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US5916359A
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Alkane and polyamine solvent compositions for liquid delivery chemical vapor deposition
Assignee: Entegris Inc
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Filing: 1997-11-20
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Granted: 1999-06-29
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Expires: 2017-11-20
Abstract
Abstract A solvent composition useful for liquid delivery chemical vapor deposition of organometallic precursors such as β-diketonate metal precursors. The solvent composition comprises a mixture of solvent species A, B and C in the proportion A:B:C wherein A is from about 3 to about 7 parts by volume, B is from about 2 to about 6 parts by volume, and C is from 0 to about 3 parts by volume, wherein A is a C 6 -C 8 alkane, B is a C 8 -C 12 alkane, and C is a glyme-based solvent (glyme, diglyme, tetraglyme, etc.) or a polyamine. The particular solvent composition including octane, decane and polyamine in an approximate 5:4:1 weight ratio is particularly usefully employed in the formation of SrBi 2 Ta 2 O 9 films.
Inventors
- 👤 Thomas H. Baum
- 👤 Gautam Bhandari
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:18
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/409; C23C16/44; C23C16/448; C23C16/4481; C23C16/06; C23C16/18; Y; Y10; Y10S; Y10S423/00; Y10S423/09; Y10S423/14
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
114 words
A solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, comprising a mixture of solvent species A, B and C in the proportion A:B:C wherein A is from about 3 to about 7 parts by volume, B is from about 2 to about 6 parts by volume, and C is present up to about 3 parts by volume, wherein said parts by volume are based on the total volume of the mixture, and wherein A is a C 6 -C 8 alkane, B is a C 8 -C 12 alkane, A and B are different from one another, and C is selected from the group consisting of glyme-based solvents and polyamines.
Claim 2
Dependent Claim
114 words
A solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, comprising a mixture of solvent species A, B and C in the proportion A:B:C wherein A is from about 3 to about 7 parts by volume, B is from about 2 to about 6 parts by volume, and C is present up to about 3 parts by volume, wherein said parts by volume are based on the total volume of the mixture, and wherein A is a C 6 -C 8 alkane, B is a C 8 -C 12 alkane, A and B are different from one another, and C is selected from the group consisting of glyme-based solvents and polyamines.
Claim 3
Dependent Claim
25 words
A composition according to claim 1, wherein said solvent species C is a glyme-based solvent selected from the group consisting of glyme, diglyme, and tetraglyme.
Claim 4
Dependent Claim
24 words
A composition according to claim 1, wherein said solvent species C is a polyamine selected from the group consisting of N,N,N',N'-tetramethylethylenediamine, N,N,N',N",N"-pentamethyldiethylenetriamine, and N,N,N',N",N'",N'"-hexamethyltriethylenetetramine.
Claim 5
Dependent Claim
15 words
A composition according to claim 1, wherein A:B:C are in approximately 5:4:1 proportion by volume.
Claim 6
Dependent Claim
13 words
A composition according to claim 1, wherein the solvent species C comprises N,N,N',N",N"-pentamethyldiethylenetriamine.
Claim 7
Dependent Claim
13 words
A composition according to claim 1, wherein the solvent species C comprises N,N,N',N",N'",N'"-hexamethyltriethylenetetramine.
Claim 8
Dependent Claim
13 words
A composition according to claim 1, wherein the solvent species C comprises N,N,N',N'-tetramethylethylenediamine.
Claim 9
Dependent Claim
63 words
A solvent composition, comprising octane, decane and a polyamine in the proportion octane:decane:polyamine wherein octane is from about 3 to about 7 parts by volume, decane is from about 2 to about 6 parts by volume, and polyamine is present up to about 3 parts by volume, and wherein said parts by volume are based on the total volume of the solvent composition.
Claim 10
Dependent Claim
63 words
A solvent composition, comprising octane, decane and a polyamine in the proportion octane:decane:polyamine wherein octane is from about 3 to about 7 parts by volume, decane is from about 2 to about 6 parts by volume, and polyamine is present up to about 3 parts by volume, and wherein said parts by volume are based on the total volume of the solvent composition.
Claim 11
Dependent Claim
30 words
An alkane/polyamine solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, said composition comprising octane, decane and a polyamine in an approximate respective volume ratio of 5:4:1.
Claim 12
Dependent Claim
30 words
An alkane/polyamine solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, said composition comprising octane, decane and a polyamine in an approximate respective volume ratio of 5:4:1.
Claim 13
Dependent Claim
119 words
A precursor composition for liquid delivery chemical vapor deposition, comprising a metal organic precursor in a solvent composition comprising a mixture of solvent species A, B and C in the proportion A:B:C wherein A is from about 3 to about 7 parts by volume, B is from about 2 to about 6 parts by volume, and C is present up to about 3 parts by volume, wherein said parts by volume are based on the total volume of the mixture, and wherein A is a C 6 -C 8 alkane, B is a C 8 -C 12 alkane, A and B are different from one another, and C is selected from the group consisting of glyme-based solvents and polyamines.
