US5766697A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making ferrolectric thin film composites
Assignee: United States Department of the Army
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Filing: 1996-11-05
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Granted: 1998-06-16
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Expires: 2016-11-05
Abstract
Abstract A method of making ferroelectric thin film composites includes the step of providing a barium strontium titanate material with an additive magnesia-based and forming a thin film ferroelectric composite using pulsed laser deposition. The method forms a thin film composite having enhanced electronic properties.
Inventors
- 👤 Somnath Sengupta
- 👤 Louise Sengupta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:17
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/06; C23C14/08; C23C14/088
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
183 words
A method of making a thin film of a ferroelectric composite material having a composition comprising: barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater than 0.0 but less than or equal to 0.75, and an additive selected from the group consisting of mangesia, alumina, silica, a low dielectric oxide, zirconia, and combinations thereof; wherein said barium strontium titanate and said additive are present in effective amounts to provide a composite having a low dielectric constant, low loss tangibles, and high tunability. the method comprising the steps of: a) providing at least one ceramic disc of said composition as an abalation target; b) providing a substrate at a temperature of between 400-700 degrees centigrade, and at a distance between the substrate and target of 25-50 mm; c) depositing a thin file of said composition on said substrate using a krypton exciminer pulsed laser utilizing a laser wavelength of 193-248 nm, a laser pulse energy of 226-350 m/J pulse, a pulse width of 10-20 ns and a pulse repetition rate of 5-25 Hz.
Claim 2
Independent Claim
183 words
A method of making a thin film of a ferroelectric composite material having a composition comprising: barium strontium titanate, said barium strontium titanate represented as Ba 1-x Sr x TiO 3 , wherein x is greater than 0.0 but less than or equal to 0.75, and an additive selected from the group consisting of mangesia, alumina, silica, a low dielectric oxide, zirconia, and combinations thereof; wherein said barium strontium titanate and said additive are present in effective amounts to provide a composite having a low dielectric constant, low loss tangibles, and high tunability. the method comprising the steps of: a) providing at least one ceramic disc of said composition as an abalation target; b) providing a substrate at a temperature of between 400-700 degrees centigrade, and at a distance between the substrate and target of 25-50 mm; c) depositing a thin file of said composition on said substrate using a krypton exciminer pulsed laser utilizing a laser wavelength of 193-248 nm, a laser pulse energy of 226-350 m/J pulse, a pulse width of 10-20 ns and a pulse repetition rate of 5-25 Hz.
Claim 3
Dependent Claim
26 words
The thin film ferroelectric composite material of claim 1, wherein said barium strontium titanate is Ba 1-x Sr x TiO 3 , wherein x=0.35 to 0.40.
Claim 4
Dependent Claim
32 words
The thin film ferroelectric composite material of claim 2, wherein the weight ratio of said barium strontium titanate to said additive ranges from approximately 99%-50% barium strontium titanate to approximately 1%-60% additive.
Claim 5
Dependent Claim
13 words
The thin film ferroelectric composite of claim 1 wherein said additive is magnesia.
Claim 6
Dependent Claim
14 words
The thin film ferroelectric composite of claim 4 wherein said magnesia is about 1%.
Claim 7
Dependent Claim
13 words
The thin film ferroelectric composite of claim 1 wherein said additive is alumina.
Claim 8
Dependent Claim
14 words
The thin film ferroelectric composite of claim 6 wherein said alumina is about 1%.
Claim 9
Dependent Claim
13 words
The thin film ferroelectric composite of claim 1 wherein said additive is zirconia.
Claim 10
Dependent Claim
14 words
The thin film ferroelectric composite of claim 8 wherein said zirconia is about 1%.
Claim 11
Dependent Claim
21 words
The method of claim 1 wherein a plurality of ceramic discs are used, said plurality making up said composition in total.
References Cited (Backward Citations)
US4222783A
Cited
US4677083A
Cited
US4987108A
Cited
US4987107A
Cited
US5232880A
Cited
US5312790A
Cited
US5427988A
Cited
US5486491A
Cited
US5443746A
Cited
US5596214A
Cited
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