US5861054A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing slurry
Assignee: Toshiba Corp
•
Filing: 1996-11-12
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Granted: 1999-01-19
•
Expires: 2016-11-12
Abstract
Abstract A polishing slurry for use in chemical mechanical polishing is disclosed. The polishing slurry contains a solvent and polishing particles dispersed in this solvent. The polishing particles are selected from silicon nitride, silicon carbide, and graphite. The primary particle size of the polishing particles dispersed in the solvent is appropriately 0.01 to 1000 nm. When the polishing particles are colloidally dispersed in the solvent, the secondary particle size of the polishing particles is appropriately 60 to 300 nm.
Inventors
- 👤 Naoto Miyashita
- 👤 Masahiro Abe
- 👤 Mariko Shimomura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 08:13
CPC Classifications
C; C09; C09G; C09G1/00; C09G1/02; H; H10; H10P; H10P52/00; B; B24; B24B; B24B37/00; B24B37/04; H10P14/00; H10P14/60; H10P14/61; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
32 words
A polishing slurry comprising: an acidic solvent; polishing particles colloidally dispersed in said solvent comprising silicon nitride; and wherein a primary particle size of said polishing particles is 0.01 to 1000 nm.
Claim 2
Dependent Claim
32 words
A polishing slurry comprising: an acidic solvent; polishing particles colloidally dispersed in said solvent comprising silicon nitride; and wherein a primary particle size of said polishing particles is 0.01 to 1000 nm.
Claim 3
Dependent Claim
20 words
A slurry according to claim 1, wherein a secondary particle size of said polishing particles is 60 to 300 nm.
Claim 4
Dependent Claim
17 words
A slurry according to claim 1, wherein a viscosity of said solvent is 1 to 10 cp.
Claim 5
Dependent Claim
13 words
A slurry according to claim 1, wherein said acidic solvent is nitric acid.
Claim 6
Dependent Claim
14 words
A slurry according to claim 1, wherein said solvent has a chemical etching effect.
Claim 7
Dependent Claim
14 words
A slurry according to claim 5, further comprising: a dispersant added to said solvent.
Claim 8
Dependent Claim
24 words
A slurry according to claim 6, wherein said dispersant is an emulsifying agent, water, ionized water, a surfactant, an adhesive, or fats and oils.
Claim 9
Dependent Claim
22 words
A polishing slurry comprising: an acidic solvent; and polishing particles colloidally dispersed in said solvent comprising silicon nitride, silicon carbide, or graphite.
Claim 10
Dependent Claim
22 words
A polishing slurry comprising: an acidic solvent; and polishing particles colloidally dispersed in said solvent comprising silicon nitride, silicon carbide, or graphite.
Claim 11
Dependent Claim
20 words
A slurry according to claim 8, wherein a primary particle size of said polishing particles is 0.01 to 1000 nm.
Claim 12
Dependent Claim
25 words
A slurry according to claim 8, wherein a secondary particle size of said polishing particles colloidally dispersed in said solvent is 60 to 300 nm.
Claim 13
Dependent Claim
17 words
A slurry according to claim 8, wherein a viscosity of said solvent is 1 to 10 cp.
Claim 14
Dependent Claim
13 words
A slurry according to claim 8, wherein said acidic solvent is nitric acid.
Claim 15
Dependent Claim
14 words
A slurry according to claim 8, wherein said solvent has a chemical etching effect.
Claim 16
Dependent Claim
14 words
A slurry according to claim 13, further comprising: a dispersant added to said solvent.
Claim 17
Dependent Claim
24 words
A slurry according to claim 14, wherein said dispersant is an emulsifying agent, water, ionized water, a surfactant, an adhesive, or fats and oils.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-18 | 2002-07-20 | 2003-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-18 | 2006-07-20 | 2007-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-18 | 2010-07-20 | 2011-01-19 | $7700.00 | Window Closed / Lapsed |