Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

Claim 2

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming a real-size erect image of said first object on said second object, which is telecentric at least on an image side; a second projection optical system for forming a real-size erect image of said first object on said second object, which is telecentric at least on the image side and which is disposed next to said first projection optical system; a first field stop for limiting an exposure region to be formed on said second object by said first projection optical system, within a certain shape; and a second field stop for limiting an exposure region to be formed on said second object by said second projection optical system, within a certain shape; wherein a sum of a length along said moving direction, of the first exposure region limited by said first field stop and a length along said moving direction, of the second exposure region limited by said second field stop is constant over a direction perpendicular to said moving direction.

Claim 3

An exposure apparatus according to claim 1, wherein a position of said first exposure region in the direction perpendicular to said moving direction is different from a position of said second exposure region in the direction perpendicular to said moving direction.

Claim 4

An exposure apparatus according to claim 1, wherein said first and second projection optical systems each is of a Dyson type.

Claim 5

An exposure apparatus according to claim 1, wherein said first and second projection optical systems each is of an Offner type.

Claim 6

An exposure apparatus according to claim 1, wherein said first and second projection optical systems each comprises a first partial optical system for forming an intermediate image of said first object and a second partial optical system for re-imaging said intermediate image on said second object and wherein said first and second field stops are set at positions of said intermediate images.

Claim 7

An exposure apparatus according to claim 5, wherein said first and second partial optical systems have a same structure and are arranged in the same direction.

Claim 8

An exposure apparatus according to claim 1, wherein among said first exposure region a portion exposed as overlapping with said second exposure region has a linearly changing length along said moving direction, among said second exposure region a portion exposed as overlapping with said first exposure region has a linearly changing length along said moving direction, among said first exposure region a portion exposed alone has a constant length along said moving direction, and among said second exposure region a portion exposed alone has a constant length along said moving direction.

Claim 9

An exposure apparatus according to claim 7, wherein said first and second projection optical systems each is of a Dyson type and said first and second exposure regions are trapezoid.

Claim 10

An exposure apparatus according to claim 7, wherein said first and second projection optical systems each is of a Dyson type and said first and second exposure regions are hexagonal.

Claim 11

An exposure apparatus according to claim 7, wherein said first and second projection optical systems each is of an Offner type and said first and second exposure regions are of a half-ring shape.

Claim 12

An exposure apparatus according to claim 10, wherein among said first and second exposure regions the portions exposed alone have arcuate borders.

Claim 13

An exposure apparatus according to claim 10, wherein between said first and second exposure regions the portions exposed alone have polygonal lines as borders.

Claim 14

An exposure apparatus according to claim 1, further comprising a light source for exposure, and a light guide for guiding light from said light source to said first and second projection optical systems, said light guide having optical fibers at least some of which are bundled at random.

Claim 15

An exposure apparatus according to claim 1, wherein said first field stop is placed in said first projection optical system and said second field stop is placed in said second projection optical system.

Claim 16

An exposure apparatus according to claim 1, further comprising an illumination means for supplying said first object with exposure light, wherein said first and second field stops are placed in said illumination means.

Claim 17

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system having unit magnification and forming an erect image of said first object onto a first exposure region on said second object, said first projection optical system is telecentric at least on an image side; and a second projection optical system having unit magnification and forming an erect image of said first object onto a second exposure region on said second object, said second projection optical system is telecentric at least on the image side; wherein said first exposure region is separated from said second exposure region in said moving direction.

Claim 18

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system having unit magnification and forming an erect image of said first object onto a first exposure region on said second object, said first projection optical system is telecentric at least on an image side; and a second projection optical system having unit magnification and forming an erect image of said first object onto a second exposure region on said second object, said second projection optical system is telecentric at least on the image side; wherein said first exposure region is separated from said second exposure region in said moving direction.

Claim 19

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming a real-size erect image of said first object on said second object, which is both-side telecentric; and a second projection optical system for forming a real-size erect image of said first object on said second object, which is both-side telecentric and which is disposed next to said first projection optical system; wherein each of said first and second projection optical systems has a refractive optical system of a positive refractive power and a plane reflective surface for reflecting light from said refractive optical system back to said refractive optical system.

