US5939719A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning probe microscope with scan correction
Assignee: Bruker Nano Inc
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Filing: 1997-04-01
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Granted: 1999-08-17
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Expires: 2017-04-01
Abstract
Abstract An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
Inventors
- 👤 Sang-il Park
- 👤 Ian R. Smith
- 👤 Michael Kirk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 04:13
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/02; G01Q30/00; G01Q30/02; G01Q30/025; G01Q70/00; G01Q70/02; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; G02B21/24; G02B21/26; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851; Y10S977/86; Y10S977/868; Y10S977/869; Y10S977/87; Y10S977/874
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
76 words
A scanning probe microscope comprising: at least one probe for performing at least one type of scanning probe microscopy; a scanner which scans the at least one probe relative to a sample; a deflection sensor which senses a deflection of the at least one probe and generates an error signal; and a controller which varies a manner in which the probe is scanned relative to the sample during a scan in response to the error signal.
Claim 2
Dependent Claim
76 words
A scanning probe microscope comprising: at least one probe for performing at least one type of scanning probe microscopy; a scanner which scans the at least one probe relative to a sample; a deflection sensor which senses a deflection of the at least one probe and generates an error signal; and a controller which varies a manner in which the probe is scanned relative to the sample during a scan in response to the error signal.
Claim 3
Dependent Claim
23 words
The scanning probe microscope according to claim 1 wherein the controller varies the manner in which the probe is scanned in real time.
Claim 4
Dependent Claim
26 words
The scanning probe microscope according to claim 2 in which varying the manner in which the probe is scanned includes varying at least one scan parameter.
Claim 5
Dependent Claim
46 words
The scanning probe microscope according to claim 3 in which the at least one scan parameter is selected from the group consisting of scan speed, scan path, scan area, scan direction, scan location, dynamic range, feedback filter parameters, up contact force, tunneling voltage and tunneling current.
Claim 6
Dependent Claim
29 words
The scanning probe microscope according to claim 1 in which varying the manner in which the probe is scanned includes varying an algorithm to the signal by the controller.
Claim 7
Dependent Claim
16 words
The scanning probe microscope according to claim 5 wherein the algorithm is varied in real time.
Claim 8
Dependent Claim
24 words
The scanning probe microscope according to claim 6 wherein the z controller varies the manner in which the probe is scanned in real time.
Claim 9
Dependent Claim
26 words
The scanning probe microscope according to claim 6 in which varying the manner in which the probe is scanned includes varying at least one scan parameter.
Claim 10
Dependent Claim
46 words
The scanning probe microscope according to claim 8 in which the at least one scan parameter is selected from the group consisting of scan speed, scan path, scan area, scan direction, scan location, dynamic range, feedback filter parameters, tip contact force, tunneling voltage and tunneling current.
Claim 11
Dependent Claim
15 words
The scanning probe microscope according to claim 1 wherein the controller is a z controller.
Claim 12
Dependent Claim
95 words
A scanning probe microscope comprising: at least one probe for performing at least one type of scanning probe microscopy; a scanner which scans the at least one probe relative to a sample; a deflection sensor which senses a deflection of the at least one probe and generates an error signal; an x,y controller which controls a manner in which the probe is scanned relative to the sample; and a z controller which receives the error signal and varies a manner in which the x,y controller operates during a scan in response to the error signal.
Claim 13
Dependent Claim
95 words
A scanning probe microscope comprising: at least one probe for performing at least one type of scanning probe microscopy; a scanner which scans the at least one probe relative to a sample; a deflection sensor which senses a deflection of the at least one probe and generates an error signal; an x,y controller which controls a manner in which the probe is scanned relative to the sample; and a z controller which receives the error signal and varies a manner in which the x,y controller operates during a scan in response to the error signal.
Claim 14
Dependent Claim
19 words
The scanning probe microscope according to claim 11 wherein the z controller controls the x,y controller in real time.
Claim 15
Dependent Claim
36 words
The scanning probe microscope according to claim 12 which the at least one scan parameter is selected from the group consisting of scan speed, scan path, scan area, scan direction, scan location, and feedback filter parameters.
