Method for protecting a probe tip using active lateral scanning control

Claim 3

The method of claim 1, wherein said relative lateral movement occurs along a scan path including a first plurality of measurement points at which positional data describing positions of said probe tip are collected, and a second plurality of substeps lies along said scan path between adjacent said measurement points, with said steps a) through e) occurring between movements through each substep within said second plurality thereof.

Claim 4

The method of claim 2, wherein said step a) is preceded by steps of: f) starting operation of a subroutine controlling said relative lateral movement along said scan path; and g) collecting said positional data, and said step b) is followed by steps of: h) determining whether said relative lateral movement has been completed, proceeding to said step c) if said lateral movement has not been completed, and proceeding to determine if said positional data has been collected at all said measurement points in said first plurality thereof if said lateral movement has been completed; and i) ending said subroutine if said positional data has been collected at all said measurement points in said first plurality thereof, and otherwise returning to said step g).

Claim 5

The method of claim 3, wherein said step g) is preceded by dividing said scan path into said second plurality of substeps between said adjacent measurement points.

Claim 6

Apparatus for determining topographical features of a sample surface by traversing said sample surface with a scanning probe tip, wherein said apparatus comprises: a vertical actuator moving said probe tip in a first direction perpendicular to said sample surface; a lateral actuator generating relative motion between said probe tip and said sample surface in a lateral direction parallel to said sample surface along a scan path in a number of incremental movements occurring at a pre-determined velocity; detection means for generating a feedback signal indicating a level of engagement between said probe tip and said sample surface; vertical drive means generating a vertical drive signal to operate said vertical actuator in accordance with said feedback signal so that a pre-determined level of engagement is maintained between said probe tip and said sample surface; first signal processing means comparing said feedback signal with a threshold value therefor, with said threshold value representing a pre-determined maximum level of engagement between said probe tip and said sample surface; and lateral drive means generating a lateral drive signal operating said lateral actuator to generate said relative motion, with said relative motion occurring only when said first signal processing means indicates that said feedback signal is below said threshold value.

Claim 7

Apparatus for determining topographical features of a sample surface by traversing said sample surface with a scanning probe tip, wherein said apparatus comprises: a vertical actuator moving said probe tip in a first direction perpendicular to said sample surface; a lateral actuator generating relative motion between said probe tip and said sample surface in a lateral direction parallel to said sample surface along a scan path in a number of incremental movements occurring at a pre-determined velocity; detection means for generating a feedback signal indicating a level of engagement between said probe tip and said sample surface; vertical drive means generating a vertical drive signal to operate said vertical actuator in accordance with said feedback signal so that a pre-determined level of engagement is maintained between said probe tip and said sample surface; first signal processing means comparing said feedback signal with a threshold value therefor, with said threshold value representing a pre-determined maximum level of engagement between said probe tip and said sample surface; and lateral drive means generating a lateral drive signal operating said lateral actuator to generate said relative motion, with said relative motion occurring only when said first signal processing means indicates that said feedback signal is below said threshold value.

Claim 8

The apparatus of claim 5, wherein said probe tip is connected to said vertical actuator by means of a flexible coupling, said vertical drive means includes a vibration excitation driver operating said vertical actuator at a pre-determined frequency to cause resonance within said flexible coupling, and said detection means includes interferometric means for determining movement of said probe tip and a demodulator receiving data from said interferometric means, with said demodulator providing an amplitude of vibration of said probe tip at said pre-determined frequency as said feedback signal.

Claim 9

The apparatus of claim 5, wherein said probe tip is connected to said vertical actuator by means of a flexible coupling, and said detection means includes: a laser directing a beam at a reflective surface moving with said probe tip, an array of photosensitive elements, with a reflection of said beam off said reflective surface being directed at said array of photosensitive elements, with movement of said probe tip in said first direction moving said reflection along said array of photosensitive elements, and with a position signal being generated according to which of said photosensitive elements are illuminated by said reflection; and second signal processing means forming said feedback signal as a difference between said position signal and a signal indicating a position of said vertical actuator.

Claim 10

The apparatus of claim 5, wherein said probe tip is connected to said vertical actuator by means of an electrically insulating coupling, and said detection means includes a circuit detecting a tunneling current flowing between said sample surface and said probe tip, with said feedback signal being generated according to said tunneling current.

Claim 11

The apparatus of claim 5, wherein said apparatus additionally comprises output means transmitting data describing positions of said vertical and lateral actuators at a number of measurement points along said scan path, with a plurality of incremental movements occurring between adjacent said measurement points on said scan path.

Claim 14

The method of claim 10, wherein data describing a location of an actuator moving said scanning probe in said first direction and data describing a location of an actuator generating said relative motion are collected at measurement intervals, with a plurality of said positioning intervals occurring between sequential said measurement intervals.