Claim 14
Dependent Claim
119 words
A precursor composition for liquid delivery chemical vapor deposition, comprising a metal organic precursor in a solvent composition comprising a mixture of solvent species A, B and C in the proportion A:B:C wherein A is from about 3 to about 7 parts by volume, B is from about 2 to about 6 parts by volume, and C is present up to about 3 parts by volume, wherein said parts by volume are based on the total volume of the mixture, and wherein A is a C 6 -C 8 alkane, B is a C 8 -C 12 alkane, A and B are different from one another, and C is selected from the group consisting of glyme-based solvents and polyamines.
Claim 15
Dependent Claim
26 words
A precursor composition according to claim 10, wherein said solvent species C is a glyme-based solvent selected from the group consisting of glyme, diglyme, and tetraglyme.
Claim 16
Dependent Claim
25 words
A precursor composition according to claim 10, wherein said solvent species C is a polyamine selected from the group consisting of N,N,N',N'-tetramethylethylenediamine, N,N,N',N",N"-pentamethyldiethylenetriamine, and N,N,N',N",N'",N'"-hexamethyltriethylenetetramine.
Claim 17
Dependent Claim
16 words
A precursor composition according to claim 10, wherein A:B:C are in approximately 5:4:1 proportion by volume.
Claim 18
Dependent Claim
14 words
A precursor composition according to claim 10, wherein the solvent species C comprises N,N,N',N",N"-pentamethyldiethylenetriamine.
Claim 19
Dependent Claim
14 words
A precursor composition according to claim 10, wherein the solvent species C comprises N,N,N',N",N'",N'"-hexamethyltriethylenetetramine.
Claim 20
Dependent Claim
13 words
A composition according to claim 10, wherein the solvent species C comprises N,N,N',N'-tetramethylethylenediamine.
Claim 21
Dependent Claim
17 words
A precursor composition according to claim 10, wherein said metal organic precursor comprises a metal β-diketonate precursor.
Claim 22
Dependent Claim
17 words
A precursor composition according to claim 10, wherein said metal organic precursor includes a Group II metal.
Claim 23
Dependent Claim
42 words
A precursor composition according to claim 10, wherein said metal organic precursor includes a metal selected from the group consisting of Bi, Ca, Sr, Ba, Pb, Na, Fe, Al, Sc, Y, Ti, Nb, Ta, W, Mo and metals of the lanthanide series.
Claim 24
Dependent Claim
20 words
A precursor composition according to claim 10, wherein said metal organic precursor comprises β-diketonate complexes of strontium, bismuth and tantalum.
Claim 25
Dependent Claim
24 words
A precursor composition according to claim 10, wherein said metal organic precursor comprises Sr(thd) 2 (pentamethyldiethylenetriamine), Bi(thd) 3 and Ta(OiPr) 4 (thd) where thd=2,2,6,6-tetramethyl-3,5-heptanedionato.
Claim 26
Dependent Claim
35 words
A composition according to claim 10, wherein said metal organic precursor comprises a β-diketonato metal complex wherein the β-diketonato ligand is selected from the group consisting of: 2,2,6,6-tetramethyl-3,5-heptanedionato; 1,1,1-trifluoro-2,4-pentanedionato; 1,1,1,5,5,5-hexafluoro-2,4-pentanedionato; 6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionato; 2,2,7-trimethyl-3,5-octanedionato; 1,1,1,5,5,6,6,7,7,7-decafluoro-2,4-heptanedionato; and 1,1,1-trifluoro-6-methyl-2,4-heptanedionato.
Claim 27
Dependent Claim
67 words
A precursor composition, comprising a solvent mixture of octane, decane and a polyamine in the proportion octane:decane:polyamine wherein octane is from about 3 to about 7 parts by volume, decane is from about 2 to about 6 parts by volume, and polyamine is present up to about 3 parts by volume, and wherein said parts by volume are based on the total volume of the solvent mixture.
Claim 28
Dependent Claim
67 words
A precursor composition, comprising a solvent mixture of octane, decane and a polyamine in the proportion octane:decane:polyamine wherein octane is from about 3 to about 7 parts by volume, decane is from about 2 to about 6 parts by volume, and polyamine is present up to about 3 parts by volume, and wherein said parts by volume are based on the total volume of the solvent mixture.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-06-28 | 2002-12-28 | 2003-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-06-28 | 2006-12-28 | 2007-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-06-28 | 2010-12-28 | 2011-06-29 | $7700.00 | Window Closed / Lapsed |