Patent US5893756A successfully refreshed from Google Patents.
US5893756A
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US
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Use of ethylene glycol as a corrosion inhibitor during cleaning after metal chemical mechanical polishing
Assignee: Bell Semiconductor LLC
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Filing: 1997-08-26
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Granted: 1999-04-13
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Expires: 2017-08-26
Abstract
Abstract A post metal chemical-mechanical polishing cleaning process that effectively inhibits corrosion of a metallic plug is described. The process includes providing a partially fabricated integrated circuit (IC) substrate having a metallic plug that is formed by subjecting a metallic surface on the integrated circuit (IC) substrate to chemical-mechanical polishing, which produces a contaminated dielectric layer containing metallic contaminants. The process also includes scrubbing the IC substrate surface in the presence of a mixture including ethylene glycol and hydrofluoric acid to remove at least a portion of the contaminated dielectric layer and to effectively inhibit corrosion of the metallic plug. The mixture has ethylene glycol in an amount that is between about 2 times and about 7 times the amount of hydrofluoric acid.
Inventors
- 👤 Michael J. Berman
- 👤 Jayashree Kalpathy-Cramer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 19:05
CPC Classifications
C; C23; C23F; C23F11/00; C23F11/08; C23F11/10; C23F11/12; C23F11/122; H; H10; H10P; H10P52/00; H10P52/40; H10P52/403; H10P70/00; H10P70/20; H10P70/27; H10P70/277
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
116 words
A post metal chemical-mechanical polishing cleaning process that effectively inhibits corrosion of a metallic plug, comprising: providing a partially fabricated integrated circuit (IC) substrate including a metallic plug that is formed by subjecting a metallic surface of said integrated circuit (IC) substrate to chemical-mechanical polishing, which produces a contaminated dielectric layer containing metallic contaminants; and scrubbing said IC substrate surface in the presence of a mixture including ethylene glycol and hydrofluoric acid to remove at least a portion of said contaminated dielectric layer and to effectively inhibit corrosion of said metallic plug, wherein said mixture has ethylene glycol in an amount that is between about 2 times and about 7 times the amount of hydrofluoric acid.
Claim 2
Dependent Claim
116 words
A post metal chemical-mechanical polishing cleaning process that effectively inhibits corrosion of a metallic plug, comprising: providing a partially fabricated integrated circuit (IC) substrate including a metallic plug that is formed by subjecting a metallic surface of said integrated circuit (IC) substrate to chemical-mechanical polishing, which produces a contaminated dielectric layer containing metallic contaminants; and scrubbing said IC substrate surface in the presence of a mixture including ethylene glycol and hydrofluoric acid to remove at least a portion of said contaminated dielectric layer and to effectively inhibit corrosion of said metallic plug, wherein said mixture has ethylene glycol in an amount that is between about 2 times and about 7 times the amount of hydrofluoric acid.
Claim 3
Dependent Claim
37 words
The process of claim 1, wherein the step of scrubbing is carried out in a wafer scrubber where a brush contacts the substrate surface and mechanically removes at least a portion of the contaminated dielectric layer therefrom.
Claim 4
Dependent Claim
11 words
The process of claim 1, wherein the mixture includes deionized water.
Claim 5
Dependent Claim
25 words
The process of claim 1, wherein the amount of ethylene glycol is between about 2 times and about 5 times the amount of hydrofluoric acid.
Claim 6
Dependent Claim
70 words
The process of claim 1, further comprising a step of removing particle contaminants produced during the chemical-mechanical polishing process and adhering to the substrate surface from the substrate surface by scrubbing the substrate surface with a brush in the presence of sufficient amounts of ammonium hydroxide to produce an appropriate pH on the substrate surface that facilitates the separation of the particle contaminants from the substrate surface and the brush.
Claim 7
Dependent Claim
47 words
The process of claim 1, further comprising a step of performing a spin, rinse, dry cycle whereby the IC substrate surface is rinsed with deionized water to remove chemicals from the IC substrate surface and dried by exposing the IC substrate surface to a radiant heat source.
Claim 8
Dependent Claim
22 words
The process of claim 1, wherein said metal comprises at least one selected from the group consisting of tungsten, aluminum and copper.