Claim 20

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming a real-size erect image of said first object on said second object, which is both-side telecentric; and a second projection optical system for forming a real-size erect image of said first object on said second object, which is both-side telecentric and which is disposed next to said first projection optical system; wherein each of said first and second projection optical systems has a refractive optical system of a positive refractive power and a plane reflective surface for reflecting light from said refractive optical system back to said refractive optical system.

Claim 21

An exposure apparatus according to claim 17, wherein each of said first and second projection optical systems comprises: a first partial optical system for forming an intermediate image of said first object; a second partial optical system for forming a real-size erect image of said first object on said second object, based on light from said intermediate image; and a field stop provided at a position where said intermediate image is formed.

Claim 22

An exposure apparatus according to claim 18, wherein said field stops are so defined that a sum of lengths along said moving direction, of exposure regions determined by aperture portions of said field stops is always constant in a direction perpendicular to said moving direction.

Claim 23

An exposure apparatus according to claim 19, wherein said field stop is approximately trapezoid.

Claim 24

An exposure apparatus according to claim 19, wherein said field stop is approximately arcuate.

Claim 25

An exposure apparatus according to claim 19, wherein both said refractive optical system of the positive refractive power and said plane reflective surface are provided in each of said first and second partial optical systems and wherein in each partial optical system said plane reflective surface is located at a position of a rear focal point of said refractive optical system.

Claim 26

An exposure apparatus according to claim 22, wherein said first projection optical system and said second projection optical system are alternately arranged in the direction perpendicular to the moving direction of said first and second objects.

Claim 27

An exposure apparatus according to claim 17, wherein said plane reflective surface is two reflective surfaces arranged as perpendicular to each other.

Claim 28

An exposure apparatus according to claims 17, wherein said first object and second object are horizontally disposed and are moved in a horizontal direction.

Claim 29

An exposure apparatus according to claim 25, wherein said first object is a mask for exposure and said second object is a substrate to be exposed.

Claim 30

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming an erect image of said first object on said second object; and a second projection optical system for forming an erect image of said first object on said second object, which is disposed next to said first projection optical system; wherein each of said first and second projection optical systems has: a first image-forming optical system arranged so that one of two conjugate points is located on said first object; and a second image-forming optical system arranged so that one of two conjugate points is coincident with the other conjugate point of said first image-forming optical system and so that the other of said two conjugate points is located on said second object; wherein either one of said first image-forming optical system and second image-forming optical system is an Offner optical system having a concave reflective mirror and a convex reflective mirror and arranged to guide light from one conjugate point to the other conjugate point while reflecting the light by said concave reflective mirror, said convex reflective mirror, and said concave reflective mirror in the named order; and wherein the other of said first and second image-forming optical systems is a Dyson optical system having first and second reflective prisms, a lens group of a positive of a positive refractive power, and a concave reflective mirror with a concave surface to said lens group and arranged to guide light from one conjugate point to the other conjugate point via said first reflective prism, said lens group, said concave reflective mirror, said lens group, and said second reflective prism in the named order.

Claim 31

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming an erect image of said first object on said second object; and a second projection optical system for forming an erect image of said first object on said second object, which is disposed next to said first projection optical system; wherein each of said first and second projection optical systems has: a first image-forming optical system arranged so that one of two conjugate points is located on said first object; and a second image-forming optical system arranged so that one of two conjugate points is coincident with the other conjugate point of said first image-forming optical system and so that the other of said two conjugate points is located on said second object; wherein either one of said first image-forming optical system and second image-forming optical system is an Offner optical system having a concave reflective mirror and a convex reflective mirror and arranged to guide light from one conjugate point to the other conjugate point while reflecting the light by said concave reflective mirror, said convex reflective mirror, and said concave reflective mirror in the named order; and wherein the other of said first and second image-forming optical systems is a Dyson optical system having first and second reflective prisms, a lens group of a positive of a positive refractive power, and a concave reflective mirror with a concave surface to said lens group and arranged to guide light from one conjugate point to the other conjugate point via said first reflective prism, said lens group, said concave reflective mirror, said lens group, and said second reflective prism in the named order.

