US5879856A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemically amplified positive photoresists
Assignee: DuPont Electronic Materials International LLC
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Filing: 1995-12-05
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Granted: 1999-03-09
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Expires: 2015-12-05
Abstract
Abstract Photoresist compositions are provided comprising 1) a resin binder having photoacid-labile groups, 2) an acid generator and 3) a photospeed control agent. Photoresists of the invention exhibit good photospeed and can provide highly resolved relief images of small dimensions, including lines of sub-micron and sub-half micron dimensions with at least essentially vertical side walls. Methods are also provided that include control of photospeed of a photoresist composition of the invention.
Inventors
- 👤 James W. Thackeray
- 👤 Peter R. Hagerty
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 00:15
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/0045; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
66 words
A method for controlling photospeed of a chemically amplified positive photoresist, comprising: (a) providing a positive photoresist composition comprising a resin binder with acid labile groups, a photoacid generator, and a photospeed control agent that is a lactate salt; (b) determining the photospeed of the photoresist composition, and adjusting the photospeed to a desired value by altering the amount of photospeed control agent in the composition.
Claim 2
Independent Claim
66 words
A method for controlling photospeed of a chemically amplified positive photoresist, comprising: (a) providing a positive photoresist composition comprising a resin binder with acid labile groups, a photoacid generator, and a photospeed control agent that is a lactate salt; (b) determining the photospeed of the photoresist composition, and adjusting the photospeed to a desired value by altering the amount of photospeed control agent in the composition.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein an additional amount of the photospeed control agent is added to the composition to adjust the photospeed.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein the photospeed control agent has a pK a of about 10 or greater in non-salt form.
Claim 5
Independent Claim
80 words
A method for forming a photoresist relief image comprising: applying a coating layer of the photoresist composition onto a substrate the photoresist composition comprising 1) a resin binder comprising acid labile groups, 2) a photoacid generator that is a sulfonate compound, an onium salt, a nitrobenzyl ester, an s-triazine or a halogenated non-ionic compound; and 3) a photospeed control agent that is a lactate salt imagewise exposing to a source of activating energy; and developing to form a relief image.
Claim 6
Independent Claim
80 words
A method for forming a photoresist relief image comprising: applying a coating layer of the photoresist composition onto a substrate the photoresist composition comprising 1) a resin binder comprising acid labile groups, 2) a photoacid generator that is a sulfonate compound, an onium salt, a nitrobenzyl ester, an s-triazine or a halogenated non-ionic compound; and 3) a photospeed control agent that is a lactate salt imagewise exposing to a source of activating energy; and developing to form a relief image.
Claim 7
Dependent Claim
18 words
The method of claim 1 wherein the photospeed control agent is a lactate salt of an organic amine.
Claim 8
Dependent Claim
18 words
The method of claim 1 wherein the photospeed control agent is a lactate salt of a tetra-alkylammonium compound.
Claim 9
Dependent Claim
13 words
The method of claim 1 wherein the photoacid generator is a sulfonate salt.
Claim 10
Dependent Claim
20 words
The method of claim 1 wherein the photospeed control agent is a compound selected from the group consisting of: ##STR4##
Claim 11
Dependent Claim
26 words
The method of claim 1 wherein the photoacid generator is a sulfonate compound, an onium salt, a nitrobenzyl ester, an s-triazine or a halogenated non-ionic compound.
Claim 12
Dependent Claim
18 words
The method of claim 4 wherein the photospeed control agent is a lactate salt of an organic amine.
Claim 13
Dependent Claim
18 words
The method of claim 4 wherein the photospeed control agent is a lactate salt of a tetra-alkylammonium compound.
Claim 14
Dependent Claim
19 words
The method of claim 1 wherein the photospeed control agent is a lactate salt of a tetra-butylammonium hydroxide compound.
Claim 15
Dependent Claim
12 words
The method of claim 1 wherein the substrate is a microelectronic wafer.
Claim 16
Dependent Claim
14 words
The method of claim 1 wherein the substrate is a flat panel display substrate.
Claim 17
Dependent Claim
19 words
The method of claim 4 wherein the photospeed control agent is a lactate salt of a tetra-butylammonium hydroxide compound.
Claim 18
Dependent Claim
12 words
The method of claim 4 wherein the substrate is a microelectronic wafer.
Claim 19
Dependent Claim
14 words
The method of claim 4 wherein the substrate is a flat panel display substrate.
Claim 20
Independent Claim
53 words
A method for forming a photoresist relief image comprising: applying a coating layer of the photoresist composition onto a substrate the photoresist composition comprising a resin binder comprising acid labile groups, a photoacid generator, and a lactate salt imagewise exposing to a source of activating energy; and developing to form a relief image.
Claim 21
Independent Claim
53 words
A method for forming a photoresist relief image comprising: applying a coating layer of the photoresist composition onto a substrate the photoresist composition comprising a resin binder comprising acid labile groups, a photoacid generator, and a lactate salt imagewise exposing to a source of activating energy; and developing to form a relief image.
Claim 22
Dependent Claim
16 words
The method of claim 18 wherein the salt is a lactate salt of an organic amine.
Claim 23
Dependent Claim
16 words
The method of claim 18 wherein the salt is a lactate salt of a tetraalkylammonium compound.
Claim 24
Dependent Claim
17 words
The method of claim 18 wherein the salt is a lactate salt of a tetra-butylammonium hydroxide compound.
Claim 25
Dependent Claim
12 words
The method of claim 18 wherein the substrate is a microelectronic wafer.
Claim 26
Dependent Claim
14 words
The method of claim 18 wherein the substrate is a flat panel display substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-08 | 2002-09-07 | 2003-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-08 | 2006-09-07 | 2007-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-08 | 2010-09-07 | 2011-03-09 | $7700.00 | Window Closed / Lapsed |