US5923637A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing micro-tip for detecting tunneling current or micro-force or magnetic force
Assignee: Canon Inc
•
Filing: 1996-09-13
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Granted: 1999-07-13
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Expires: 2016-09-13
Abstract
Abstract A micro-tip for detecting tunneling current, micro force or magnetic force is manufactured as follows. A recess portion is formed on the surface of a first substrate. A peeling layer are formed on the substrate including the recess of the first substrate. A micro-tip is formed on the peeling layer of the first substrate. A joining layer is formed on a second substrate. The micro-tip on the peeling layer including the recess in the first substrate is transferred onto the joining layer on the second substrate. The peeling layer mainly consists of an oxide or a nitride, of a metal element, a semi-metal element or a semiconductor element.
Inventors
- 👤 Yasuhiro Shimada
- 👤 Takayuki Yagi
- 👤 Tsutomu Ikeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 00:47
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01Q60/24; G01Q60/38; G01Q60/50; G01Q60/54; G01Q70/00; G01Q70/08; G01Q70/14; G01R; G01R33/00; G01R33/02; G01R33/038; G01R33/0385; G11; G11B; G11B5/00; G11B5/127; G11B5/33; G11B5/35; G11B9/00; G11B9/12; G11B9/14; G11B9/1409; G11B9/1418; G11B9/1427; G11B9/1436; B82Y10/00; B82Y25/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/875
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
110 words
A method of manufacturing a micro-tip for detecting tunneling current, micro force or magnetic force, which comprises the steps of: forming a recess portion on the surface of a first substrate; forming a peeling layer on said first substrate containing said recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a joining layer on a second substrate; and transferring said micro-tip on the peeling layer containing said recess in said first substrate onto the joining layer on said second substrate; wherein, said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 2
Independent Claim
110 words
A method of manufacturing a micro-tip for detecting tunneling current, micro force or magnetic force, which comprises the steps of: forming a recess portion on the surface of a first substrate; forming a peeling layer on said first substrate containing said recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a joining layer on a second substrate; and transferring said micro-tip on the peeling layer containing said recess in said first substrate onto the joining layer on said second substrate; wherein, said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 3
Dependent Claim
13 words
A method according to claim 1, wherein said peeling layer comprises silicon dioxide.
Claim 4
Dependent Claim
24 words
A method according to claim 2, wherein said first substrate comprises silicon, and said silicon dioxide is formed by thermally oxidizing said first substrate.
Claim 5
Dependent Claim
19 words
A method according to claim 2, wherein said silicon dioxide has a film thickness of at least 500 nm.
Claim 6
Dependent Claim
13 words
A method according to claim 1, wherein said micro-tip comprises platinum or gold.
Claim 7
Dependent Claim
15 words
A method according to claim 1, wherein there are provided a plurality of said micro-tips.
Claim 8
Dependent Claim
40 words
A method according to claim 1, wherein the method further comprises the steps of: forming an electrode layer for plating on the peeling layer of said first substrate; and forming a micro-tip by plating on said electrode layer for plating.
Claim 9
Dependent Claim
13 words
A method according to claim 1, wherein said micro-tip comprises a magnetic material.
Claim 10
Dependent Claim
63 words
A female mold substrate used for manufacturing a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises: a recess formed on the surface of said female mold substrate; and a peeling layer provided on said substrate containing said recess; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 11
Dependent Claim
63 words
A female mold substrate used for manufacturing a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises: a recess formed on the surface of said female mold substrate; and a peeling layer provided on said substrate containing said recess; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 12
Dependent Claim
15 words
A female mold substrate according to claim 9, wherein said peeling layer comprises silicon dioxide.
Claim 13
Dependent Claim
19 words
A female mold substrate according to claim 9, wherein a plurality of said recesses are formed on said substrate.
Claim 14
Dependent Claim
50 words
A probe provided with a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises: a lever formed on a substrate; a joining layer formed on said lever; and a micro-tip formed on said joining layer; wherein a hollow space is present between said joining layer and said micro-tip.