Claim 32

An exposure apparatus according to claim 27, wherein a field stop is disposed at a position where the conjugate point of said first image-forming optical system is coincident with the conjugate point of said second image-forming optical system, and wherein a magnification correcting optical system with a variable refractive power is disposed in an optical path between said first image-forming optical system and said second image-forming optical system.

Claim 33

An exposure apparatus according to claim 28, wherein an aperture portion of said field stop is so defined that a sum of lengths along the moving direction, of exposure regions is always constant in a direction perpendicular to said moving direction.

Claim 34

An exposure apparatus according to claim 29, wherein said field stop has the aperture portion of an approximately arcuate shape.

Claim 35

An exposure apparatus according to claim 27, wherein said first image-forming optical system forms an intermediate image of said first object and said second image-forming optical system re-images said intermediate image on said second object.

Claim 36

An exposure apparatus according to claim 27, wherein a plane-parallel plate is provided in an optical path between said first image-forming optical system and said second image-forming optical system so as to be inclinable relative to a light beam between said first and second image-forming optical systems.

Claim 37

An exposure apparatus according to claim 27, wherein said first image-forming optical system in said first projection optical system and said second image-forming optical system in said second projection optical system are Offner optical systems, each having a concave reflective mirror and a convex reflective mirror and arranged to guide light from one conjugate point to the other conjugate point while reflecting the light by said concave reflective mirror, said convex reflective mirror, and said concave reflective mirror in the named order; wherein said second image-forming optical system in said first projection optical system and said first image-forming optical system in said second projection optical system are Dyson optical systems, each having first and second reflective prisms, a lens group of a positive refractive power, and a concave reflective mirror with a concave surface to said lens group and arranged to guide light from one conjugate point to the other conjugate point via said first reflective prism, said lens group, said concave reflective mirror, said lens group, and said second reflective prism in the named order; and wherein said first image-forming optical system forms an intermediate image of said first object and said second image-forming optical system re-images said intermediate image on said second object.

Claim 38

An exposure apparatus according to claim 27, wherein an optical axis of said first image-forming optical system is decentered from an optical axis of said second image-forming optical system.

Claim 39

An exposure apparatus according to claim 27, wherein said first object is a mask for exposure and said second object is a substrate to be exposed.

Claim 40

An exposure apparatus according to claim 35, wherein said first projection optical system and said second projection optical system are alternately arranged in the direction perpendicular to the moving direction of said first and second objects.

Claim 41

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming an image of a first field region on said first object, in a first exposure region on said second object; and a second projection optical system for forming an image of a second field region on said first object, different from said first exposure region, in a second exposure region on said second object; wherein each of said first and second projection optical systems comprises: an optical system having an optical axis and at least one reflective surface coaxial with said optical axis; first light splitting means disposed in an optical path between said optical system and said first object; and second light splitting means disposed in an optical path between said optical system and said second object; wherein a light beam passing said second light splitting means is transferred in a direction traversing said optical axis to be guided to said first light splitting means.

Claim 42

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming an image of a first field region on said first object, in a first exposure region on said second object; and a second projection optical system for forming an image of a second field region on said first object, different from said first exposure region, in a second exposure region on said second object; wherein each of said first and second projection optical systems comprises: an optical system having an optical axis and at least one reflective surface coaxial with said optical axis; first light splitting means disposed in an optical path between said optical system and said first object; and second light splitting means disposed in an optical path between said optical system and said second object; wherein a light beam passing said second light splitting means is transferred in a direction traversing said optical axis to be guided to said first light splitting means.

Claim 43

An exposure apparatus according to claim 37, wherein said first and said second light splitting means are juxtaposed on a same side with respect to said optical system and on a plane perpendicular to said optical axis; and wherein a beam transferring member for transferring the light beam passing said second light splitting means along the direction traversing said optical axis is disposed at a position on the opposite side to said optical system with respect to said first and said second light splitting means.

