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US5751062A Expired / Lapsed US ⏱️ 0.0 years remaining

Cooling device of multi-chip module

Assignee: Hitachi Ltd
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Filing: 1995-12-13
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Granted: 1998-05-12
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Expires: 2015-12-13
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Abstract

Abstract A cooling device of a multi-chip module has micropackages that are independent of thermal deformation and easy to assembly and disassembly. The multi-chip module includes a multi-layer substrate on which the micropackages, each encasing an LSI chip, are mounted, and a housing formed integrally with a cooler. Each of the micropackages includes a first heat conduction member, having a cap portion for receiving the LSI chip and a first fin made of the same material as the cap portion to be integral therewith, and a substrate fixed to the cap portion of the first heat conduction member, the LSI chip being mounted on the substrate which is securely fixed to the cap portion of the heat conduction member while being fixedly joined at the back surface thereof to an inner surface of the cap portion of the first heat conduction member. Second heat conduction members, each including a base portion and a second fin, are disposed to engage with the first fins and be pressed against the cooler by a spring, respectively.

Inventors

  • 👤 Takahiro Daikoku
  • 👤 Fumiyuki Kobayashi
  • 👤 Noriyuki Ashiwake
  • 👤 Kenichi Kasai
  • 👤 Keizou Kawamura
  • 👤 Akio Idei

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 12:07
CPC Classifications
H; H10; H10W; H10W40/00; H10W40/70; H10W40/77; H10W40/774; H10W72/00; H10W72/851; H10W72/874; H10W72/877

