Method of making ferrolectric thin film composites

Claim 1

A method of making a thin film of a ferroelectric composite material having a composition comprising: barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater than 0.0 but less than or equal to 0.75, and an additive selected from the group consisting of mangesia, alumina, silica, a low dielectric oxide, zirconia, and combinations thereof; wherein said barium strontium titanate and said additive are present in effective amounts to provide a composite having a low dielectric constant, low loss tangibles, and high tunability. the method comprising the steps of: a) providing at least one ceramic disc of said composition as an abalation target; b) providing a substrate at a temperature of between 400-700 degrees centigrade, and at a distance between the substrate and target of 25-50 mm; c) depositing a thin file of said composition on said substrate using a krypton exciminer pulsed laser utilizing a laser wavelength of 193-248 nm, a laser pulse energy of 226-350 m/J pulse, a pulse width of 10-20 ns and a pulse repetition rate of 5-25 Hz.

Claim 2

A method of making a thin film of a ferroelectric composite material having a composition comprising: barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater than 0.0 but less than or equal to 0.75, and an additive selected from the group consisting of mangesia, alumina, silica, a low dielectric oxide, zirconia, and combinations thereof; wherein said barium strontium titanate and said additive are present in effective amounts to provide a composite having a low dielectric constant, low loss tangibles, and high tunability. the method comprising the steps of: a) providing at least one ceramic disc of said composition as an abalation target; b) providing a substrate at a temperature of between 400-700 degrees centigrade, and at a distance between the substrate and target of 25-50 mm; c) depositing a thin file of said composition on said substrate using a krypton exciminer pulsed laser utilizing a laser wavelength of 193-248 nm, a laser pulse energy of 226-350 m/J pulse, a pulse width of 10-20 ns and a pulse repetition rate of 5-25 Hz.