US5807760A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of despositing an aluminum-rich layer
Assignee: Agere Systems LLC
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Filing: 1996-09-03
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Granted: 1998-09-15
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Expires: 2016-09-03
Abstract
Abstract A method of depositing aluminum or other metals so that vias are more completely filled is disclosed. The wafer or substrate is preheated to a temperature of approximately 200° C. Then the wafer is placed in an ambient of approximately 350° C. while metal deposition commences. The resulting metal layer has a gradually increasing grain size and exhibits improved via filling. Also disclosed is a method and apparatus (involving cooling of support structures) for deposition of an anti-reflective coating to prevent rainbowing or spiking of the coating into the underlying metal.
Inventors
- 👤 Joseph William Buckfeller
- 👤 Sailesh Chittipeddi
- 👤 Sailesh Mansinh Merchant
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:54
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/44; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/54; C23C14/541; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
90 words
A method of semiconductor integrated circuit fabrication comprising: preheating a substrate having partially formed integrated circuits thereon by exposing it to an ambient environment at 150°-200° C. commencing the deposition of an aluminum-rich layer, said deposition taking place in an ambient environment at a temperature, t, where 350° C.≦t≦400° C.; the temperature of said substrate gradually increasing during said deposition; and further including the step of depositing an anti-reflective coating upon said deposited metal, said deposition of anti-reflective coating taking place upon a support structure maintained at a constant temperature.
Claim 2
Independent Claim
90 words
A method of semiconductor integrated circuit fabrication comprising: preheating a substrate having partially formed integrated circuits thereon by exposing it to an ambient environment at 150°-200° C. commencing the deposition of an aluminum-rich layer, said deposition taking place in an ambient environment at a temperature, t, where 350° C.≦t≦400° C.; the temperature of said substrate gradually increasing during said deposition; and further including the step of depositing an anti-reflective coating upon said deposited metal, said deposition of anti-reflective coating taking place upon a support structure maintained at a constant temperature.
Claim 3
Dependent Claim
12 words
The method of claim 1 wherein said anti-reflective coating contains primarily silicon.
Claim 4
Dependent Claim
25 words
The method of claim 1 wherein said support structure includes a block for supporting said substrate, and said block includes means for cooling said block.
Claim 5
Dependent Claim
56 words
The method of claim 1 wherein said block has a raised edge surrounding a flat portion, said raised edge providing support for the periphery of said substrate, there being a space between said flat portion and said substrate and wherein said means for cooling said block includes at least one channel for containing a fluid coolant.
Claim 6
Dependent Claim
22 words
The method of claim 1 in which said deposition of an aluminum-rich layer occurs during a time period of approximately 50 seconds.
Claim 7
Dependent Claim
27 words
The method of claim 1 in which said aluminum-rich layer is aluminum together with one or more materials chosen from the group consisting of silicon and copper.
Claim 8
Dependent Claim
18 words
The method of claim 1 in which said aluminum-rich layer is deposited by sputtering or physical vapor deposition.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-09-14 | 2002-03-16 | 2002-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-09-14 | 2006-03-16 | 2006-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-09-14 | 2010-03-16 | 2010-09-15 | $7700.00 | Window Closed / Lapsed |