US5723909A
Expired / Lapsed
US
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Semiconductor device and associated fabrication method
Assignee: Panasonic Holdings Corp
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Filing: 1996-09-11
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Granted: 1998-03-03
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Expires: 2016-09-11
Abstract
Abstract A first metallization layer is locally formed on the surface of a semiconductor substrate thereby leaving portions of the semiconductor substrate's surface exposed. A first silicon oxide layer is then formed in such a manner that it covers the exposed portions of the semiconductor substrate's surface and the first metallization layer. This is followed by the formation of an HMDS molecular layer on the first silicon oxide layer. Then, a second silicon oxide is formed on the molecular layer by means of a CVD process utilizing the chemical reaction of ozone with TEOS. Finally, a second metallization layer is locally formed on the second silicon oxide layer.
Inventors
- 👤 Kousaku Yano
- 👤 Tatsuo Sugiyama
- 👤 Satoshi Ueda
- 👤 Noboru Nomura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 21:04
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/093; H10W20/095; H10W20/40; H10W20/45; H10W20/48; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10W20/074; H10W20/075; H10W20/077; H10W20/096
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
144 words
A semiconductor device comprising: (a) a semiconductor substrate; (b) a first metallization layer locally formed on a surface of said semiconductor substrate thereby leaving portions of said surface of said semiconductor substrate exposed; (c) a first silicon oxide layer formed in such a manner that said first silicon oxide layer covers said exposed portions of said semiconductor substrate's surface and said first metallization layer; (d) a molecular layer composed of hexamethyldisilazane alone is formed on said first silicon oxide layer for making the surface of said first silicon oxide layer uniformly hydrophobic, said molecular layer being composed of molecules containing hydrophobic groups; (e) a second silicon oxide layer uniformly formed on said molecular layer by means of a chemical vapor deposition process utilizing the chemical reaction of ozone with organo-silicon; and (f) a second metallization layer locally formed on said second silicon oxide layer.
Claim 2
Dependent Claim
144 words
A semiconductor device comprising: (a) a semiconductor substrate; (b) a first metallization layer locally formed on a surface of said semiconductor substrate thereby leaving portions of said surface of said semiconductor substrate exposed; (c) a first silicon oxide layer formed in such a manner that said first silicon oxide layer covers said exposed portions of said semiconductor substrate's surface and said first metallization layer; (d) a molecular layer composed of hexamethyldisilazane alone is formed on said first silicon oxide layer for making the surface of said first silicon oxide layer uniformly hydrophobic, said molecular layer being composed of molecules containing hydrophobic groups; (e) a second silicon oxide layer uniformly formed on said molecular layer by means of a chemical vapor deposition process utilizing the chemical reaction of ozone with organo-silicon; and (f) a second metallization layer locally formed on said second silicon oxide layer.
Claim 3
Dependent Claim
16 words
The semiconductor device of claim 1, wherein said molecular layer is composed of a surface-active agent.
Claim 4
Dependent Claim
14 words
The semiconductor device of claim 2, wherein said surface-active agent contains silicon or germanium.
Claim 5
Dependent Claim
12 words
The semiconductor device of claim 1, wherein said organo-silicon is TEOS (tetra-ethyl-ortho-silicate).
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 2001-03-02 | 2001-09-01 | 2002-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-02 | 2005-09-01 | 2006-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-02 | 2009-09-01 | 2010-03-03 | $7700.00 | Window Closed / Lapsed |