US5860640A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer alignment member and clamp ring
Assignee: Applied Materials Inc
•
Filing: 1995-11-29
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Granted: 1999-01-19
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Expires: 2015-11-29
Abstract
Abstract A semiconductor processing chamber includes a substrate support member on which a substrate and a clamp ring are aligned during processing in the chamber. To align the substrate on the support member, a frustoconical substrate alignment member extends about the perimeter of the substrate receiving surface of the support member to capture a substrate received in the chamber and center the substrate on the upper surface of the support member. The alignment member includes an alignment face thereon, which urges a substrate into alignment with the substrate receiving face of the support member as the substrate is deposited on the support member. To clamp the substrate in proper alignment on the support member and flatten any warpage in the substrate, a clamp ring alignment member is provided which aligns and supports a clamp ring on a substrate without causing significant shadowing of the substrate. The clamp ring is vertically and laterally aligned relative to the support member and substrate centered thereon. The clamp ring alignment member is preferably a plurality of adjustable alignment pins positioned in the outer perimeter of the support member.
Inventors
- 👤 Dan A. Marohl
- 👤 Michael Rosenstein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:01
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H10P72/50; H10P72/7611; H10P72/7612; Y; Y10; Y10S; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
111 words
An apparatus for aligning and clamping a substrate on a support member, comprising: a) a substrate support member having a substrate receiving surface, a substrate positioning member and at least one clamp ring alignment member vertically disposed on the support member, the substrate positioning member having an upper tapered portion; and b) a clamp ring having a plurality of vertical recesses for engagement with the clamp ring alignment member of the substrate support member to support the clamp ring in a spaced relationship with the substrate receiving surface and an inner seat surface for receiving and engaging a peripheral portion of the substrate; c) wherein the substrate positioning member is annular.
Claim 2
Independent Claim
111 words
An apparatus for aligning and clamping a substrate on a support member, comprising: a) a substrate support member having a substrate receiving surface, a substrate positioning member and at least one clamp ring alignment member vertically disposed on the support member, the substrate positioning member having an upper tapered portion; and b) a clamp ring having a plurality of vertical recesses for engagement with the clamp ring alignment member of the substrate support member to support the clamp ring in a spaced relationship with the substrate receiving surface and an inner seat surface for receiving and engaging a peripheral portion of the substrate; c) wherein the substrate positioning member is annular.
Claim 3
Dependent Claim
22 words
The apparatus of claim 1, wherein the substrate positioning member is disposed on the substrate support member adjacent the substrate receiving surface.
Claim 4
Dependent Claim
17 words
The apparatus of claim 1, wherein the upper tapered portion of the substrate positioning member is frustoconical.
Claim 5
Dependent Claim
27 words
The apparatus of claim 1, wherein the substrate positioning member comprises a plurality of indexing posts disposed on the substrate support member adjacent the substrate receiving surface.
Claim 6
Dependent Claim
19 words
The apparatus of claim 1, wherein the upper tapered portion of the substrate positioning member includes an alignment ridge.
Claim 7
Dependent Claim
33 words
The apparatus of claim 5, wherein the alignment ridge is spaced from the substrate receiving surface of the substrate support member by a distance which exceeds the maximum height of a substrate warpage.
Claim 8
Independent Claim
130 words
An apparatus for aligning and clamping a substrate on a support member, comprising: a) a substrate support member having a substrate receiving surface. a substrate positioning member and at least one clamp ring alignment member vertically disposed on the support member, the substrate positioning member having an upper tapered portion; and b) a clamp ring having a plurality of vertical recesses for engagement with the clamp ring alignment member of the substrate support member to support the clamp ring in a spaced relationship with the substrate receiving surface and an inner seat surface for receiving and engaging a peripheral portion of the substrate; c) wherein the clamp ring alignment member comprises a plurality of alignment pins having an upper conical portion for mating with the recesses on the clamp ring.
Claim 9
Independent Claim
130 words
An apparatus for aligning and clamping a substrate on a support member, comprising: a) a substrate support member having a substrate receiving surface. a substrate positioning member and at least one clamp ring alignment member vertically disposed on the support member, the substrate positioning member having an upper tapered portion; and b) a clamp ring having a plurality of vertical recesses for engagement with the clamp ring alignment member of the substrate support member to support the clamp ring in a spaced relationship with the substrate receiving surface and an inner seat surface for receiving and engaging a peripheral portion of the substrate; c) wherein the clamp ring alignment member comprises a plurality of alignment pins having an upper conical portion for mating with the recesses on the clamp ring.
Claim 10
Dependent Claim
42 words
The apparatus of claim 7, wherein the clamp ring further comprises a roof having a second recess to receive the substrate positioning member, the second recess being sized and positioned to prevent contact between the substrate positioning member and the clamp ring.
Claim 11
Dependent Claim
20 words
The apparatus of claim 7, wherein the clamp ring further comprises a wafer flat portion for aligning a wafer flat.
Claim 12
Dependent Claim
34 words
The apparatus of claim 7, wherein the substrate support member further includes a spacing member disposed on the substrate support member to provide an offset distance between the substrate and the substrate support member.
Claim 13
Dependent Claim
12 words
The apparatus of claim 7, wherein the alignment pins are vertically adjustable.
Claim 14
Dependent Claim
11 words
The apparatus of claim 11, wherein the alignment pins are threaded.
Claim 15
Dependent Claim
52 words
The apparatus of claim 7, wherein the clamp ring further comprises a roof extending outwardly of the inner seat surface and generally parallel to the substrate receiving surface, and a lip extending inwardly of the inner seat surface and overhanging a peripheral portion of a substrate positioned on the substrate receiving surface.
