US5719796A
Expired / Lapsed
US
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System for monitoring and analyzing manufacturing processes using statistical simulation with single step feedback
Assignee: GlobalFoundries Inc
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Filing: 1995-12-04
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Granted: 1998-02-17
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Expires: 2015-12-04
Abstract
Abstract A statistical simulation of a semiconductor fabrication process is performed in parallel with the actual process. Input parameters derived from a probability density function are applied to the simulator which, in turn, simulates an actual fabrication process which is modeled as a probability density function. Each simulation step is repeated with a random seed value using a Monte Carlo technique, a trial-and-error method using repeated calculations to determine a best solution to a problem. The simulator generates an output in the form of a probability distribution. The statistical simulation uses single-step feedback in which a simulation run uses input parameters that are supplied or derived from actual in-line measured data. Output data generated by the simulator, both intermediate output structure data and WET data, are matched to actual in-line measured data in circumstances for which measured data is available. The probability density structure of the simulator is adjusted after each simulation step so that simulated data more closely matches in-line measured data.
Inventors
- 👤 Vincent Ming Chun Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 18:21
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/23; H10P72/00; H10P72/06; H10P72/0604
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
206 words
A manufacturing monitoring system comprising: a fabrication equipment for performing a fabrication process step applied to a workpiece; a test equipment for acquiring a sample of a process test parameter sensed from the workpiece; a computer coupled to the test equipment to receive the process test parameter sample; a software program operable upon the computer system, the software program having a plurality of routines including: a routine for receiving the process test parameter sample; a routine for simulating a simulated fabrication process step which corresponds to the fabrication process step to generate a plurality of simulated fabrication process results, routine for simulating being a statistical simulation of a semiconductor fabrication process further including: a simulation loop routine using single-step feedback in which a simulation step of a plurality of simulation steps uses input parameters that are supplied from actual in-line measured data and generates output data; a subroutine for matching output data generated by the simulation step against actual in-line measured data; and a subroutine for adjusting a probability density structure of the simulator after each simulator step so that the simulated data more closely matches the actual in-line measured data; and a routine for generating a simulated profile indicative of the simulated fabrication process results.
Claim 2
Dependent Claim
206 words
A manufacturing monitoring system comprising: a fabrication equipment for performing a fabrication process step applied to a workpiece; a test equipment for acquiring a sample of a process test parameter sensed from the workpiece; a computer coupled to the test equipment to receive the process test parameter sample; a software program operable upon the computer system, the software program having a plurality of routines including: a routine for receiving the process test parameter sample; a routine for simulating a simulated fabrication process step which corresponds to the fabrication process step to generate a plurality of simulated fabrication process results, routine for simulating being a statistical simulation of a semiconductor fabrication process further including: a simulation loop routine using single-step feedback in which a simulation step of a plurality of simulation steps uses input parameters that are supplied from actual in-line measured data and generates output data; a subroutine for matching output data generated by the simulation step against actual in-line measured data; and a subroutine for adjusting a probability density structure of the simulator after each simulator step so that the simulated data more closely matches the actual in-line measured data; and a routine for generating a simulated profile indicative of the simulated fabrication process results.
Claim 3
Dependent Claim
27 words
A system according to claim 1, wherein the software program further includes: a Monte Carlo simulation routine for iteratively updating simulation results using a random seed value.
Claim 4
Dependent Claim
41 words
A system according to claim 1, wherein the software program further includes: a routine for formatting a plurality of process test parameter samples into a process data profile; and a routine for matching the process data profile to the simulated profile.
Claim 5
Dependent Claim
69 words
A system according to claim 1, wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a subroutine for deriving an input parameter to the simulation from an actual fabrication process parameter, the input parameter being derived from a probability density function; and a subroutine for simulating an actual fabrication process, the actual fabrication process being modeled as a probability density function.
Claim 6
Dependent Claim
21 words
A system according to claim 4, wherein the software program simulating routine is performed in parallel with the fabrication process step.
