Surface observing apparatus and method

Claim 2

A surface observing apparatus for obtaining information of a specimen, comprising: a probe disposed in the close vicinity of said specimen; a cantilever for holding said probe; vibrating means for vibrating said cantilever; scanning means for scanning a surface of said specimen with said probe; means for detecting a displacement or deflection signal from said cantilever to thereby allow information of said specimen to be derived on the basis of the displacement or deflection of said cantilever; measuring means for measuring a changing rate of the force from the AC component of the displacement or deflection of said cantilever which has a frequency corresponding to a frequency of said vibrating means; a servo control circuit having an input supplied with the DC component of the displacement or deflection of said cantilever; and moving means for controlling a distance between said probe and said specimen in accordance with a control output of said servo control circuit wherein the force acting on said probe is determined on the basis of an output signal of said servo control circuit.

Claim 3

A surface observing apparatus according to claim 1, further comprising: a lock-in amplifier for separating and detecting the AC component having the same frequency in said cantilever as the vibration frequency of said vibrating means, wherein change in the force acting on said probe is measured on the basis of an output signal of said lock-in amplifier.

Claim 4

A surface observing apparatus according to claim 1, wherein a tip end portion of said probe is formed of a magnetic material, said apparatus further comprising: means for controlling magnetic state of said magnetic material.

Claim 5

A surface observing apparatus according to claim 3, further comprising: means for measuring a component of the force acting in the direction perpendicular to the surface of said specimen and a component of the force acting in the direction horizontally to the surface of said specimen by changing direction of magnetization of said probe.

Claim 6

A surface observing apparatus according to claim 1, wherein at least a surface of a tip end portion of said probe is formed of an electrically conductive material, said apparatus further comprising: means for applying a voltage to said electrically conductive tip end portion of said probe.

Claim 7

A surface observing apparatus according to claim 1, further comprising: means for three-dimensionally holding said probe at every point for measurement above said specimen; and means for arbitrarily setting a distance between said probe and said specimen in the state where said probe is being held; wherein said force and a gradient thereof acting on said probe are measured at said arbitrarily set distance.

Claim 8

A surface observing apparatus according to claim 1, further comprising: means for vibrating said probe in parallel with said surface of said specimen; light source means for irradiating said cantilever with a light beam; and two-dimensional sensor means for detecting a reflected light beam from said cantilever.

Claim 9

A surface observing apparatus according to claim 1, further comprising: a probe moving mechanism for moving the cantilever holding said probe on and along a plane extending substantially in parallel to said surface of said specimen, wherein said probe is caused to scan the surface of said specimen while being moved by said probe moving mechanism.

Claim 10

A surface observing apparatus according to claim 8, wherein said cantilever is disposed on said probe so that said probe is positioned outside of said probe moving mechanism.

Claim 11

A surface observing apparatus according to claim 8, further comprising: a specimen moving mechanism for two-dimentionally moving said specimen in a plane extending substantially in parallel with said surface of said specimen.

Claim 12

A surface observing apparatus according to claim 10, wherein said specimen moving mechanism has a moving range greater than 1 mm inclusive in each of two-dimensional X- and Y-directions.

Claim 13

A surface observing apparatus according to claim 1, further comprising: means for detecting displacement of said cantilever; mean for exciting said cantilever on the basis of the detected displacement; reference signal generating means for generating a signal having a constant frequency and a constant phase; phase difference detecting means for detecting a phase difference between a phase of an output signal of said reference signal generating means and a phase of an output signal of said cantilever displacement detecting means; and adjusting means for adjusting a distance between said cantilever and the surface of said specimen so that the phase difference between the output signal of said reference signal generating means and the output signal of said cantilever displacement detecting means approaches a phase difference of zero.

Claim 14

A surface observing apparatus according to claim 12, further comprising: means for applying an electrostatic bias between said specimen and said probe.

Claim 15

A surface observing apparatus according to claim 1, further comprising: means for detecting the DC component of displacement of said cantilever; means for controlling the position of said probe so that the DC component of the displacement of said cantilever is kept constant; means for detecting a current flowing between said probe and said specimen; means for implementing said probe in the form of a spin polarized ferromagnetic probe; means for changing a spin polarization ratio of said ferromagnetic probe; and means for detecting a current having a specific frequency and flowing between said specimen and said probe.

Claim 16

A surface observing apparatus according to claim 14, further comprising: means for changing said spin polarization ratio of said ferromagnetic probe with a specific frequency selected.

Claim 17

A surface observing apparatus according to claim 1, wherein the DC component is an output from a low-pass filter and has a frequency lower than that of the AC component.

Claim 18

A surface microscopy method, comprising the steps of: scanning a surface of a specimen with a probe in repulsive force mode by relatively moving said probe and said specimen; selectively stopping movement of said probe or said specimen at every pixel on said surface of said specimen; moving said probe or said specimen so that a distance between said probe and said surface of said specimen changes; detecting a force and force gradient between said probe and said surface of said specimen at two different positions thereby measuring a profile of said surface of said specimen and the gradient distribution of forces; and repeating the above-mentioned steps for each of the pixels for said surface structure of said specimen and said force gradient distributions of said specimen.

Claim 19

A surface microscopy method, comprising the steps of: scanning a surface of a specimen with a probe in repulsive force mode by relatively moving said probe and said specimen; selectively stopping movement of said probe or said specimen at every pixel on said surface of said specimen; moving said probe or said specimen so that a distance between said probe and said surface of said specimen changes; detecting a force and force gradient between said probe and said surface of said specimen at two different positions thereby measuring a profile of said surface of said specimen and the gradient distribution of forces; and repeating the above-mentioned steps for each of the pixels for said surface structure of said specimen and said force gradient distributions of said specimen.