Claim 44

An exposure apparatus according to claim 37, wherein said first and said second light splitting means are juxtaposed on a same side with respect to said optical system and on a plane perpendicular to said optical axis; wherein a first deflecting member for guiding light from said first object to said first light splitting means is disposed at a position on an opposite side to said optical system with respect to said first light splitting means; and wherein a second deflecting member for guiding light from said second light splitting means to said second object is disposed at a position on an opposite side to said optical system with respect to said second light splitting means.

Claim 45

An exposure apparatus according to claim 37, wherein each of said first and second light splitting means is a polarizing beam splitter; and wherein a phase changing member for changing a phase between polarization components having mutually orthogonal oscillation planes is disposed in an optical path running from said first light splitting means through said optical system to said second light splitting means.

Claim 46

An exposure apparatus according to claim 40, which has a light source, and a polarizing beam splitter for splitting light from said light source into linearly polarized light beams having mutually orthogonal oscillation planes, and which is provided with an illumination optical system for guiding one light beam split into by said polarizing beam splitter to said first field region and guiding the other light beam split into by said polarizing beam splitter to said second field region.

Claim 47

An exposure apparatus according to claim 41, wherein the phase changing member for changing a phase between mutually orthogonal polarization components is disposed in an optical path between said polarizing beam splitter and said first or second field region.

Claim 48

An exposure apparatus according to claim 37, wherein said first object is a mask for exposure and said second object is a substrate to be exposed.

Claim 49

In a projection optical system for forming an image of a first object on a second object, a projection optical apparatus comprising: an optical system having an optical axis and at least one reflective surface coaxial with said optical axis; first light splitting means disposed in an optical path between said optical system and said first object; and second light splitting means disposed in an optical path between said optical system and said second object; wherein a light beam passing said second light splitting means is transferred along a direction traversing said optical axis to be guided to said first light splitting means.

Claim 50

In a projection optical system for forming an image of a first object on a second object, a projection optical apparatus comprising: an optical system having an optical axis and at least one reflective surface coaxial with said optical axis; first light splitting means disposed in an optical path between said optical system and said first object; and second light splitting means disposed in an optical path between said optical system and said second object; wherein a light beam passing said second light splitting means is transferred along a direction traversing said optical axis to be guided to said first light splitting means.

Claim 51

A projection optical apparatus according to claim 44, wherein said first and said second light splitting means are juxtaposed on a same side with respect to said optical system and on a plane perpendicular to said optical axis; and wherein a beam transferring member for transferring the light beam passing said second light splitting means along the direction traversing said optical axis is disposed an a position on the opposite side to said optical system with respect to said first and said second light splitting means.

Claim 52

A projection optical apparatus according to claim 44, wherein said first and said second light splitting means are juxtaposed on a same side with respect to said optical system and on a plane perpendicular to said optical axis; wherein a first deflecting member for guiding light from said first object to said first light splitting means is disposed at a position on an opposite side to said optical system with respect to said first light splitting means; and wherein a second deflecting member for guiding light from said second light splitting means to said second object is disposed at a position on an opposite side to said optical system with respect to said second light splitting means.

Claim 53

A projection optical apparatus according to claim 44, wherein each of said first and second light splitting means is a polarizing beam splitter; and wherein a phase changing member for changing a phase between polarization components having mutually orthogonal oscillation planes is disposed in an optical path running from said first light splitting means through said optical system to said second light splitting means.

Claim 54

A projection optical apparatus according to claim 47, which has a light source, and a polarizing beam splitter for splitting light from said light source into linearly polarized light beams having mutually orthogonal oscillation planes, and which is provided with an illumination optical system for guiding one light beam split into by said polarizing beam splitter to a first field region and guiding the other light beam split into by said polarizing beam splitter to a second field region.

