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US5930610A
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US
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Method for manufacturing T-gate
Assignee: SK Hynix Inc
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Filing: 1996-12-17
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Granted: 1999-07-27
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Expires: 2016-12-17
Abstract
Abstract Method for manufacturing a T-gate useful for reducing a gate resistance, improving through-put, and simplifying an MMIC (monolithic microwave integrated circuit) process is disclosed, the method including the steps of depositing a first photoresist layer on a semiconductor substrate and patterning the first photoresist layer so as to expose a predetermined portion of the surface of the substrate; successively forming a seed metal layer and a second photoresist layer on the entire surface inclusive of the exposed substrate and patterning the second photoresist layer so as to define a gate electrode region; plating Au on the seed metal layer on the gate electrode region so as to form a gate electrode; and removing the first and second photoresist layers and the seed metal layer except the gate electrode.
Inventors
- 👤 Won Sang Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:59
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/061; H10D30/0612; H10D64/00; H10D64/01; H10D64/011; H10D64/012; H10D64/0124; H10D64/0125
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
115 words
A method for manufacturing a T-gate, comprising the steps of: depositing a first photoresist layer on a semiconductor substrate and patterning the first photoresist layer so as to expose a predetermined portion of a surface of the semiconductor substrate; successive formation of a seed metal layer and a second photoresist layer on the entire surface inclusive of the exposed substrate and patterning the second photoresist layer so as to define a gate electrode region; plating gold on the seed metal layer over the gate electrode region so as to form a gate electrode; and, removing the second photoresist layer, the seed metal layer other than in the gate electrode region, and the first photoresist layer.
Claim 2
Independent Claim
115 words
A method for manufacturing a T-gate, comprising the steps of: depositing a first photoresist layer on a semiconductor substrate and patterning the first photoresist layer so as to expose a predetermined portion of a surface of the semiconductor substrate; successive formation of a seed metal layer and a second photoresist layer on the entire surface inclusive of the exposed substrate and patterning the second photoresist layer so as to define a gate electrode region; plating gold on the seed metal layer over the gate electrode region so as to form a gate electrode; and, removing the second photoresist layer, the seed metal layer other than in the gate electrode region, and the first photoresist layer.
Claim 3
Dependent Claim
22 words
The method as claimed in claim 1, wherein said gate electrode is determined by patterns of the first and second photoresist layers.
Claim 4
Dependent Claim
16 words
The method as claimed in claim 1, wherein said first photoresist layer is a PMMA layer.
Claim 5
Dependent Claim
27 words
The method as claimed in claim 1, wherein said second photoresist layer, said seed metal layer, and said first photoresist layer are removed by an etch process.
Claim 6
Dependent Claim
28 words
The method as claimed in claim 1, wherein a thickness of the gate electrode depends on a time of gold-plating and a thickness of the first photoresist layer.
Claim 7
Dependent Claim
16 words
The method as claimed in claim 1, wherein said seed metal layer is a Ti/Au layer.
Claim 8
Dependent Claim
19 words
The method as claimed in claim 1, wherein said first photoresist layer is patterned by expose of electron beam.
Claim 9
Dependent Claim
22 words
The method as claimed in claim 1, wherein said second photoresist layer is a photoresist layer for G line or I line.
Claim 10
Independent Claim
190 words
A method for manufacturing a T-type gate of a semiconductor device, the method comprising the steps of: forming a source pad and a drain pad on a semiconductor substrate and depositing a first photoresist layer on the entire surface inclusive of the source and drain pads; patterning the first photoresist layer to expose a predetermined portion of each of the source and drain pads and a predetermined portion of the surface of the substrate which will be contacted with a gate electrode; forming a seed metal layer on the entire surface inclusive of the exposed portions of the source and drain pads and the exposed surface of the substrate and forming a second photoresist layer on the seed metal layer; patterning the second photoresist layer to expose the second photoresist layer over regions where a source electrode, a drain electrode, and a gate electrode will be formed, respectively; and, plating gold on the exposed portions of the seed metal layer so as to form the gate electrode, the source electrode, and the drain electrode and removing the unnecessary second photoresist layer, the seed metal layer, and the first photoresist layer.
Claim 11
Independent Claim
190 words
A method for manufacturing a T-type gate of a semiconductor device, the method comprising the steps of: forming a source pad and a drain pad on a semiconductor substrate and depositing a first photoresist layer on the entire surface inclusive of the source and drain pads; patterning the first photoresist layer to expose a predetermined portion of each of the source and drain pads and a predetermined portion of the surface of the substrate which will be contacted with a gate electrode; forming a seed metal layer on the entire surface inclusive of the exposed portions of the source and drain pads and the exposed surface of the substrate and forming a second photoresist layer on the seed metal layer; patterning the second photoresist layer to expose the second photoresist layer over regions where a source electrode, a drain electrode, and a gate electrode will be formed, respectively; and, plating gold on the exposed portions of the seed metal layer so as to form the gate electrode, the source electrode, and the drain electrode and removing the unnecessary second photoresist layer, the seed metal layer, and the first photoresist layer.
Claim 12
Dependent Claim
21 words
The method as claimed in claim 9, wherein said gate electrode is determined by a pattern of the second photoresist layer.
Claim 13
Dependent Claim
16 words
The method as claimed in claim 9, wherein said first photoresist layer is a PMMA layer.
Claim 14
Dependent Claim
27 words
The method as claimed in claim 9, wherein said second photoresist layer, the seed metal layer, and the first photoresist layer are removed by an etch process.
Claim 15
Dependent Claim
28 words
The method as claimed in claim 9, wherein a thickness of the gate electrode depends of a time of gold-plating and a thickness of the first photoresist layer.
Claim 16
Dependent Claim
16 words
The method as claimed in claim 9, wherein said seed metal layer is a Ti/Au layer.
Claim 17
Dependent Claim
19 words
The method as claimed in claim 9, wherein said first photoresist layer is patterned by expose of electron beam.
Claim 18
Dependent Claim
22 words
The method as claimed in claim 9, wherein said second photoresist layer is a photoresist layer for G line or I line.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-07-26 | 2003-01-25 | 2003-07-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-07-26 | 2007-01-25 | 2007-07-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-07-26 | 2011-01-25 | 2011-07-27 | $7700.00 | Window Closed / Lapsed |