US5288660A
Expired / Lapsed
US
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Method for forming self-aligned t-shaped transistor electrode
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1993-02-01
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Granted: 1994-02-22
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Expires: 2013-02-01
Abstract
Abstract A T-shaped electrode is formed on a semiconductor substrate by first forming a dielectric film on the substrate. A first layer of photoresist is applied on the upper surface of the dielectric film, and a second layer of photoresist is applied over the first layer of photoresist. The first and second layers of photoresist have different optical properties, requiring different wavelengths of ultraviolet for exposure before developing. Portions of the first and second photoresist layers and the dielectric film are selectively removed by photolithographic techniques with one masking step for forming an opening to the substrate. The first and second photoresist layers adjacent to the opening are ion etched to expose the upper surface of the dielectric film adjacent to the opening. A portion of the first photoresist layer adjacent to the opening is removed to undercut the second photoresist layer. Metal is deposited in the opening and on the exposed upper surface of the dielectric film to form a T-shaped electrode. The first and second photoresist layers are then removed, thereby also removing metal deposited on top of the second layer of photoresist.
Inventors
- 👤 Chang-Hwang Hua
- 👤 Simon S. Chan
- 👤 Ding-Yuan Day
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 02:17
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
119 words
A method for forming a T-shaped transistor electrode comprising the steps of: forming a dielectric film on a semiconductor substrate; placing a photoresist layer over the dielectric film; removing a relatively narrower portion of the photoresist layer for forming a narrower opening at a location where an electrode is desired; etching an opening through the dielectric film corresponding to the narrower opening through the photoresist layer; removing a portion of the photoresist layer adjacent to each edge of the narrower opening for forming a wider opening through the photoresist layer; depositing metal through the opening in the dielectric film and through the wider opening in the photoresist layer for forming a T-shaped metal deposit; and removing the photoresist layer.
Claim 2
Independent Claim
119 words
A method for forming a T-shaped transistor electrode comprising the steps of: forming a dielectric film on a semiconductor substrate; placing a photoresist layer over the dielectric film; removing a relatively narrower portion of the photoresist layer for forming a narrower opening at a location where an electrode is desired; etching an opening through the dielectric film corresponding to the narrower opening through the photoresist layer; removing a portion of the photoresist layer adjacent to each edge of the narrower opening for forming a wider opening through the photoresist layer; depositing metal through the opening in the dielectric film and through the wider opening in the photoresist layer for forming a T-shaped metal deposit; and removing the photoresist layer.
Claim 3
Dependent Claim
49 words
A method as recited in claim 1 wherein the step of forming a wider opening through the first mentioned photoresist layer comprises depositing a second layer of photoresist over the first layer of photoresist, and undercutting an edge of the second layer of photoresist adjacent to the narrower opening.
Claim 4
Dependent Claim
56 words
A method as recited in claim 1 wherein the placing step comprises: placing a first layer of photoresist on top of the dielectric film; and placing a second layer of photoresist on top of the first layer of photoresist, the second photoresist layer requiring a different wavelength of radiation for developing than the first photoresist layer.
Claim 5
Dependent Claim
78 words
A method as recited in claim 3 comprising the steps of: enlarging an opening through the second layer of photoresist corresponding to the narrower opening; exposing to radiation a portion of the first layer of photoresist adjacent to the narrower opening through an edge portion of the second layer of photoresist adjacent to the enlarged opening; and removing the exposed portion of the first layer of photoresist for undercutting the edge portion of the second layer of photoresist.
Claim 6
Dependent Claim
77 words
A method as recited in claim 4 comprising the steps of: depositing metal on top of the second layer of photoresist and through the enlarged opening through the second layer of photoresist with a sufficient thickness for filling the narrower opening through the dielectric film and at least a portion of the wider opening through the first layer of photoresist; and removing the layers of photoresist, thereby also removing metal deposited on the second layer of photoresist.
Claim 7
Dependent Claim
134 words
A method as recited in claim 3 comprising the steps of: exposing a region of the second photoresist layer to ultraviolet light for forming an exposed region in the second photoresist layer; developing and removing the exposed region in the second photoresist layer for forming an opening in the second photoresist layer; exposing a region of the first photoresist layer uncovered by the opening in the second photoresist layer to ultraviolet light for forming an exposed region in the first photoresist layer; developing and removing the exposed region in the first photoresist layer for forming an opening in the first photoresist layer; and etching a region of the dielectric film uncovered by the opening in the first photoresist layer for forming an opening in the dielectric film that exposes a portion of the substrate.
Claim 8
Dependent Claim
43 words
A method as recited in claim 3 comprising the step of: removing edge portions of the first and second layers of photoresist adjacent to the narrower opening for forming the wider opening and exposing a portion of the surface of the dielectric film.
Claim 9
Dependent Claim
54 words
A method as recited in claim 7 exposing to radiation an edge portion of the first layer of photoresist through an edge portion of the second layer of photoresist adjacent to the wider opening; and developing and removing the exposed portion in the first photoresist layer for forming an undercut beneath second photoresist layer.
Claim 10
Dependent Claim
86 words
A method as recited in claim 8 comprising the steps of: depositing metal on top of the second layer of photoresist and through the enlarged opening through the second layer of photoresist with a sufficient thickness for filling the narrower opening through the dielectric film and at least a portion of the wider opening through the first layer of photoresist, and less than sufficient for filling the undercut portion; and removing the layers of photoresist, thereby also removing metal deposited on the second layer of photoresist.