Claim 55

A projection optical apparatus according to claim 48, wherein the phase changing member for changing a phase between mutually orthogonal polarization components is disposed in an optical path between said polarizing beam splitter and said first or second field region.

Claim 56

A projection optical apparatus according to claim 44, wherein said first object is a mask for exposure and said second object is a substrate to be exposed.

Claim 57

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first reflective surface for deflecting light coming from said first object; an image-forming optical system for forming an intermediate image of said first object, based on light coming from the first reflective surface; a beam transferring member for transferring the light of from said first reflective surface and then through said image-forming optical system, along a direction traversing an optical axis of said image-forming optical system to guide the thus transferred light again to said image-forming optical system; and a second reflective surface for deflecting the light of from said beam transferring member and then through said image-forming optical system, to said second object.

Claim 58

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first reflective surface for deflecting light coming from said first object; an image-forming optical system for forming an intermediate image of said first object, based on light coming from the first reflective surface; a beam transferring member for transferring the light of from said first reflective surface and then through said image-forming optical system, along a direction traversing an optical axis of said image-forming optical system to guide the thus transferred light again to said image-forming optical system; and a second reflective surface for deflecting the light of from said beam transferring member and then through said image-forming optical system, to said second object.

Claim 59

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming an erect image of said first object on said second object; and a second projection optical system for forming an erect image of said first object on said second object, which is disposed next to the first projection optical system; wherein each of said first and second projection optical systems comprises: a first reflective surface for deflecting light from said first object; an image-forming optical system having an optical axis and two conjugate points, said image-forming optical system being disposed so that said first reflective surface is positioned on a side of one conjugate point out of said two conjugate points, and said image-forming optical system being for forming an intermediate image of said first object, based on light coming from said first reflective surface; a beam transferring member for transferring the light of from said first reflective surface and then through said image-forming optical system, along a direction traversing the optical axis of said image-forming optical system to guide the thus transferred light again to said image-forming optical system; and a second reflective surface for deflecting the light of from said beam transferring member and then through said image-forming optical system, to said second object.

Claim 60

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising: a first projection optical system for forming an erect image of said first object on said second object; and a second projection optical system for forming an erect image of said first object on said second object, which is disposed next to the first projection optical system; wherein each of said first and second projection optical systems comprises: a first reflective surface for deflecting light from said first object; an image-forming optical system having an optical axis and two conjugate points, said image-forming optical system being disposed so that said first reflective surface is positioned on a side of one conjugate point out of said two conjugate points, and said image-forming optical system being for forming an intermediate image of said first object, based on light coming from said first reflective surface; a beam transferring member for transferring the light of from said first reflective surface and then through said image-forming optical system, along a direction traversing the optical axis of said image-forming optical system to guide the thus transferred light again to said image-forming optical system; and a second reflective surface for deflecting the light of from said beam transferring member and then through said image-forming optical system, to said second object.

Claim 61

An exposure apparatus according to claim 52, wherein said first projection optical system and said second projection optical system are alternately arranged in a direction perpendicular to the moving direction of said first and second objects.

Claim 62

An exposure apparatus according to claim 51, wherein a field stop is disposed at a position where said intermediate image is formed.

Claim 63

An exposure apparatus according to claim 54, wherein a sum of lengths along the moving direction, of exposure regions defined by opening portions in said field stops is determined so as to be always constant in a direction perpendicular to said moving direction.

Claim 64

An exposure apparatus according to claim 51, further comprising magnification adjusting means for changing projection magnifications of said projection optical systems.

Claim 65

An exposure apparatus according to claim 51, further comprising image moving means for moving a position of the image of said first object formed on said second object along an in-plane direction of said second object.

Claim 66

An exposure apparatus according to claim 51, wherein the optical axis of said image-forming optical system is parallel to the moving direction of said first and second objects.

Claim 67

An exposure apparatus according to claim 51, wherein said first object is a mask for exposure and said second object is a substrate to be exposed.

Claim 68

A projection optical appratus according to claim 52, wherein a field stop is disposed at a position where said intermediate image is formed.