Claim 20

A surface microscopy method according to claim 17, wherein further a stray magnetic field distribution is measured as said force gradient distribution.

Claim 21

A surface microscopy method according to claim 18, wherein further a stray electric field distribution is measured as said force gradient distribution.

Claim 22

A surface observing apparatus, comprising: a probe; a cantilever carrying said probe; probe moving means for moving said probe in a plane extending substantially in parallel with the surface of a specimen and in a plane extending substantially perpendicular to the surface of said specimen; specimen moving means for moving said specimen in a plane extending substantially in parallel to the surface of said specimen so as to effect a scanning of said surface by said probe; and means for detecting a force gradient between said probe and said surface of said specimen at two different positions and for measuring a profile of said surface of said specimen, wherein a force gradient distribution is detected by positioning said probe at said two different positions in a direction perpendicular to said surface of said specimen.

Claim 23

A surface observing apparatus, comprising: a probe; a cantilever carrying said probe; probe moving means for moving said probe in a plane extending substantially in parallel with the surface of a specimen and in a plane extending substantially perpendicular to the surface of said specimen; specimen moving means for moving said specimen in a plane extending substantially in parallel to the surface of said specimen so as to effect a scanning of said surface by said probe; and means for detecting a force gradient between said probe and said surface of said specimen at two different positions and for measuring a profile of said surface of said specimen, wherein a force gradient distribution is detected by positioning said probe at said two different positions in a direction perpendicular to said surface of said specimen.

Claim 24

A surface observing apparatus, comprising: a probe in the form of a spin polarized ferromagnetic needle; a deformable cantilever for holding said probe; means for causing said probe to scan a surface of a specimen to be observed along said surface; means for detecting a DC component of displacement or deflection of said cantilever; means for controlling a position of said probe or alternatively a position of said specimen so that the DC component of displacement or deflection of said cantilever is maintained constant; means for detecting a current flowing between said probe and said specimen; means for changing a spin polarization ratio of said ferromagnetic probe needle with a predetermined frequency; and means for detecting a current flowing between said specimen and said probe needle and with said predetermined frequency.

Claim 25

A surface observing apparatus, comprising: a probe in the form of a spin polarized ferromagnetic needle; a deformable cantilever for holding said probe; means for causing said probe to scan a surface of a specimen to be observed along said surface; means for detecting a DC component of displacement or deflection of said cantilever; means for controlling a position of said probe or alternatively a position of said specimen so that the DC component of displacement or deflection of said cantilever is maintained constant; means for detecting a current flowing between said probe and said specimen; means for changing a spin polarization ratio of said ferromagnetic probe needle with a predetermined frequency; and means for detecting a current flowing between said specimen and said probe needle and with said predetermined frequency.

Claim 26

A surface observing apparatus, comprising: a probe; a deformable cantilever holding said probe; means for scanning a surface of a specimen for observation with said probe along said specimen surface; means for vibrating said cantilever; a positive feedback loop, including: means for detecting displacement or deflection of said cantilever, a feedback circuit for feeding back a signal corresponding to the frequency of an output of said detecting means to said vibrating means, and a phased locked loop which includes said positive feedback loop and further includes: a reference frequency generator for generating a desired frequency, a phase comparator for detecting a phase difference between the desired frequency and the signal corresponding to the frequency of the output of said detecting means, and means for adjusting a relative position between said probe and said surface of said specimen so that the frequency of the output of said detecting means is changed; reference signal generating means for generating a signal of a constant frequency and phase; means for detecting a phase difference between the output signal of said reference signal generating means and the output signal of said cantilever displacement or deflection detecting means; and control means for controlling a distance between a tip of said probe and said specimen surface so that the phase difference between the output signal of said reference signal generator and the output signal of said cantilever displacement detecting means approaches a phase difference of zero.

Claim 27

A surface observing apparatus, comprising: a probe; a deformable cantilever holding said probe; means for scanning a surface of a specimen for observation with said probe along said specimen surface; means for vibrating said cantilever; a positive feedback loop, including: means for detecting displacement or deflection of said cantilever, a feedback circuit for feeding back a signal corresponding to the frequency of an output of said detecting means to said vibrating means, and a phased locked loop which includes said positive feedback loop and further includes: a reference frequency generator for generating a desired frequency, a phase comparator for detecting a phase difference between the desired frequency and the signal corresponding to the frequency of the output of said detecting means, and means for adjusting a relative position between said probe and said surface of said specimen so that the frequency of the output of said detecting means is changed; reference signal generating means for generating a signal of a constant frequency and phase; means for detecting a phase difference between the output signal of said reference signal generating means and the output signal of said cantilever displacement or deflection detecting means; and control means for controlling a distance between a tip of said probe and said specimen surface so that the phase difference between the output signal of said reference signal generator and the output signal of said cantilever displacement detecting means approaches a phase difference of zero.

Claim 28

A surface observing apparatus according to claim 22, wherein said positive feedback loop includes means for limiting an output amplitude from said detecting means.

Claim 29

A surface observing apparatus according to claim 22, wherein the relative position adjusting means controls, when the apparatus starts, a relative position between the probe and surface of said specimen by means of a signal which responds to a difference in phase between the desired frequency and a signal indicating the frequency of the output of said detecting means.