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US5734192A
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Trench isolation for active areas and first level conductors
Assignee: International Business Machines Corp
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Filing: 1995-12-22
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Granted: 1998-03-31
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Expires: 2015-12-22
Abstract
Abstract A trench isolation structure for a semiconductor is provided including an isolation ring and an isolation path. The isolation ring surrounds active semiconductor areas and is bordered on the outside by inactive semiconductor area. The isolation path extends from the isolation ring through the inactive semiconductor area. A first level conductor on the isolation path electrically connects or capacitively couples a device in the active semiconductor area to a location on the substrate outside the isolation ring. The isolation path has a configuration derived from the layout of the conductor.
Inventors
- 👤 Edward W. Sengle
- 👤 Mark D. Jaffe
- 👤 Daniel Nelson Maynard
- 👤 Mark Alan Lavin
- 👤 Eric Jeffrey White
- 👤 John A. Bracchitta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:50
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/10; H10W10/17; H10W20/00; H10W20/40; H10W20/495
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
141 words
A semiconductor structure, comprising: a semiconductor substrate comprising an isolation ring having an inside edge and an outside edge, said isolation having an isolation thickness; an active semiconductor area bordering said inside edge, said active semiconductor area comprising a device, inactive semiconductor bordering said outside edge; an isolation path extending from said outside edge to a location on said substrate outside said isolation ring, said isolation path having at least two sides, there being an inactive semiconductor area bordering each of said at least two sides; and a first level conductor on said isolation path electrically connecting or capacitively coupling said device to said location, said isolation thickness sufficient to substantially isolate said conductor from electrical connection or capacitive coupling with said inactive semiconductor, there being no device within said inactive semiconductor connected to provide a circuit function for semiconductor structure.
Claim 2
Dependent Claim
141 words
A semiconductor structure, comprising: a semiconductor substrate comprising an isolation ring having an inside edge and an outside edge, said isolation having an isolation thickness; an active semiconductor area bordering said inside edge, said active semiconductor area comprising a device, inactive semiconductor bordering said outside edge; an isolation path extending from said outside edge to a location on said substrate outside said isolation ring, said isolation path having at least two sides, there being an inactive semiconductor area bordering each of said at least two sides; and a first level conductor on said isolation path electrically connecting or capacitively coupling said device to said location, said isolation thickness sufficient to substantially isolate said conductor from electrical connection or capacitive coupling with said inactive semiconductor, there being no device within said inactive semiconductor connected to provide a circuit function for semiconductor structure.
Claim 3
Dependent Claim
39 words
A semiconductor structure as recited in claim 1, said conductor having a first pattern outside said active semiconductor area, said isolation path having a second pattern, said second pattern being said first pattern shifted outward by a fixed dimension.
Claim 4
Dependent Claim
20 words
A semiconductor structure as recited in claim 2, said fixed dimension being less than or equal to about 10 micrometers.
Claim 5
Dependent Claim
25 words
A semiconductor structure as recited in claim 1, said isolation ring having a width, said width being less than or equal to about 10 micrometers.
Claim 6
Dependent Claim
21 words
A semiconductor structure as recited in claim 1, said conductor connected to a second device in a second active semiconductor area.
Claim 7
Dependent Claim
41 words
A semiconductor structure as recited in claim 1, said first isolation flag having a first corner, the semiconductor structure further comprising a second isolation ring having a second corner and an isolation tab linking said first corner and said second corner.
Claim 8
Dependent Claim
75 words
A semiconductor structure, comprising: a semiconductor substrate comprising a semiconductor surface, a first isolation ring and a second isolation ring, a first active semiconductor area within said first ring, a second active semiconductor area within said second ring, an inactive third semiconductor area outside of said first ring and said second ring; and an isolation path extending from said first ring to said second ring, said isolation path extending through said inactive third semiconductor area.
Claim 9
Dependent Claim
75 words
A semiconductor structure, comprising: a semiconductor substrate comprising a semiconductor surface, a first isolation ring and a second isolation ring, a first active semiconductor area within said first ring, a second active semiconductor area within said second ring, an inactive third semiconductor area outside of said first ring and said second ring; and an isolation path extending from said first ring to said second ring, said isolation path extending through said inactive third semiconductor area.
Claim 10
Dependent Claim
16 words
A semiconductor structure as recited in claim 7, wherein said isolation rings extend below said surface.
Claim 11
Dependent Claim
30 words
A semiconductor structure as recited in claim 7, wherein a first device is within said first active semiconductor area and a second device is within said second active semiconductor area.
Claim 12
Dependent Claim
31 words
A semiconductor structure as recited in claim 7, wherein there is no device within said inactive third semiconductor area that is connected to provide a circuit function for the semiconductor structure.
Claim 13
Dependent Claim
16 words
A semiconductor structure as recited in claim 7, wherein said isolation path extends below said surface.
Claim 14
Dependent Claim
24 words
A semiconductor structure as recited in claim 11, wherein said isolation path extends more than five times a gate dielectric thickness below said surface.
Claim 15
Dependent Claim
15 words
A semiconductor structure as recited in claim 7, wherein said isolation path comprises a dielectric.
Claim 16
Dependent Claim
16 words
A semiconductor structure as recited in claim 13, wherein said isolation path comprises shallow trench isolation.
Claim 17
Dependent Claim
22 words
A semiconductor structure as recited in claim 7, wherein said isolation path has a width that is less than about 2 micrometers.
Claim 18
Dependent Claim
18 words
A semiconductor structure as recited in claim 7, further comprising a first level conductor on said isolation path.
Claim 19
Dependent Claim
50 words
A semiconductor structure as recited in claim 7, wherein said isolation path has a path width, said conductor has a conductor width, said conductor width being less than said path width, said isolation path substantially isolating said conductor from electrical connection or capacitive coupling with said inactive third semiconductor area.
Claim 20
Dependent Claim
40 words
A semiconductor structure as recited in claim 7, wherein said first isolation ring has a first corner, said second isolation ring has a second corner, said isolation path being an isolation tab linking said first corner and said second corner.
Claim 21
Dependent Claim
24 words
A semiconductor structure as recited in claim 1, wherein said semiconductor further comprises a semiconductor surface, said isolation comprising dielectric extending below said surface.
Claim 22
Dependent Claim
15 words
A semiconductor structure as recited in claim 19, wherein said isolation comprises shallow trench isolation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-03-30 | 2001-09-29 | 2002-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-30 | 2005-09-29 | 2006-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-30 | 2009-09-29 | 2010-03-31 | $7700.00 | Window Closed / Lapsed |