US5736751A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Field effect transistor having thick source and drain regions
Assignee: Seiko Epson Corp
•
Filing: 1995-03-30
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Granted: 1998-04-07
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Expires: 2015-03-30
Abstract
Abstract Thin film transistor including polycrystalline silicon or amorphous silicon thin film channel regions having a thickness of between about 100 ANGSTROM and 2500 ANGSTROM which are thinner than at least a portion of the source and drain regions and active matrix assemblies including thin film transistors for improved electro-optical displays are provided.
Inventors
- 👤 Toshihiko Mano
- 👤 Toshimoto Kodaira
- 👤 Hiroyuki Oshima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:37
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/1368; H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0314; H10D30/0321; H10D30/60; H10D30/67; H10D30/6704; H10D30/6713; H10D30/6729; H10D30/673; H10D30/6731; H10D30/674; H10D30/6741; H10D30/6743; H10D30/6745; H10D30/6757; H10D86/00; H10D86/40; H10D86/421; H10D86/60; H10D86/80; G02F1/136213; G02F2202/00; G02F2202/10; G02F2202/104; H10D30/6746
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
147 words
A field effect transistor arranged over a substrate comprising: a channel region disposed over the substrate, the channel region comprising a polycrystalline silicon layer having a thickness of less than 2500 Å; a source region and a drain region spaced apart by the channel region; a gate insulating film disposed on the channel region, the source region and the drain region; a gate electrode disposed on the gate insulating film and opposing the channel region; an interlayer disposed over the source region, the drain region and the gate electrode; and a source electrode and a drain electrode connected to connecting portions of the source region and the drain region through contact holes formed in the gate insulating film and the interlayer, at least one of the connecting portions of the source region and the drain region having a thickness greater than a thickness of the channel region.
Claim 2
Dependent Claim
147 words
A field effect transistor arranged over a substrate comprising: a channel region disposed over the substrate, the channel region comprising a polycrystalline silicon layer having a thickness of less than 2500 Å; a source region and a drain region spaced apart by the channel region; a gate insulating film disposed on the channel region, the source region and the drain region; a gate electrode disposed on the gate insulating film and opposing the channel region; an interlayer disposed over the source region, the drain region and the gate electrode; and a source electrode and a drain electrode connected to connecting portions of the source region and the drain region through contact holes formed in the gate insulating film and the interlayer, at least one of the connecting portions of the source region and the drain region having a thickness greater than a thickness of the channel region.
Claim 3
Dependent Claim
17 words
The field effect transistor of claim 1, wherein the source electrode and the drain electrode comprise aluminum.
Claim 4
Dependent Claim
22 words
The field effect transistor of claim 1, wherein the thickness of the channel region is between about 100 Å and 1000 Å.
Claim 5
Dependent Claim
22 words
The field effect transistor of claim 1, wherein the thickness of the channel region is between about 100 Å and 2500 Å.
Claim 6
Dependent Claim
171 words
A liquid crystal device wherein data signals are supplied to liquid crystal cells through a plurality of field effect transistors arranged in a plurality of picture elements, each of said field effect transistors comprising: a channel region disposed over a substrate, the channel region comprising a polycrystalline silicon layer having a thickness less than 2500 Å; a source region and a drain region spaced apart by the channel region; a gate insulating film disposed on the channel region, the source region and the drain region; a gate electrode disposed on the gate insulating film and opposing the channel region; an interlayer disposed over the source region, the drain region and the gate electrode; and a source electrode and a drain electrode connected to connecting portions of the source region and the drain region through contact holes formed in the gate insulating film and the interlayer, at least one of the connecting portions of the source region and the drain region having a thickness greater than a thickness of the channel region.
Claim 7
Dependent Claim
171 words
A liquid crystal device wherein data signals are supplied to liquid crystal cells through a plurality of field effect transistors arranged in a plurality of picture elements, each of said field effect transistors comprising: a channel region disposed over a substrate, the channel region comprising a polycrystalline silicon layer having a thickness less than 2500 Å; a source region and a drain region spaced apart by the channel region; a gate insulating film disposed on the channel region, the source region and the drain region; a gate electrode disposed on the gate insulating film and opposing the channel region; an interlayer disposed over the source region, the drain region and the gate electrode; and a source electrode and a drain electrode connected to connecting portions of the source region and the drain region through contact holes formed in the gate insulating film and the interlayer, at least one of the connecting portions of the source region and the drain region having a thickness greater than a thickness of the channel region.
Claim 8
Dependent Claim
17 words
The liquid crystal device of claim 5, wherein the source electrode and the drain electrode comprise aluminum.
Claim 9
Dependent Claim
22 words
The liquid crystal device of claim 5, wherein a thickness of the channel region is between about 100 Å and 1000 Å.
Claim 10
Dependent Claim
22 words
The liquid crystal device of claim 5, wherein a thickness of the channel region is between about 100 Å and 2500 Å.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-06 | 2001-10-06 | 2002-04-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-06 | 2005-10-06 | 2006-04-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-06 | 2009-10-06 | 2010-04-07 | $7700.00 | Window Closed / Lapsed |