Claim 9
Dependent Claim
166 words
A post tungsten chemical-mechanical polishing cleaning 15 process that effectively inhibits corrosion of a tungsten plug, comprising: providing a partially fabricated IC substrate including a tungsten plug that is formed by subjecting a tungsten layer on a surface of said IC substrate to chemical-mechanical polishing, which produces particle contaminants and a contaminated dielectric layer containing metallic contaminants; removing particle contaminants from said substrate surface by scrubbing with a brush said substrate surface in the presence of sufficient amounts of ammonium hydroxide such that a pH of about 9.5 and above is maintained above said substrate surface and whereby tungsten oxide separates from said substrate surface and said brush; and scrubbing said IC substrate surface in the presence of a mixture including ethylene glycol and hydrofluoric acid to thereby remove said contaminated dielectric layer and to effectively inhibit corrosion of said metallic plug, wherein said mixture has ethylene glycol in an amount that is between about 2 times and about 7 times the amount of hydrofluoric acid.
Claim 10
Dependent Claim
166 words
A post tungsten chemical-mechanical polishing cleaning 15 process that effectively inhibits corrosion of a tungsten plug, comprising: providing a partially fabricated IC substrate including a tungsten plug that is formed by subjecting a tungsten layer on a surface of said IC substrate to chemical-mechanical polishing, which produces particle contaminants and a contaminated dielectric layer containing metallic contaminants; removing particle contaminants from said substrate surface by scrubbing with a brush said substrate surface in the presence of sufficient amounts of ammonium hydroxide such that a pH of about 9.5 and above is maintained above said substrate surface and whereby tungsten oxide separates from said substrate surface and said brush; and scrubbing said IC substrate surface in the presence of a mixture including ethylene glycol and hydrofluoric acid to thereby remove said contaminated dielectric layer and to effectively inhibit corrosion of said metallic plug, wherein said mixture has ethylene glycol in an amount that is between about 2 times and about 7 times the amount of hydrofluoric acid.
Claim 11
Dependent Claim
27 words
The process of claim 8, wherein said step of removing comprises providing deionized water and about 2% by volume of said ammonium hydroxide on said substrate surface.
Claim 12
Dependent Claim
28 words
The process of claim 8, wherein said step of scrubbing is carried out until between about 50 and about 100 Ångstroms of said contaminated dielectric layer is removed.
Claim 13
Dependent Claim
23 words
The process of claim 8, wherein said amount of hydrofluoric acid is between about 0.5% and about 1% by volume in said mixture.
Claim 14
Dependent Claim
23 words
The process of claim 8, wherein said amount of ethylene glycol is between about 1% and about 7% by volume in said mixture.
Claim 15
Dependent Claim
12 words
The process of claim 8, wherein the particle contaminants comprise tungsten oxide.
Claim 16
Dependent Claim
13 words
The process of claim 8, wherein the metallic contaminants comprise iron or potassium.
Claim 17
Dependent Claim
67 words
A corrosion inhibiting composition for cleaning a partially fabricated IC having metallic plugs, comprising: an effective amount of hydrofluoric acid to remove at least portions of a contaminated dielectric layer having metallic contaminants; and an effective amount of ethylene glycol to inhibit corrosion of said metallic plug, wherein said amount of ethylene glycol is between about 2 times and about 7 times said amount of hydrofluoric acid.
Claim 18
Dependent Claim
67 words
A corrosion inhibiting composition for cleaning a partially fabricated IC having metallic plugs, comprising: an effective amount of hydrofluoric acid to remove at least portions of a contaminated dielectric layer having metallic contaminants; and an effective amount of ethylene glycol to inhibit corrosion of said metallic plug, wherein said amount of ethylene glycol is between about 2 times and about 7 times said amount of hydrofluoric acid.
Claim 19
Dependent Claim
9 words
The composition of claim 15, further comprising deionized water.
Claim 20
Dependent Claim
26 words
The composition of claim 15, wherein the amount of ethylene glycol is between about 2 times and about 5 times the amount of the hydrofluoric acid.
Claim 21
Dependent Claim
23 words
The composition of claim 15, wherein the amount of hydrofluoric acid in the composition is between about 0.5% and about 1% by volume.
Claim 22
Dependent Claim
19 words
The composition of claim 18, wherein the amount of hydrofluoric acid in the composition is about 0.5% by volume.
Claim 23
Dependent Claim
20 words
The composition of claim 19, wherein the amount of ethylene glycol is between about 1% and about 3.5% by volume.
Claim 24
Dependent Claim
20 words
The composition of claim 20, wherein the amount of ethylene glycol is between about 1% and about 2.5% by volume.
Claim 25
Dependent Claim
23 words
The composition of claim 15, wherein the amount of ethylene glycol in the composition is between about 1% and about 7% by volume.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-04-12 | 2002-10-12 | 2003-04-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-04-12 | 2006-10-12 | 2007-04-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-04-12 | 2010-10-12 | 2011-04-13 | $7700.00 | Window Closed / Lapsed |