 wherein said first metal is Aluminum/Copper having a thickness of between about 3000 and 10,000 Angstroms.
Claim 21
Dependent Claim
21 words
The method of claim 12 wherein said second metal is Tungsten having a thickness of between about 200 and 2000 Angstroms.
Claim 22
Dependent Claim
22 words
The method of claim 12 wherein said second metal is Tungsten Nitride having a thickness of between about 200 and 2000 Angstroms.
Claim 23
Dependent Claim
22 words
The method of claim 12 wherein said second metal is Titanium Nitride having a thickness of between about 200 and 2000 Angstroms.
Claim 24
Dependent Claim
14 words
The method of claim 12 wherein said chemical mechanical polishing uses an oxide slurry.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-09-06 | 2003-03-08 | 2003-09-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-06 | 2007-03-08 | 2007-09-07 | $3760.00 | Window Closed / Lapsed |
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