Claim 15

A computer-readable medium with coded information recorded thereon to cause a computing system to execute a subroutine, wherein said computing system controls lateral movement within a scanning probe microscope, with said lateral movement occurring as relative motion between a probe tip and a sample surface being investigated in a direction parallel to said sample surface, with engagement between said probe tip and said sample surface being determined by movement of said probe tip in a first direction perpendicular to said sample surface, with a feedback signal being generated to indicate a level of engagement between said probe tip and said sample surface, and with said subroutine including steps of: a) comparing said feedback signal with a stored threshold value, with said threshold value corresponding to a maximum distance through which said probe tip can be driven in said first direction away from said sample surface during an incremental portion of relative movement between said probe tip and said sample surface in a lateral direction perpendicular to said first direction; b) driving a lateral actuator to cause said lateral motion through said increment only if said feedback signal is less than said threshold value, as determined in said step a); and c) returning to said step a).

Claim 16

A computer-readable medium with coded information recorded thereon to cause a computing system to execute a subroutine, wherein said computing system controls lateral movement within a scanning probe microscope, with said lateral movement occurring as relative motion between a probe tip and a sample surface being investigated in a direction parallel to said sample surface, with engagement between said probe tip and said sample surface being determined by movement of said probe tip in a first direction perpendicular to said sample surface, with a feedback signal being generated to indicate a level of engagement between said probe tip and said sample surface, and with said subroutine including steps of: a) comparing said feedback signal with a stored threshold value, with said threshold value corresponding to a maximum distance through which said probe tip can be driven in said first direction away from said sample surface during an incremental portion of relative movement between said probe tip and said sample surface in a lateral direction perpendicular to said first direction; b) driving a lateral actuator to cause said lateral motion through said increment only if said feedback signal is less than said threshold value, as determined in said step a); and c) returning to said step a).

Claim 17

The medium of claim 12, wherein said relative lateral movement occurs along a scan path including a first plurality of measurement points at which positional data describing positions of said probe tip are collected, a second plurality of substeps lies along said scan path between adjacent said measurement points, with said steps a) through e) occurring between movements through each substep within said second plurality thereof, said step a) is preceded by steps of: f) starting operation of a subroutine controlling said relative lateral movement along said scan path; and g) collecting said positional data, and said step b) is followed by steps of: h) determining whether said relative lateral movement has been completed, proceeding to said step c) if said lateral movement has not been completed, and proceeding to determine if said positional data has been collected at all said measurement points in said first plurality thereof if said lateral movement has been completed; and i) ending said subroutine if said positional data has been collected at all said measurement points in said first plurality thereof, and otherwise returning to said step g).

Claim 18

The method of claim 13, wherein said step g) is preceded by dividing said scan path into said second plurality of substeps between said adjacent measurement points.

Claim 19

A process controlled by a subroutine executing within a computing system, wherein said computing system controls lateral movement within a scanning probe microscope, with said lateral movement occurring as relative motion between a probe tip and a sample surface being investigated in a direction parallel to said sample surface, with engagement between said probe tip and said sample surface being determined by movement of said probe tip in a first direction perpendicular to said sample surface, with a feedback signal being generated to indicate a level of engagement between said probe tip and said sample surface, and wherein said subroutine includes steps of: a) comparing said feedback signal with a stored threshold value, with said threshold value corresponding to a maximum distance through which said probe tip can be driven in said first direction away from said sample surface during an incremental portion of relative movement between said probe tip and said sample surface in a lateral direction perpendicular to said first direction; b) driving a lateral actuator to cause said lateral motion through said increment only if said feedback signal is less than said threshold value, as determined in said step a); and c) returning to said step a).

Claim 20

A process controlled by a subroutine executing within a computing system, wherein said computing system controls lateral movement within a scanning probe microscope, with said lateral movement occurring as relative motion between a probe tip and a sample surface being investigated in a direction parallel to said sample surface, with engagement between said probe tip and said sample surface being determined by movement of said probe tip in a first direction perpendicular to said sample surface, with a feedback signal being generated to indicate a level of engagement between said probe tip and said sample surface, and wherein said subroutine includes steps of: a) comparing said feedback signal with a stored threshold value, with said threshold value corresponding to a maximum distance through which said probe tip can be driven in said first direction away from said sample surface during an incremental portion of relative movement between said probe tip and said sample surface in a lateral direction perpendicular to said first direction; b) driving a lateral actuator to cause said lateral motion through said increment only if said feedback signal is less than said threshold value, as determined in said step a); and c) returning to said step a).

Claim 21

The process of claim 15, wherein said relative lateral movement occurs along a scan path including a first plurality of measurement points at which positional data describing positions of said probe tip are collected, a second plurality of substeps lies along said scan path between adjacent said measurement points, with said steps a) through e) occurring between movements through each substep within said second plurality thereof, said step a) is preceded by steps of: f) starting operation of a subroutine controlling said relative lateral movement along said scan path; and g) collecting said positional data, and said step b) is followed by steps of: h) determining whether said relative lateral movement has been completed, proceeding to said step c) if said lateral movement has not been completed, and proceeding to determine if said positional data has been collected at all said measurement points in said first plurality thereof if said lateral movement has been completed; and i) ending said subroutine if said positional data has been collected at all said measurement points in said first plurality thereof, and otherwise returning to said step g).

Claim 22

The method of claim 16, wherein said step g) is preceded by dividing said scan path into said second plurality of substeps between said adjacent measurement points.