Claim 16
Dependent Claim
29 words
The scanning probe microscope according to claim 11 in which the z controller causes the x,y controller to vary at least one scan parameter controlled by the x,y controller.
Claim 17
Dependent Claim
27 words
The scanning probe microscope according to claim 11 wherein the z controller controls the x,y controller in response to the surface topography detected by the z detector.
Claim 18
Dependent Claim
95 words
A scanning probe microscope comprising: at least one probe for performing at least one type of scanning probe microscopy; a scanner which scans the at least one probe relative to a sample; a deflection sensor which senses a deflection of the at least one probe and generates an error signal; an x,y controller which controls a manner in which the probe is scanned relative to the sample; and a second controller which receives the error signal and varies a manner in which the x,y controller operates during a scan in response to the error signal.
Claim 19
Dependent Claim
95 words
A scanning probe microscope comprising: at least one probe for performing at least one type of scanning probe microscopy; a scanner which scans the at least one probe relative to a sample; a deflection sensor which senses a deflection of the at least one probe and generates an error signal; an x,y controller which controls a manner in which the probe is scanned relative to the sample; and a second controller which receives the error signal and varies a manner in which the x,y controller operates during a scan in response to the error signal.
Claim 20
Dependent Claim
25 words
The scanning probe microscope according to claim 16 in which the x,y controller varies at least one scan parameter in response to the second controller.
Claim 21
Dependent Claim
37 words
The scanning probe m according to claim 17 in which the at least one scan parameter is selected from the gene consisting of scan speed, scan path, scan area, scan direction, scan location, and feedback filter parameters.
Claim 22
Independent Claim
50 words
A method for operating a scanning microscope comprising: scanning a probe relative to a sample; generating an error signal based on a sensed deflection of the probe; and varying a manner in which the probe is scanned relative to the sample during the scanning in response to the error signal.
Claim 23
Independent Claim
50 words
A method for operating a scanning microscope comprising: scanning a probe relative to a sample; generating an error signal based on a sensed deflection of the probe; and varying a manner in which the probe is scanned relative to the sample during the scanning in response to the error signal.
Claim 24
Dependent Claim
20 words
The method according to claim 19 wherein the manner in which the probe is scanned is performed in real time.
Claim 25
Dependent Claim
23 words
The method according to claim 20 wherein varying the manner in which the probe is scanned includes varying at least one scan parameter.
Claim 26
Dependent Claim
29 words
The method according to claim 19 in which varying the manner in which the probe is scanned includes varying an algorithm applied to the error signal by the controller.
Claim 27
Dependent Claim
14 words
The method according to claim 22 wherein the algorithm is varied in real time.
Claim 28
Dependent Claim
19 words
The method according to claim 19 wherein the deflection of the probe is a deflection in a z direction.
Claim 29
Dependent Claim
21 words
The method according to claim 24 wherein varying the manner in which the probe is scanned is performed in real time.
Claim 30
Dependent Claim
24 words
The method according to claim 24 in which varying the manner in which the probe is scanned includes varying at least one scan parameter.
Claim 31
Dependent Claim
40 words
The method according to claim 26 in which the at least one scan parameter is selected from the group consisting of scan speed, scan area scan location, dynamic range, feedback filter parameter, tip contact force, tunneling voltage and tunneling current.
Claim 32
Dependent Claim
25 words
The method according to claim 19 wherein the varying a manner in which the probe is scanned includes varying at least one x,y scan parameter.
Claim 33
Dependent Claim
24 words
The method according to claim 28 in which varying the manner in which the probe is scanned includes varying at least one scan parameter.
Claim 34
Dependent Claim
21 words
The method according to claim 28 wherein varying the manner in which the probe is scanned is performed in real time.
Claim 35
Dependent Claim
35 words
The method according to claim 30 in which the at least one scan parameter is selected from the group consisting of scan speed, scan path, scan area scan direction, scan location, and feedback filter parameters.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-16 | 2003-02-15 | 2003-08-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-16 | 2007-02-15 | 2007-08-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-16 | 2011-02-15 | 2011-08-17 | $7700.00 | Window Closed / Lapsed |