Claim 11
Independent Claim
158 words
A method of forming a T-shaped electrode on a semiconductor substrate, comprising the steps of: forming a dielectric film on the substrate, the dielectric film having an upper surface; applying a first layer of photoresist on the upper surface of the dielectric film; applying a second layer of photoresist over the first layer of photoresist, the second layer of photoresist having a different optical property from the first layer of photoresist; selectively removing portions of the first and second photoresist layers and the dielectric film to form an opening to the substrate; removing additional portions of the first and second photoresist layers adjacent to the opening for exposing the upper surface of the dielectric film adjacent to the opening; removing a portion of the first adjacent to the opening to undercut the second photoresist layer; depositing metal in the opening and on the exposed upper surface of the dielectric film; and removing the first and second photoresist layers.
Claim 12
Independent Claim
158 words
A method of forming a T-shaped electrode on a semiconductor substrate, comprising the steps of: forming a dielectric film on the substrate, the dielectric film having an upper surface; applying a first layer of photoresist on the upper surface of the dielectric film; applying a second layer of photoresist over the first layer of photoresist, the second layer of photoresist having a different optical property from the first layer of photoresist; selectively removing portions of the first and second photoresist layers and the dielectric film to form an opening to the substrate; removing additional portions of the first and second photoresist layers adjacent to the opening for exposing the upper surface of the dielectric film adjacent to the opening; removing a portion of the first adjacent to the opening to undercut the second photoresist layer; depositing metal in the opening and on the exposed upper surface of the dielectric film; and removing the first and second photoresist layers.
Claim 13
Dependent Claim
43 words
A method as recited in claim 10 wherein the step of applying a second layer of photoresist over the first layer of photoresist comprises applying a photoresist which is responsive to a different wavelength of ultraviolet light than the first layer of photoresist.
Claim 14
Dependent Claim
164 words
A method as recited in claim 10 wherein the step of selectively removing portions of the first and second photoresist layers and the dielectric film to form an opening to the substrate comprises the steps of: exposing a region of the second photoresist layer defined by a photo mask to ultraviolet light to form an exposed region in the second photoresist layer; developing and removing the exposed region in the second photoresist layer for forming an opening in the second photoresist layer; exposing a region of the first photoresist layer uncovered by the opening in the second photoresist layer to ultraviolet light for forming an exposed region in the first photoresist layer; developing and removing the exposed region in the first photoresist layer for forming an opening in the first photoresist layer; and etching a region of the dielectric film uncovered by the opening in the first photoresist layer for forming an opening in the dielectric film that exposes a portion of the substrate.
Claim 15
Dependent Claim
46 words
A method as recited in claim 10 wherein the step of removing additional portions of the first and second photoresist layers adjacent to the opening to expose the upper surface of the dielectric film adjacent to the opening is performed using a reactive ion etching machine.
Claim 16
Dependent Claim
117 words
A method as recited in claim 10 wherein the step of removing a portion of the first photoresist layer adjacent to the opening to undercut the second photoresist layer comprises the steps of: exposing the second photoresist layer to ultraviolet light for forming an undercutting exposed region in the first photoresist layer adjacent the opening; developing and removing the undercutting exposed region in the first photoresist layer to undercut the second photoresist layer; exposing the first photoresist layer to ultraviolet light for forming a second undercutting exposed region in the first photoresist layer adjacent the opening; and developing and removing the second undercutting exposed region in the first photoresist layer for further undercutting the second photoresist layer.
Claim 17
Dependent Claim
59 words
A method as recited in claim 10 wherein the step of depositing metal in the opening and on the exposed upper surface of the dielectric film comprises the steps of: depositing an ohmic metal in the opening to the substrate and on the exposed upper surface of the dielectric film; and depositing a Schottky metal over the ohmic metal.
Claim 18
Dependent Claim
29 words
A method as recited in claim 15 wherein the ohmic metal comprises layers of gold-germanium, nickel, and gold, and the Schottky metal comprises layers of titanium, platinum, and gold.
Claim 19
Independent Claim
146 words
A method of forming a T-shaped electrode on a semiconductor substrate, comprising the steps of: forming a dielectric film on the substrate, the dielectric film having an upper surface; applying a layer of photoresist on the upper surface of the dielectric film, the layer of photoresist having first and second regions, the first region being intermediate the second region and the dielectric film; selectively removing portions of the photoresist layer and the dielectric film for forming an opening to the substrate; removing the photoresist layer adjacent to the opening for exposing the upper surface of the dielectric film adjacent to the opening; removing a portion of the first region of the photoresist layer adjacent to the opening to undercut the second region of the photoresist layer; depositing metal in the opening and on the exposed upper surface of the dielectric film; and removing the photoresist layer.
Claim 20
Independent Claim
146 words
A method of forming a T-shaped electrode on a semiconductor substrate, comprising the steps of: forming a dielectric film on the substrate, the dielectric film having an upper surface; applying a layer of photoresist on the upper surface of the dielectric film, the layer of photoresist having first and second regions, the first region being intermediate the second region and the dielectric film; selectively removing portions of the photoresist layer and the dielectric film for forming an opening to the substrate; removing the photoresist layer adjacent to the opening for exposing the upper surface of the dielectric film adjacent to the opening; removing a portion of the first region of the photoresist layer adjacent to the opening to undercut the second region of the photoresist layer; depositing metal in the opening and on the exposed upper surface of the dielectric film; and removing the photoresist layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-21 | 1997-08-23 | 1998-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-21 | 2001-08-23 | 2002-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-21 | 2005-08-23 | 2006-02-22 | $7700.00 | Window Closed / Lapsed |