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US5840615A
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Method for forming a ferroelectric material film by the sol-gel method, along with a process for a production of a capacitor and its raw material solution
Assignee: Texas Instruments Inc
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Filing: 1997-03-03
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Granted: 1998-11-24
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Expires: 2017-03-03
Abstract
Abstract A method for forming a ferroelectric material film, more particularly a lead zirconate titanate (PZT) film by the sol-gel method wherein a lowered oxidative sintering temperature may be adopted in preparing the ferroelectric material film with a perovskite crystalline structure, thereby reducing the risk of oxidation of metal electrodes and other circuits when the ferroelectric material film is employed as a dielectric in semiconductor devices, such as in a capacitor, for example. The method contemplates the preparation of a raw material solution containing an organometallic compound of a metallic element forming the ferroelectric material film, alkanolamine and/or stabilizer comprising a beta -diketone, with the concentration of the stabilizer being sufficient to provide a mole ratio to the total metal atoms of (stabilizer/total metal atoms)>3. The method then involves coating the raw material solution, drying the coated raw material solution to form a dried film, and sintering the dried film to form the ferroelectric material film wherein the oxidative sintering is carried out at a relatively low temperature of about 450 DEG C. in forming the ferroelectric material film with a perovskite crystalline structure.
Inventors
- 👤 Katsuhiro Aoki
- 👤 Yukio Fukuda
- 👤 Akitoshi Nishimura
- 👤 Tomomi Nagao
- 👤 Shinichi Hachiya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 21:39
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/125; C23C18/1254; C23C18/1204; C23C18/1208; C23C18/1216; C23C18/1279; H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
141 words
A method of forming a film of ferroelectric material with a perovskite crystalline structure by the sol-gel technique, said method comprising: preparing a raw material solution containing an organometallic compound of a metallic element from which the film of ferroelectric material is to be formed, and a stabilizer taken from one or a combination of substances of the group including an alkanolamine and a β-diketone, wherein the concentration of the stabilizer has a mole ratio to the total metal atoms of (stabilizer/total metal atoms)>3; providing a coating of the raw material solution on a substrate; drying the coating of the raw material solution to form a dried gel film; and oxidative sintering the dried gel film at a temperature in the range of substantially 450° up to 550° C. to form a film of ferroelectric material having a perovskite crystalline structure.
Claim 2
Independent Claim
141 words
A method of forming a film of ferroelectric material with a perovskite crystalline structure by the sol-gel technique, said method comprising: preparing a raw material solution containing an organometallic compound of a metallic element from which the film of ferroelectric material is to be formed, and a stabilizer taken from one or a combination of substances of the group including an alkanolamine and a β-diketone, wherein the concentration of the stabilizer has a mole ratio to the total metal atoms of (stabilizer/total metal atoms)>3; providing a coating of the raw material solution on a substrate; drying the coating of the raw material solution to form a dried gel film; and oxidative sintering the dried gel film at a temperature in the range of substantially 450° up to 550° C. to form a film of ferroelectric material having a perovskite crystalline structure.
Claim 3
Dependent Claim
32 words
A method as set forth in claim 1, in which the concentration mole ratio of the stabilizer in the raw material solution is in a mole ratio range of (stabilizer/total metal atoms)4-10.
Claim 4
Dependent Claim
41 words
A method as set forth in claim 1, wherein the raw material solution contains a lead fatty acid, titanium alkoxide, and zirconium alkoxide as organometallic compounds of respective metallic elements from which the film of ferroelectric material is to be formed.
Claim 5
Dependent Claim
19 words
A method as set forth in claim 3, wherein the stabilizer included in the raw material solution is diethanolamine.
Claim 6
Dependent Claim
19 words
A method as set forth in claim 3, wherein the stabilizer included in the raw material solution is acetylacetone.
Claim 7
Dependent Claim
24 words
A method as set forth in claim 3, wherein the stabilizer included in the raw material solution is a combination of diethanolamine and acetylacetone.
Claim 8
Dependent Claim
260 words
A process for producing a capacitor having a film of ferroelectric material as a dielectric between upper and lower electrodes of electrically conductive material, said process comprising: preparing a raw material solution containing an organometallic compound of a metallic element from which the film of ferroelectric material is to be formed, and a stabilizer taken from one or a combination of substances of the group including an alkanolamine and a β-diketone, wherein the concentration of the stabilizer has a mole ratio to the total metal atoms of (stabilizer/total metal atoms)>3; providing a coating of the raw material solution on an electrically conductive substrate which is to serve as the lower electrode of the capacitor; drying the coating of the raw material solution to form a dried gel film; oxidatively sintering the dried gel film at a temperature in the range of substantially 450° up to 550° C.; forming a film of ferroelectric material having a perovskite crystalline structure on the electrically conductive substrate which is to serve as the lower electrode of the capacitor in response to the oxidative sintering of the dried gel film at a temperature in the range of 450° up to 550° C.; patterning the film of ferroelectric material having the perovskite crystalline structure to remove unnecessary portions of the film of ferroelectric material having the perovskite crystalline structure from the electrically conductive substrate which is to serve as the lower electrode of the capacitor; and forming an upper electrode of electrically conductive material over the patterned film of ferroelectric material having the perovskite crystalline structure.
Claim 9
Dependent Claim
260 words
A process for producing a capacitor having a film of ferroelectric material as a dielectric between upper and lower electrodes of electrically conductive material, said process comprising: preparing a raw material solution containing an organometallic compound of a metallic element from which the film of ferroelectric material is to be formed, and a stabilizer taken from one or a combination of substances of the group including an alkanolamine and a β-diketone, wherein the concentration of the stabilizer has a mole ratio to the total metal atoms of (stabilizer/total metal atoms)>3; providing a coating of the raw material solution on an electrically conductive substrate which is to serve as the lower electrode of the capacitor; drying the coating of the raw material solution to form a dried gel film; oxidatively sintering the dried gel film at a temperature in the range of substantially 450° up to 550° C.; forming a film of ferroelectric material having a perovskite crystalline structure on the electrically conductive substrate which is to serve as the lower electrode of the capacitor in response to the oxidative sintering of the dried gel film at a temperature in the range of 450° up to 550° C.; patterning the film of ferroelectric material having the perovskite crystalline structure to remove unnecessary portions of the film of ferroelectric material having the perovskite crystalline structure from the electrically conductive substrate which is to serve as the lower electrode of the capacitor; and forming an upper electrode of electrically conductive material over the patterned film of ferroelectric material having the perovskite crystalline structure.
Claim 10
Dependent Claim
33 words
A process for producing a capacitor as set forth in claim 7, wherein the oxidative sintering of the dried gel film is carried out at a temperature of the order of 450° C.
Claim 11
Dependent Claim
18 words
A process as set forth in claim 7, wherein the capacitor is provided for a semiconductor memory device.
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