Claim 15
Dependent Claim
50 words
A probe provided with a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises: a lever formed on a substrate; a joining layer formed on said lever; and a micro-tip formed on said joining layer; wherein a hollow space is present between said joining layer and said micro-tip.
Claim 16
Dependent Claim
17 words
A probe according to claim 12, wherein a plurality of said levers are formed on said substrate.
Claim 17
Dependent Claim
12 words
A probe according to claim 12, wherein said lever comprises monocrystal silicon.
Claim 18
Dependent Claim
12 words
A probe according to claim 12, wherein said micro-tip comprises a metal.
Claim 19
Dependent Claim
17 words
A probe according to claim 15, wherein said metal comprises Au, Pt, Ir, or an alloy thereof.
Claim 20
Dependent Claim
13 words
A probe according to claim 12, wherein said joining layer comprises a metal.
Claim 21
Dependent Claim
17 words
A probe according to claim 17, wherein the metal composing said joining layer comprises Pt or Al.
Claim 22
Dependent Claim
18 words
A probe according to claim 14, wherein said lever has an electric resistance of 0.01 Ω.cm or less.
Claim 23
Independent Claim
140 words
A method of manufacturing a probe having a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises the steps of: forming a recess on the surface of a first substrate comprising silicon; forming a peeling layer on said first substrate containing the recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a layer comprising an elastic material on a second substrate; forming a joining layer on the layer comprising the elastic material of said second substrate; transferring the micro-tip formed on said first substrate onto the joining layer on said second substrate; and removing part of said second substrate to form an elastic member comprising said elastic material; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 24
Independent Claim
140 words
A method of manufacturing a probe having a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises the steps of: forming a recess on the surface of a first substrate comprising silicon; forming a peeling layer on said first substrate containing the recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a layer comprising an elastic material on a second substrate; forming a joining layer on the layer comprising the elastic material of said second substrate; transferring the micro-tip formed on said first substrate onto the joining layer on said second substrate; and removing part of said second substrate to form an elastic member comprising said elastic material; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 25
Dependent Claim
13 words
A method according to claim 20, wherein said peeling layer comprises silicon dioxide.
Claim 26
Dependent Claim
21 words
A method according to claim 21, wherein silicon dioxide of said peeling layer is formed by thermally oxidizing said first substrate.
Claim 27
Dependent Claim
19 words
A method according to claim 21, wherein said silicon dioxide has a film thickness of at least 500 nm.
Claim 28
Dependent Claim
21 words
A method according to claim 20, wherein there are provided a plurality of said recesses, said micro-tips and said elastic members.
Claim 29
Independent Claim
200 words
A method of manufacturing a probe having a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises the steps of: forming a recess on the surface of a first substrate comprising silicon; forming a peeling layer on the surface containing the recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a joining layer comprising a resin film on a second substrate and/or on a third substrate having a beam pattern formed thereon; binding said second substrate and said third substrate together via said joining layer; shaping said third substrate into a flat thin film on said second substrate; forming a joining layer on said flat thin film; forming a supporting portion, which supports said flat thin film on said second substrate, on said second substrate; transferring the micro-tip on said first substrate onto the joining layer on said flat thin film; and removing the joining layer between said second substrate and said flat thin film, to form a gap between said flat thin film and said second substrate; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 30
Independent Claim
200 words
A method of manufacturing a probe having a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises the steps of: forming a recess on the surface of a first substrate comprising silicon; forming a peeling layer on the surface containing the recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a joining layer comprising a resin film on a second substrate and/or on a third substrate having a beam pattern formed thereon; binding said second substrate and said third substrate together via said joining layer; shaping said third substrate into a flat thin film on said second substrate; forming a joining layer on said flat thin film; forming a supporting portion, which supports said flat thin film on said second substrate, on said second substrate; transferring the micro-tip on said first substrate onto the joining layer on said flat thin film; and removing the joining layer between said second substrate and said flat thin film, to form a gap between said flat thin film and said second substrate; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 31
Dependent Claim
14 words
A method according to claim 25, wherein said third substrate comprises an SOI substrate.