Claim 69

A projection optical apparatus comprising: an image-forming optical system having an optical axis and two conjugate points; a field splitting member disposed on a side of one conjugate point of said projection optical system, for splitting a field of said projection optical system; and a beam transferring member disposed on a side of the other conjugate point of said projection optical system, for transferring light passing via said field splitting member and said projection optical system in the named order, along a direction traversing said optical axis of said projection optical system.

Claim 70

A projection optical apparatus comprising: an image-forming optical system having an optical axis and two conjugate points; a field splitting member disposed on a side of one conjugate point of said projection optical system, for splitting a field of said projection optical system; and a beam transferring member disposed on a side of the other conjugate point of said projection optical system, for transferring light passing via said field splitting member and said projection optical system in the named order, along a direction traversing said optical axis of said projection optical system.

Claim 71

A projection optical apparatus according to claim 61, an adjusting method of optical apparatus, comprising: a step of detecting the optical axis of said image-forming optical system; a step of positioning said field splitting member for spatially splitting two fields of said image-forming optical system, with respect to the optical axis of the image-forming optical system; and a step of positioning said beam transferring member for transferring the light passing via said field splitting member and said image-forming optical system in the named order, along the direction traversing said optical system of said image-forming optical system, with respect to the optical axis of said image-forming optical system.

Claim 72

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, illuminating said first object by an illumination optical system and effecting projection exposure of an image of said first object onto said second object by a projection optical system a position of which is fixed relative to said illumination optical system: wherein said illumination optical system comprises: a first illumination optical system for forming a first illumination region on said first object; and a second illumination optical system for forming a second illumination region different from said first illumination region on said first object; wherein said projection optical system comprises: a first projection optical system for forming an erect image of said first object illuminated by said first illumination optical system on said second object; and a second projection optical system for forming an erect image of said first object illuminated by said second illumination optical system on said second object; wherein said first illumination optical system comprises first illumination region moving means for moving the first illumination region on said first object relative to said first projection optical system; and wherein said second illumination optical system comprises second illumination region moving means for moving the second illumination region on said first object relative to said second projection optical system.

Claim 73

An exposure apparatus for, while moving a first object and a second object in a certain moving direction, illuminating said first object by an illumination optical system and effecting projection exposure of an image of said first object onto said second object by a projection optical system a position of which is fixed relative to said illumination optical system: wherein said illumination optical system comprises: a first illumination optical system for forming a first illumination region on said first object; and a second illumination optical system for forming a second illumination region different from said first illumination region on said first object; wherein said projection optical system comprises: a first projection optical system for forming an erect image of said first object illuminated by said first illumination optical system on said second object; and a second projection optical system for forming an erect image of said first object illuminated by said second illumination optical system on said second object; wherein said first illumination optical system comprises first illumination region moving means for moving the first illumination region on said first object relative to said first projection optical system; and wherein said second illumination optical system comprises second illumination region moving means for moving the second illumination region on said first object relative to said second projection optical system.

Claim 74

An exposure apparatus according to claim 63, wherein each of said first and second illumination optical systems has a field stop disposed at a position conjugate with said first object; wherein said first illumination region moving means has an optical member disposed in an optical path between said field stop in said first illumination optical system and said first object, which is arranged to move an image of said field stop formed on said first object in an in-plane direction of said first object; and wherein said second illumination region moving means has an optical member disposed in an optical path between said field stop in said second illumination optical system and said first object, which is arranged to move an image of said field stop formed on said first object in an in-plane direction of said first object.

Claim 75

An exposure apparatus according to claim 64, wherein said first illumination region moving means has two plane-parallel plates perpendicular to an optical axis of said first illumination optical system, said plane-parallel plates each being rotatable about axes perpendicular to each other; and wherein said second illumination region moving means has two plane-parallel plates perpendicular to an optical axis of said second illumination optical system, said plane-parallel plates each being rotatable about axes perpendicular to each other.