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 242 words
A cooling device of a multi-chip module, comprising: a plurality of micropackages, each having an LSI chip hermetically sealed therein; a first substrate having said micropackages mounted thereon; a housing covering said first substrate; heat conduction members provided respectively between said micropackages and said housing for conducting heat generated by said LSI chips to said housing; wherein each of said micropackages includes a first heat conduction member, having a cap portion for receiving said LSI chip and a first fin that is integral with said cap portion and formed of the same material as that of said cap portion, and a second substrate fixed to said cap portion of said first heat conduction member; wherein each of said LSI chips is mounted on said second substrate and fixed at a back surface thereof to an inner surface of said cap portion; a cooler for finally releasing the heat generated by said LSI chips, wherein said cooler is formed integrally with the housing of the multi-chip module so as to be a constituent part of said housing; and second heat conduction members, each having a second fin and being movable with respect to a respective associated first heat conduction member and said cooler to form a flexible heat conduction path, disposed in contact with said cooler, said second heat conduction members being respectively engaged in a heat transfer relationship with said respective associated first heat conduction member through said first and second fins.
Claim 2
Dependent Claim 242 words
A cooling device of a multi-chip module, comprising: a plurality of micropackages, each having an LSI chip hermetically sealed therein; a first substrate having said micropackages mounted thereon; a housing covering said first substrate; heat conduction members provided respectively between said micropackages and said housing for conducting heat generated by said LSI chips to said housing; wherein each of said micropackages includes a first heat conduction member, having a cap portion for receiving said LSI chip and a first fin that is integral with said cap portion and formed of the same material as that of said cap portion, and a second substrate fixed to said cap portion of said first heat conduction member; wherein each of said LSI chips is mounted on said second substrate and fixed at a back surface thereof to an inner surface of said cap portion; a cooler for finally releasing the heat generated by said LSI chips, wherein said cooler is formed integrally with the housing of the multi-chip module so as to be a constituent part of said housing; and second heat conduction members, each having a second fin and being movable with respect to a respective associated first heat conduction member and said cooler to form a flexible heat conduction path, disposed in contact with said cooler, said second heat conduction members being respectively engaged in a heat transfer relationship with said respective associated first heat conduction member through said first and second fins.
Claim 3
Dependent Claim 58 words
A cooling device according to claim 1, wherein an elastic member is interposed between every mutually engaged pair of said first and second heat conduction members, so that said second heat conduction member is kept in pressure contact with a bottom surface of said cooler, serving as an inner wall surface of said housing, by said elastic member.
Claim 4
Dependent Claim 25 words
A cooling device according to claim 2, wherein each said mutually engaged pair of said first and second fins have a micro gap between them.
Claim 5
Dependent Claim 51 words
A cooling device according to claim 2, wherein the contact area of each of said second heat conduction members with the bottom surface of said cooler is larger than a size of said micropackage, and is substantially equal to an area allotted to each of said micropackages on said first substrate.
Claim 6
Dependent Claim 24 words
A cooling device according to claim 3, wherein at least either of said first and second-heat conduction members is made of a dielectric material.
Claim 7
Dependent Claim 25 words
A cooling device according to claim 1, wherein each said first fin is a cylindrical fin and each said second fin is a hollow cylinder.
Claim 8
Dependent Claim 202 words
A multi-chip module, comprising: a plurality of micropackages, each having an LSI chip hermetically sealed therein; a first substrate having said micropackages mounted thereon; a housing covering said first substrate; heat conduction members provided respectively between said micropackages and said housing for conducting heat generated by said LSI chips to said housing; wherein each of said micropackages includes a first heat conduction member, having a cap portion for receiving said LSI chip and a first fin that is integral with said cap portion and formed of the same material as that of said cap portion, and a second substrate fixed to said cap portion of said first heat conduction member; wherein each of said LSI chips is mounted on said second substrate and fixed at a back surface thereof to an inner surface of said cap portion; second heat conduction members, each having a second fin and being movable with respect to a respective associated first heat conduction member and said housing to form a flexible heat conduction path, disposed in contact with said housing, said second heat conduction members being respectively engaged in a heat transfer relationship with said respective associated first heat conduction member through said first and second fins.
Claim 9
Dependent Claim 202 words
A multi-chip module, comprising: a plurality of micropackages, each having an LSI chip hermetically sealed therein; a first substrate having said micropackages mounted thereon; a housing covering said first substrate; heat conduction members provided respectively between said micropackages and said housing for conducting heat generated by said LSI chips to said housing; wherein each of said micropackages includes a first heat conduction member, having a cap portion for receiving said LSI chip and a first fin that is integral with said cap portion and formed of the same material as that of said cap portion, and a second substrate fixed to said cap portion of said first heat conduction member; wherein each of said LSI chips is mounted on said second substrate and fixed at a back surface thereof to an inner surface of said cap portion; second heat conduction members, each having a second fin and being movable with respect to a respective associated first heat conduction member and said housing to form a flexible heat conduction path, disposed in contact with said housing, said second heat conduction members being respectively engaged in a heat transfer relationship with said respective associated first heat conduction member through said first and second fins.
Claim 10
Dependent Claim 17 words
A multi-chip module according to claim 7, wherein said LSI chip is 15-20 by 15-20 millimeters square.
Claim 11
Dependent Claim 18 words
A multi-chip module according to claim 7, wherein the heat-generation density of said LSI chips is 5-100 W/cm2.
Claim 12
Dependent Claim 51 words
A multi-chip module according to claim 7, further comprising an elastic member interposed between every mutually engaged pair of said first and second heat conduction members, so that said second heat conduction member is kept in pressure contact with an upper inner wall surface of said housing, by said elastic member.
Claim 13
Dependent Claim 25 words
A multi-chip module according to claim 7, wherein each said mutually engaged pair of said first and second fins have a micro gap between them.
Claim 14
Dependent Claim 53 words
A multi-chip module according to claim 7, wherein the contact area of each of said second heat conduction members with the upper inner wall surface of said housing is larger than a size of said micropackage, and is substantially equal to an area allotted to each of said micropackages on said first substrate.
Claim 15
Dependent Claim 25 words
A multi-chip module according to claim 7, wherein at least either of said first and second heat conduction members is made of a dielectric material.
Claim 16
Dependent Claim 25 words
A multi-chip module according to claim 7, wherein each said first fin is a cylindrical fin and each said second fin is a hollow cylinder.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2001-05-11 2001-11-10 2002-05-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-05-11 2005-11-10 2006-05-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-05-11 2009-11-10 2010-05-12 $7700.00 Window Closed / Lapsed

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