EP0595307A2
Expired / Lapsed
EP
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Clamp ring and processing chamber comprising said clamp ring
Assignee: Applied Materials Inc
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Filing: 1993-10-27
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Granted: —
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Expires: 2013-10-27
Abstract
Abstract Described is a chamber for processing a substrate, e.g. a semiconductor wafer, in which the chamber houses a domed pedestal (18) for supporting the substrate inside the chamber and a clamp ring (32) having a seat (31) formed therein. The seat (31) receives and holds down the periphery of the substrate onto the domed pedestal (18) and includes a substrate engaging surface (34) which engages and holds down the periphery of the substrate. In use the substrate engaging surface (34) defines an angle α to the horizontal which is greater than or equal to the angle β to the horizontal defined by a tangent to the domed pedestal (18) at the point where the periphery of the substrate is held down onto the pedestal (18). Preferably, the angle α to the horizontal defined by the substrate engaging surface (34) is about 3° greater than the angle β of the tangent to the domed pedestal (18) at the point where the substrate is held down onto the pedestal (18). Furthermore described is an improved clamp ring.
Inventors
- 👤 Thomas Joseph Banholzer
- 👤 Dan Marohl
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:06
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H10P72/7624
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
123 words
A clamp ring (32) for holding a substrate (10) being processed against a domed pedestal (18) said clamp ring (32) comprising: an outer peripheral section having a shape conforming to an outer periphery of the domed pedestal (18) and completely enclosing an inner aperture to expose a major portion of the substrate (10) and an inner seat (31) including a substrate engaging surface (34) for holding an outer peripheral edge of the substrate (10) against the domed pedestal (18), said substrate engaging surface (34) being inclined at a first angle away from a plane perpendicular from a direction in which said substrate (10) is being held against said domed pedestal (18) and being inclined toward a domed peak of said domed pedestal (18).
Claim 2
Dependent Claim
36 words
The clamp ring (32) as recited in claim 1, wherein said domed pedestal (18) has a substantially circularly shaped upper domed surface and said outer peripheral sections and said inner seat (31) are substantially annularly shaped.
Claim 3
Dependent Claim
50 words
The claim ring (32) as recited in claim 1 or 2, wherein a domed surface of said domed pedestal (18) at the point at which said substrate (10) is held against said domed surface is inclined away from said perpendicular plane by a second angle less than said first angle.
Claim 4
Dependent Claim
112 words
A clamping assembly for holding a substrate (10) during processing, comprising: a domed pedestal (18) having a domed surface, generally circularly symmetric about a first axis, and a clamping ring (32) movable along said first axis relative to said domed pedestal (18) and including an annular engaging surface (34) for holding the substrate (10) against the domed surface at a contacting portion thereof, wherein said contacting portion is inclined at a first angle β from a perpendicular plane to said first axis, said engaging surface (34) is inclined at a second angle α from said perpendicular plane, and wherein said angle α is greater than or equal to said first angle β.
Claim 5
Dependent Claim
24 words
The clamping assembly as recited in claim 4, wherein said second angle α is greater than said first angle β by a differential angle.
Claim 6
Dependent Claim
21 words
The clamping assembly as recited in claim 5, wherein said differential angle is in a range between one-half and four degrees.
Claim 7
Dependent Claim
21 words
The clamping assembly as recited in claim 6, wherein said differential angle is in a range between one and three degrees.
Claim 8
Independent Claim
141 words
An apparatus for processing a substrate (10), the apparatus including a chamber, a pedestal (18) having a domed surface for supporting the substrate (10) inside the chamber, and a circumscribing clamp ring (32,42) for engaging and holding down the periphery of the substrate (10) onto the domed pedestal (18) whereby the clamp ring (32, 42) comprises: a body, a seat (31, 41) formed in the body, the seat (31, 41) including a substrate engaging surface (34, 44) for engaging and holding down the periphery of the substrate (10) and which, in use, defines an angle α to the horizontal which is greater than or equal to the angle β to the horizontal defined by a tangent to the domed surface of the pedestal (18) at the point where the periphery of the substrate (10) is held down onto the pedestal (18).
Claim 9
Dependent Claim
49 words
The processing chamber as recited in claim 8, wherein the angle α to the horizontal defined by the seat (31) is about 3° greater than the angle β of the tangent to the pedestal (18) at the point where the substrate (10) is held down onto the pedestal (18).
Claim 10
Dependent Claim
24 words
The processing chamber as recited in claim 8 or 9, wherein the seat (31, 41) defines an angle of about 4° to the horizontal.
Claim 11
Dependent Claim
33 words
The processing chamber as recited in one of claims 8 to 10, wherein the seat (41), includes an inner edge (50) and wherein the inner edge (50) is formed with a rounded corner.
Claim 12
Dependent Claim
65 words
The processing chamber as recited in one of claims 8 to 11, wherein the pedestal (18) and the clamp ring (32, 42) have a common axis, and wherein the pedestal (18) is movable along the common axis to urge the substrate (10) into engagement with the clamp ring (32, 42) such that the substrate (10) bows in conformance with the profile of the pedestal (18).
Claim 13
Dependent Claim
86 words
The processing chamber according to one of claims 8 to 12, further comprising a fluid transport conduit formed in the pedestal (18) to exit at the interface between the pedestal (18) and the substrate (10), the fluid conduit being for injecting fluid at the interface between the pedestal (18) and the substrate (10), whereby the fluid lifts at least part of the substrate (10) from the surface of the domed pedestal (18), and further urges the substrate into engagement with the substrate engaging surface (34, 44).
Claim 14
Dependent Claim
34 words
The processing chamber according to claim 13, wherein the pedestal (18) includes a heater element which, in use, heats the pedestal (18), which heats the fluid and which, in turn, heats the substrate (10).
Claim 15
Dependent Claim
42 words
Support ring (52) comprising an attaching tab (62) and arms extending from said attaching tab (62), characterized in that a stepped-down brace (64) is formed between the arms of the support ring (52) at the opposite side of the attaching tab (62).
References Cited (Backward Citations)
No citation records indexed.
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