Abstract The present invention is directed to a method for inhibiting silicon oxidation on a silicon surface by forming a very thin carbon-containing silicon surface layer on the silicon. The silicon surface is exposed to a carbon-containing plasma to form the carbon-containing silicon layer. The carbon treatment also renders he silicon surface slightly amorphous due to ion bombardments from plasma. An oxide free and slightly amorphous silicon surface promotes homogeneous progress of silicidation reaction between the silicon and a metal deposited thereon, which enables thin but smooth and stable silicide film formation. The present invention is also directed to a method for forming uniform silicon layers only on horizontal portions of features on a substrate. A silicon layer is deposited on to conform to all exposed surfaces of a device. The horizontal surfaces are then exposed to a carbon-containing plasma to form anti-oxidation layers on the horizontal surfaces. Successive oxidation can then proceed selectively on the vertical portions of the silicon. Each horizontal silicon layer at different level remains intact and is electrically isolated each other.
A method for forming an oxidation layer on the vertical surfaces of an elevated semiconductor structure having vertical and horizontal surfaces, the method comprising forming a silicon layer on both vertical and horizontal surfaces of the elevated structure; forming a carbon-containing silicon surface layer on the portion of the silicon layer on the horizontal surfaces by plasma carbon treatment whereby the carbon-containing silicon surface layer inhibits oxidation on the horizontal surfaces and provides an amorphized surface; and oxidizing the portion of the silicon layer on the vertical surfaces thereby forming an oxide.
Claim 2
Independent Claim
92 words
A method for forming an oxidation layer on the vertical surfaces of an elevated semiconductor structure having vertical and horizontal surfaces, the method comprising forming a silicon layer on both vertical and horizontal surfaces of the elevated structure; forming a carbon-containing silicon surface layer on the portion of the silicon layer on the horizontal surfaces by plasma carbon treatment whereby the carbon-containing silicon surface layer inhibits oxidation on the horizontal surfaces and provides an amorphized surface; and oxidizing the portion of the silicon layer on the vertical surfaces thereby forming an oxide.
Claim 3
Dependent Claim
14 words
The method of claim 1 further comprising subjecting the carbon-containing silicon surfaces to salicidation.
Claim 4
Dependent Claim
15 words
The method of claim 1 wherein the elevated semiconductor structure is an elevated source/drain structure.
Claim 5
Dependent Claim
14 words
The method of claim 1 further comprising stripping the oxide from the vertical surfaces.
Claim 6
Independent Claim
72 words
A method for inhibiting oxidation and forming an amorphized surface, comprising applying a carbon layer to an element forming silicon region and an element isolating insulator region and then impinging ions on to the carbon layer to incorporate carbon atoms into the element forming silicon region to form a carbon-containing silicon surface layer on the element forming silicon region; wherein the carbon-containing silicon surface layer inhibits oxidation and provides an amorphized surface.
Claim 7
Independent Claim
72 words
A method for inhibiting oxidation and forming an amorphized surface, comprising applying a carbon layer to an element forming silicon region and an element isolating insulator region and then impinging ions on to the carbon layer to incorporate carbon atoms into the element forming silicon region to form a carbon-containing silicon surface layer on the element forming silicon region; wherein the carbon-containing silicon surface layer inhibits oxidation and provides an amorphized surface.
Claim 8
Dependent Claim
21 words
The method of claim 5 wherein the element forming silicon region and the element isolating insulator region have a coextensive surface.