US4963390A
Expired / Lapsed
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Metallo-organic solution deposition (MOSD) of transparent, crystalline ferroelectric films
Assignee: Aerospace Corp
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Filing: 1988-10-05
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Granted: 1990-10-16
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Expires: 2008-10-05
Abstract
Abstract An improved process to deposit transparent, crystalline, ferroelectric films from metallo-organic solutions on platinum, glass, quartz, and sapphire substrates is disclosed. The use of this process results in a significant improvement in the transparency of perovskite, ferroelectric lead titanate (PT), lead zirconate titanate (PZT) and doped-PZT films (e.g. films doped with lanthanum, PLZT).
Inventors
- 👤 Russell A. Lipeles
- 👤 Dianne J. Coleman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:21
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/80; C04B41/81; C04B41/85; C04B41/87; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/25; C04B41/009; C04B41/45; C04B41/50; C04B41/5025; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1216; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/23; C03C2218/00; C03C2218/10; C03C2218/11; C03C2218/111; C03C2218/112; C03C2218/116; C04B2111/00; C04B2111/00474; C04B2111/00844; C04B2111/80
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
159 words
An improved coating deposition process for transparent, ferroelectric films up to 5mm thick consisting of the following steps: a. mixing liquid state metallo-organic starting materials consisting of at least one alkoxide or carboxylic acid salt of the metals selected from a group consisting of barium, strontium, lead, lanthanum or lithium or a from a group consisting of zirconium, titanium or niobium to form a coating solution; b. spinning, dipping, or spraying the coating solution on the substrate to be coated; c. drying the coated substance at low temperature in the range of 100-200° C. in air or a vacuum, thereby removing low boiling solvent molecules; d. rapidly densifying the coated substrate at moderate temperature (400-600° C, thereby forming an amorphous film; e. repeatingthe above steps until a desired coating thickness is obtained; and f. annealing the thus formed film at a temperature in the range 525-800° C. to obtain a transparent ferroelectric oxide film with a controlled grain size.
Claim 2
Dependent Claim
159 words
An improved coating deposition process for transparent, ferroelectric films up to 5mm thick consisting of the following steps: a. mixing liquid state metallo-organic starting materials consisting of at least one alkoxide or carboxylic acid salt of the metals selected from a group consisting of barium, strontium, lead, lanthanum or lithium or a from a group consisting of zirconium, titanium or niobium to form a coating solution; b. spinning, dipping, or spraying the coating solution on the substrate to be coated; c. drying the coated substance at low temperature in the range of 100-200° C. in air or a vacuum, thereby removing low boiling solvent molecules; d. rapidly densifying the coated substrate at moderate temperature (400-600° C, thereby forming an amorphous film; e. repeatingthe above steps until a desired coating thickness is obtained; and f. annealing the thus formed film at a temperature in the range 525-800° C. to obtain a transparent ferroelectric oxide film with a controlled grain size.
Claim 3
Dependent Claim
24 words
The process in claim 1 where the metallo-organic starting materials are one to six carbon containing alkoxides or one to eight carbon carboxylic acids.
Claim 4
Dependent Claim
29 words
The process in claim 1 where the metals in the metallo-organic starting materials are selected from the group of metals consisting of lead, lanthanum, zirconium, titanium, barium, and lithium.
Claim 5
Dependent Claim
36 words
The process in claim 1 where the stoichiometry of the compound is Pb 1-x La x (Zr y Ti.sub.( 1-y))(1-x/4)03 and x varies from 0.0 up to 0.20 and y varies from 0.0 up to 1.0.
Claim 6
Dependent Claim
15 words
The process in claim 1 where the coating solution produces the oxide BaTiO 3 .
Claim 7
Dependent Claim
19 words
The process in claim 1 where the coating solution produces the oxide lithium niobate, LiNb 1 O 3 .
Claim 8
Dependent Claim
30 words
The process in claim 1 where the coating solution produces the oxide strontium barium niobate, Sr x Ba 1-x N[b 2 O 6 where x varies from 0.25 to 1.00.
References Cited (Backward Citations)
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