US5844347A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Saw device and its manufacturing method
Assignee: Skyworks Filter Solutions Japan Co Ltd
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Filing: 1996-08-29
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Granted: 1998-12-01
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Expires: 2016-08-29
Abstract
Abstract A SAW device comprising an inter-digital electrode capable of withstanding application of excessive electric power, while preventing an increase of insertion loss. The SAW device has an inter-digital electrode formed by alternating layers of aluminum films and conductive films, where the conductive films have an elastic constant greater than that of the aluminum films.
Inventors
- 👤 Ryoichi Takayama
- 👤 Keizaburo Kuramasu
- 👤 Toshio Sugawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:28
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/46; H03H9/64; H03H9/6423; H03H9/6433; H03H9/6483; H03H3/00; H03H3/007; H03H3/08; H03H9/02; H03H9/02535; H03H9/02818; H03H9/02897; H03H9/02929; H03H9/125; H03H9/145; H03H9/14538
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
120 words
A SAW device comprising a piezoelectric substrate and inter-digital transducer electrode provided on a surface of said piezoelectric substrate, said inter-digital transducer electrode comprising a first material layer and a second material layer, said first material comprising alone aluminum, said second material comprising only one conductive material which has an elastic constant greater than the elastic constant of said first material, and said inter-digital transducer electrode comprising repetitive layers of said first material layer and said second material layer, wherein each of said films of said first material has a thickness of approximately 150 nm or less, and each of said films of said second material has a thickness less than the thickness of said films of said first material.
Claim 2
Dependent Claim
120 words
A SAW device comprising a piezoelectric substrate and inter-digital transducer electrode provided on a surface of said piezoelectric substrate, said inter-digital transducer electrode comprising a first material layer and a second material layer, said first material comprising alone aluminum, said second material comprising only one conductive material which has an elastic constant greater than the elastic constant of said first material, and said inter-digital transducer electrode comprising repetitive layers of said first material layer and said second material layer, wherein each of said films of said first material has a thickness of approximately 150 nm or less, and each of said films of said second material has a thickness less than the thickness of said films of said first material.
Claim 3
Dependent Claim
37 words
A SAW device according to claim 1, wherein said inter-digital electrode comprises an outermost layer formed by one of said films of the first material, said outermost layer having a thickness of approximately 50 nm or less.
Claim 4
Dependent Claim
25 words
A SAW device according to claim 1, wherein said inter-digital electrode comprises an outermost layer formed by one of said films of the second material.
Claim 5
Dependent Claim
30 words
A SAW device according to claim 1, further comprising a transition metal layer positioned between said piezoelectric substrate and said inter-digital electrode, said transition metal layer comprising a conductive material.
References Cited (Backward Citations)
US4445066A
Cited
US4477952A
Cited
EP0246626A2
Cited
US5325012A
Cited
FR2711863A1
Cited
JPH07122961A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-30 | 2002-06-01 | 2002-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-30 | 2006-06-01 | 2006-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-30 | 2010-06-01 | 2010-12-01 | $7700.00 | Window Closed / Lapsed |