Patent US5786255A successfully refreshed from Google Patents.
US5786255A
Expired / Lapsed
US
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Method of forming a metallic oxide semiconductor
Assignee: United Microelectronics Corp
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Filing: 1997-05-27
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Granted: 1998-07-28
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Expires: 2017-05-27
Abstract
Abstract A method of forming MOS components provides that after the formation of the gate and the doped source/drain regions, a polysilicon layer is deposited and planarized using a chemical-mechanical polishing method. The resulting unremoved polysilicon layer acts as source/drain terminals. Through these arrangements, the ion doped source/drain regions will have shallow junctions, yet their junction integrity will not be compromised by subsequent contact window etching and metallization processes. Furthermore, the front-end processes for forming the MOS component provide a good planar surface that offers great convenience for the performance of subsequent back-end processes.
Inventors
- 👤 Wen-Kuan Yeh
- 👤 Coming Chen
- 👤 Jih-Wen Chou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:58
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0225; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/258; H10D64/259
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
217 words
A method of forming a MOS component, comprising: providing a semiconductor substrate, a silicon nitride layer thereabove, and a plurality of trenches formed within the silicon nitride layer; filling the trenches with an isolating layer; planarizing the silicon nitride layer and the filled trenches using chemical-mechanical polishing; defining the silicon nitride layer using a photolithographic process, to etch openings into the silicon nitride layer and expose the semiconductor substrate; sequentially forming a gate oxide layer and a gate conducting layer over the silicon nitride layer and filling the openings; removing a portion of the gate oxide layer and the gate conducting layer above the silicon nitride layer using chemical-mechanical polishing; completely removing the silicon nitride layer; implanting ions into the semiconductor substrate; after said implanting ions, forming spacers on sidewalls of the gate oxide layer and the gate conducting layer; after said forming spacers, implanting more ions into the semiconductor substrate, said implanting ions and said implanting more ions forming ion doped LDD regions within the semiconductor substrate; forming a polysilicon layer above the semiconductor substrate to cover an area above the ion doped LDD regions; and planarizing the filled trenches, spacers, gate conducting layer and the polysilicon layer using chemical-mechanical polishing, leaving the polysilicon layer only above the ion doped LDD regions to form source/drain terminals.
Claim 2
Independent Claim
217 words
A method of forming a MOS component, comprising: providing a semiconductor substrate, a silicon nitride layer thereabove, and a plurality of trenches formed within the silicon nitride layer; filling the trenches with an isolating layer; planarizing the silicon nitride layer and the filled trenches using chemical-mechanical polishing; defining the silicon nitride layer using a photolithographic process, to etch openings into the silicon nitride layer and expose the semiconductor substrate; sequentially forming a gate oxide layer and a gate conducting layer over the silicon nitride layer and filling the openings; removing a portion of the gate oxide layer and the gate conducting layer above the silicon nitride layer using chemical-mechanical polishing; completely removing the silicon nitride layer; implanting ions into the semiconductor substrate; after said implanting ions, forming spacers on sidewalls of the gate oxide layer and the gate conducting layer; after said forming spacers, implanting more ions into the semiconductor substrate, said implanting ions and said implanting more ions forming ion doped LDD regions within the semiconductor substrate; forming a polysilicon layer above the semiconductor substrate to cover an area above the ion doped LDD regions; and planarizing the filled trenches, spacers, gate conducting layer and the polysilicon layer using chemical-mechanical polishing, leaving the polysilicon layer only above the ion doped LDD regions to form source/drain terminals.
Claim 3
Dependent Claim
17 words
The method according to claim 1, wherein said providing a semiconductor substrate includes providing a silicon substrate.
Claim 4
Dependent Claim
26 words
The method according to claim 1, wherein said providing a silicon nitride layer includes providing a silicon nitride layer having a thickness of about 2500 Å.
Claim 5
Dependent Claim
25 words
The method according to claim 1, wherein said planarizing the silicon nitride layer reduces a thickness of the silicon nitride layer to about 2000 Å.
Claim 6
Dependent Claim
26 words
The method according to claim 1, wherein said sequentially forming includes forming a polycide gate conducting layer comprising a polysilicon layer and a tungsten silicide layer.
Claim 7
Dependent Claim
17 words
The method according to claim 1, wherein said completely removing includes wet etching the silicon nitride layer.
Claim 8
Dependent Claim
20 words
The method according to claim 1, wherein said completely removing includes using phosphoric acid to remove the silicon nitride layer.
Claim 9
Dependent Claim
19 words
The method according to claim 1, wherein said forming a polysilicon layer includes forming an ion doped plysilicon layer.
Claim 10
Dependent Claim
23 words
The method according to claim 1, further comprising doping the polysilicon further comprising doping the polysilicon layer with ions after the formation thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-07-27 | 2002-01-26 | 2002-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-07-27 | 2006-01-26 | 2006-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-07-27 | 2010-01-26 | 2010-07-28 | $7700.00 | Window Closed / Lapsed |