US5696384A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Composition for formation of electrode pattern
Assignee: Mitsubishi Materials Corp
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Filing: 1995-12-27
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Granted: 1997-12-09
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Expires: 2015-12-27
Abstract
Abstract A Pt film-forming composition comprises a dimethyl Pt(II) (N,N,N',N'-tetramethylethylenediamine) complex and an organic solvent. A Pt film is formed by applying this composition to a substrate and then subjecting the applied layer of the composition to a heat treatment. A Pt film pattern is obtained by applying this composition to a substrate, pattern-exposing the produced applied layer of the composition to radiation, developing the exposed layer, and then subjecting the developed layer to a heat treatment.
Inventors
- 👤 Katsumi Ogi
- 👤 Hiroto Uchida
- 👤 Atsushi Itsuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:41
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/02; C23C18/08; C07; C07F; C07F15/00; C07F15/0006; C07F15/0086; C23C16/00; C23C16/06; C23C16/18; H; H10; H10P; H10P14/00; H10P14/40; H10P14/46; H10W; H10W20/00; H10W20/01; H10W20/031
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
50 words
A Pt film-forming composition comprising: a dimethyl Pt(II) (N,N,N',N'-tetramethylethylenediamine complex of formula (1), ##STR5## an organic solvent, and an alkoxide of at least one metal selected from the group consisting of Si, B, P, Bi, Ti, Zr, V, Nb, Ta, Ge, and Pb or an acid salt of said metal.
Claim 2
Dependent Claim
50 words
A Pt film-forming composition comprising: a dimethyl Pt(II) (N,N,N',N'-tetramethylethylenediamine complex of formula (1), ##STR5## an organic solvent, and an alkoxide of at least one metal selected from the group consisting of Si, B, P, Bi, Ti, Zr, V, Nb, Ta, Ge, and Pb or an acid salt of said metal.
Claim 3
Dependent Claim
43 words
The Pt film-forming composition according to claim 1, wherein said alkoxide of said metal or said organic acid salt of said metal is present at a concentration in the range of 0.1 to 5.0% by weight based on the oxide of the metal.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-08 | 2001-06-09 | 2001-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-08 | 2005-06-09 | 2005-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-08 | 2009-06-09 | 2009-12-09 | $7700.00 | Window Closed / Lapsed |