Claim 32
Dependent Claim
15 words
A method according to claim 25, wherein there are provided a plurality of said micro-tips.
Claim 33
Independent Claim
140 words
A method of manufacturing a probe having a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises the steps of: forming a recess on the surface of a first substrate comprising silicon; forming a peeling layer on the surface containing the recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a lever comprising monocrystal Si through the peeling layer on a second substrate comprising a monocrystal Si material; forming a joining layer on said lever; transferring said micro-tip onto said joining layer; and removing said second substrate and the peeling layer on the back of said lever, to form a gap on the rear surface of said lever; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 34
Independent Claim
140 words
A method of manufacturing a probe having a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises the steps of: forming a recess on the surface of a first substrate comprising silicon; forming a peeling layer on the surface containing the recess of said first substrate; forming a micro-tip on the peeling layer of said first substrate; forming a lever comprising monocrystal Si through the peeling layer on a second substrate comprising a monocrystal Si material; forming a joining layer on said lever; transferring said micro-tip onto said joining layer; and removing said second substrate and the peeling layer on the back of said lever, to form a gap on the rear surface of said lever; wherein said peeling layer mainly consists of an oxide or nitride, of a metal element, a semi-metal element or a semiconductor element.
Claim 35
Dependent Claim
17 words
A method according to claim 28, wherein said micro-tip comprises Au, Pt, Ir or an alloy thereof.
Claim 36
Dependent Claim
18 words
A method according to claim 28, wherein said lever has an electric resistance of 0.01 Ω.cm or less.
Claim 37
Dependent Claim
13 words
A method according to claim 28, wherein said micro-tip is transferred through pressure-bonding.
Claim 38
Dependent Claim
87 words
A probe unit provided with a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises: a monocrystal Si substrate having a signal processing IC formed thereon; an insulating layer formed on said substrate; a lever comprising monocrystal Si partially supported by said insulating layer; a micro-tip, comprising a metal, arranged on said lever through a joining layer; and an electric wiring for transmitting a signal detected by said micro-tip to said IC, wherein a hollow space is present between said micro-tip and said joining layer.
Claim 39
Dependent Claim
87 words
A probe unit provided with a micro-tip for detecting tunneling current, micro-force or magnetic force, which comprises: a monocrystal Si substrate having a signal processing IC formed thereon; an insulating layer formed on said substrate; a lever comprising monocrystal Si partially supported by said insulating layer; a micro-tip, comprising a metal, arranged on said lever through a joining layer; and an electric wiring for transmitting a signal detected by said micro-tip to said IC, wherein a hollow space is present between said micro-tip and said joining layer.
Claim 40
Dependent Claim
28 words
A probe unit according to claim 32, wherein said monocrystal Si substrate has a through-hole made by crystal axis anisotropic etching at a position opposite to said lever.
Claim 41
Dependent Claim
18 words
A probe unit according to claim 32, wherein said micro-tip comprises Au, Pt, Ir, or an alloy thereof.
Claim 42
Dependent Claim
19 words
A probe unit according to claim 32, wherein said lever has an electric resistance of 0.01 Ω.cm or less.
Claim 43
Dependent Claim
37 words
A scanning probe microscope scanning a sample with a probe, and detecting a physical phenomenon occurring between said probe and said sample, thereby permitting observation of said sample, which comprises: a probe unit according to claim 32.
Claim 44
Dependent Claim
43 words
An information recording/reproduction apparatus for recording and/or reproducing information with a recording medium, by scanning said recording medium with a probe and utilizing a physical phenomenon occurring between said probe and said recording medium, which comprises: a probe unit according to claim 32.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-07-12 | 2003-01-11 | 2003-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-07-12 | 2007-01-11 | 2007-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-07-12 | 2011-01-11 | 2011-07-13 | $7700.00 | Window Closed / Lapsed |