Claim 16
Dependent Claim
24 words
The apparatus of claim 13, wherein the roof includes at least one clamp ring alignment recess for receipt of the clamp ring alignment member.
Claim 17
Dependent Claim
39 words
The apparatus of claim 14, wherein the clamp ring alignment recess is sized and positioned to receive the clamp ring alignment member during processing and to space the clamp ring from the support member and define a gap therebetween.
Claim 18
Dependent Claim
60 words
A substrate support member, comprising: a) a substrate receiving surface; b) at least one clamp ring alignment member vertically disposed on the support member and radially outward of the substrate receiving surface and c) a substrate alignment member located outwardly of the substrate receiving surface and having an upper tapered portion. wherein the substrate alignment member is an annular ring.
Claim 19
Dependent Claim
60 words
A substrate support member, comprising: a) a substrate receiving surface; b) at least one clamp ring alignment member vertically disposed on the support member and radially outward of the substrate receiving surface and c) a substrate alignment member located outwardly of the substrate receiving surface and having an upper tapered portion. wherein the substrate alignment member is an annular ring.
Claim 20
Dependent Claim
26 words
The apparatus of claim 16, wherein the annular ring comprises a frustoconical upper portion for urging a misaligned substrate into alignment over the substrate receiving surface.
Claim 21
Dependent Claim
28 words
The apparatus of claim 17, wherein the annular ring includes an inner angled surface which urges a misaligned substrate into a proper alignment over the substrate receiving surface.
Claim 22
Dependent Claim
18 words
The apparatus of claim 16, wherein the clamp ring alignment member comprises a plurality of conical alignment pins.
Claim 23
Dependent Claim
20 words
The apparatus of claim 19, wherein the alignment pins are located on a peripheral portion of the substrate support member.
Claim 24
Dependent Claim
11 words
The apparatus of claim 20, wherein the alignment pins are adjustable.
Claim 25
Dependent Claim
132 words
A semiconductor substrate processing chamber having a processing enclosure, comprising: a) a support member disposed within the enclosure, the support member having a substrate alignment member, a substrate receiving surface and a plurality of alignment pins positioned on the support member for supporting a clamp ring in a processing position; b) a clamp ring located in the chamber, the clamp ring comprising: 1) an inner annular base adapted for engaging a substrate, 2) a roof extending outwardly of the inner annular base, and 3) a lip extending inwardly of the inner annular base and overhanging an annular peripheral region of a substrate received on the substrate receiving surface; and c) a spacing member disposed above the substrate receiving surface for providing a gap between a substrate and the support member during processing.
Claim 26
Dependent Claim
132 words
A semiconductor substrate processing chamber having a processing enclosure, comprising: a) a support member disposed within the enclosure, the support member having a substrate alignment member, a substrate receiving surface and a plurality of alignment pins positioned on the support member for supporting a clamp ring in a processing position; b) a clamp ring located in the chamber, the clamp ring comprising: 1) an inner annular base adapted for engaging a substrate, 2) a roof extending outwardly of the inner annular base, and 3) a lip extending inwardly of the inner annular base and overhanging an annular peripheral region of a substrate received on the substrate receiving surface; and c) a spacing member disposed above the substrate receiving surface for providing a gap between a substrate and the support member during processing.
Claim 27
Dependent Claim
15 words
The apparatus of claim 22, wherein the substrate alignment member comprises an upper tapered portion.
Claim 28
Dependent Claim
20 words
The apparatus of claim 22, wherein the roof includes a plurality of alignment pin recesses to receive the alignment pins.
Claim 29
Dependent Claim
20 words
The apparatus of claim 22, wherein the roof includes a substrate alignment member recess to house the substrate alignment member.
Claim 30
Dependent Claim
11 words
The apparatus claim 22, wherein said substrate alignment member is annular.
Claim 31
Dependent Claim
28 words
The apparatus of claim 22, wherein said substrate alignment member is for aligning an edge of a misaligned substrate on the substrate receiving surface of the support member.
Claim 32
Dependent Claim
22 words
The apparatus of claim 22, wherein the spacing member and the clamp ring force a substrate to be substantially planar for processing.
Claim 33
Dependent Claim
38 words
The apparatus of claim 22, wherein the substrate alignment member includes an inner cylindrical wall having a tapered alignment face thereon which is contactable with a misaligned substrate as the substrate is positioned on the substrate receiving surface.
Claim 34
Dependent Claim
11 words
The apparatus of claim 29, wherein said alignment face is frustoconical.
Claim 35
Dependent Claim
19 words
The apparatus of claim 29, wherein said alignment face and said inner cylindrical wall intersect at an alignment ridge.
Claim 36
Dependent Claim
16 words
The apparatus of claim 29, wherein the substrate alignment member is disposed on the support member.
Claim 37
Dependent Claim
36 words
The apparatus of claim 30, wherein said inner cylindrical face includes an alignment ridge spaced from the substrate receiving surface of the support member by a distance which exceeds the maximum height of any substrate warpage.
References Cited (Backward Citations)
US4457661A
Cited
US5228501A
Cited
US5000113A
Cited
EP0343502A2
Cited
US5037262A
Cited
EP0392516A2
Cited
US5292399A
Cited
EP0462563A1
Cited
US5316278A
Cited
EP0595307A2
Cited
US5328722A
Cited
US5352294A
Cited
US5326725A
Cited
US5516367A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-18 | 2002-07-20 | 2003-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-18 | 2006-07-20 | 2007-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-18 | 2010-07-20 | 2011-01-19 | $7700.00 | Window Closed / Lapsed |