Claim 76

An exposure apparatus according to claim 63, wherein said first illumination region moving means has a field stop disposed at a position conjugate with said first object in an optical path of said first illumination optical system and arranged as movable relative to an optical axis of said first illumination optical system; and wherein said second illumination region moving means has a field stop disposed at a position conjugate with said first object in an optical path of said second illumination optical system and arranged as movable relative to an optical axis of said second illumination optical system.

Claim 77

An exposure apparatus according to claims 63, wherein said first and second projection optical systems each have exposure region moving means for changing a positional relation between an optical axis on a side of said first object and an optical axis on a side of said second object.

Claim 78

An exposure apparatus according to claim 67, wherein said exposure region moving means has two plane-parallel plates perpendicular to said optical axis, said plane-parallel plates each being rotatable about axes perpendicular to each other.

Claim 79

An exposure apparatus according to claim 63, wherein said first object is a mask for exposure and said second object is a substrate to be exposed.

Claim 80

An exposure apparatus according to claim 16, wherein said second first and second projection optical system is both-side telecentric, and each of said first and second projection optical systems has a refractive optical system of a positive refractive power and a plane reflective surface for reflecting light from said refractive optical system back to said refractive optical system.

Claim 81

An exposure apparatus according to claim 16, wherein each of said first and second projection optical systems has: a first image-forming optical system arranged so that one of two conjugate points is located on said first object; and a second image-forming optical system arranged so that one of two conjugate points is coincident with the other conjugate point of said first image-forming optical system and so that the other of said two conjugate points is located on said second object; wherein either one of said first image-forming optical system and second image-forming optical system is an Offner optical system having a concave reflective mirror and a convex reflective mirror and arranged to guide light from one conjugate point to the other conjugate point while reflecting the light by said concave reflective mirror, said convex reflective mirror, and said concave reflective mirror in the named order; and wherein the other of said first and second image-forming optical systems is a Dyson optical system having first and second reflective prisms, a lens group of a positive refractive power, and a concave reflective mirror with a concave surface to said lens group and arranged to guide light from one conjugate point to the other conjugate point via said first reflective prism, said lens group, said concave reflective mirror, said lens group, and said second reflective prism in the named order.

Claim 82

An exposure apparatus according to claim 16, wherein each of said first and second projection optical systems comprises: an optical system having an optical axis and at least one reflective surface coaxial with said optical axis; first light splitting means disposed in an optical path between said optical system and said first object; and second light splitting means disposed in an optical path between said optical system and said second object; wherein a light beam passing said second light splitting means is transferred in a direction traversing said optical axis to be guided to said first light splitting means.

Claim 83

An exposure apparatus according to claim 16 wherein each of said first and second projection optical systems comprises: a first reflective surface for deflecting light from said first object; an image-forming optical system having an optical axis and two conjugate points, said image-forming optical system being disposed so that said first reflective surface is positioned on a side of one conjugate point out of said two conjugate points, and said image-forming optical system being for forming an intermediate image of said first object, based on light coming from said first reflective surface; a beam transferring member for transferring the light of from said first reflective surface and then through said image-forming optical system, along a direction traversing the optical axis of said image-forming optical system to guide the thus transferred light again to said image-forming optical system; and a second reflective surface for deflecting the light of from said beam transferring member and then through said image-forming optical system, to said second object.

Claim 84

An exposure apparatus according to claim 16, wherein said exposure appratus further comprises an illumination optical system for illuminating said first object to effect projection exposure of an image of said first object onto said second object by a projection optical system a position of which is fixed relative to said illumination optical system: wherein said illumination optical system comprises: a first illumination optical system for forming a first illumination region on said first object; and a second illumination optical system for forming a second illumination region different from said first illumination region on said first object; wherein said projection optical system comprises: a first projection optical system for forming an erect image of said first object illuminated by said first illumination optical system on said second object; and a second projection optical system for forming an erect image of said first object illuminated by said second illumination optical system on said second object; wherein said first illumination optical system comprises first illumination region moving means for moving the first illumination region on said first object relative to said first projection optical system; and wherein said second illumination optical system comprises second illumination region moving means for moving the second illumination region on said first object relative to said second projection optical system.