Claim 7
Dependent Claim
49 words
A system according to claim 4, wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a subroutine for repeating a plurality of simulation steps, the repeated steps applying a varying random seed value that is varied using a Monte Carlo technique.
Claim 8
Dependent Claim
157 words
A software program encoded on a computer-usable medium having computable readable code embodied therein controlling a manufacturing monitoring system, the manufacturing monitoring system including a fabrication equipment for performing a fabrication process step applied to a workpiece, a test equipment for acquiring a sample of a process test parameter sensed from the workpiece, a computer coupled to the test equipment to receive the process test parameter sample and having a memory, and the software program loadable into the memory and executable on the computer, the software program having a plurality of routines including: a routine for receiving the process test parameter sample; a routine for simulating a simulated fabrication process step which corresponds to the fabrication process step to generate a plurality of simulated fabrication process results; a routine for generating a simulated profile indicative of the simulated fabrication process results; and a routine for controlling the manufacturing monitoring system in response to the generated simulated profile.
Claim 9
Dependent Claim
157 words
A software program encoded on a computer-usable medium having computable readable code embodied therein controlling a manufacturing monitoring system, the manufacturing monitoring system including a fabrication equipment for performing a fabrication process step applied to a workpiece, a test equipment for acquiring a sample of a process test parameter sensed from the workpiece, a computer coupled to the test equipment to receive the process test parameter sample and having a memory, and the software program loadable into the memory and executable on the computer, the software program having a plurality of routines including: a routine for receiving the process test parameter sample; a routine for simulating a simulated fabrication process step which corresponds to the fabrication process step to generate a plurality of simulated fabrication process results; a routine for generating a simulated profile indicative of the simulated fabrication process results; and a routine for controlling the manufacturing monitoring system in response to the generated simulated profile.
Claim 10
Dependent Claim
24 words
A software program according to claim 7 further comprising: a Monte Carlo simulation routine for iteratively updating simulation results using a random seed value.
Claim 11
Dependent Claim
38 words
A software program according to claim 7 further comprising: a routine for formatting a plurality of process test parameter samples into a process data profile; and a routine for matching the process data profile to the simulated profile.
Claim 12
Dependent Claim
70 words
A software program according to claim 7 wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a subroutine for deriving an input parameter to the simulation from an actual fabrication process parameter, the input parameter being derived from a probability density function; and a subroutine for simulating an actual fabrication process, the actual fabrication process being modeled as a probability density function.
Claim 13
Dependent Claim
22 words
A software program according to claim 10, wherein the software program simulating routine is performed in parallel with the fabrication process step.
Claim 14
Dependent Claim
50 words
A software program according to claim 10, wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a subroutine for repeating a plurality of simulation steps, the repeated steps applying a varying random seed value that is varied using a Monte Carlo technique.
Claim 15
Dependent Claim
102 words
A software program according to claim 10, wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a simulation loop routine using single-step feedback in which a simulation step of a plurality of simulation steps uses input parameters that are supplied from actual in-line measured data and generates output data; a subroutine for matching output data generated by the simulation step against actual in-line measured data; and a subroutine for adjusting a probability density structure of the simulator after each simulator step so that the simulated data more closely matches the actual in-line measured data.
Claim 16
Dependent Claim
158 words
An executable program code encoded on a computer-usable medium having computable readable code embodied therein controlling a manufacturing monitoring system, the manufacturing monitoring system including a fabrication equipment for performing a fabrication process step applied to a workpiece, a test equipment for acquiring a sample of a process test parameter sensed from the workpiece, a computer coupled to the test equipment to receive the process test parameter sample and having a memory, and the software program loadable into the memory and executable on the computer, the software program having a plurality of routines including: a routine for receiving the process test parameter sample; a routine for simulating a simulated fabrication process step which corresponds to the fabrication process step to generate a plurality of simulated fabrication process results; a routine for generating a simulated profile indicative of the simulated fabrication process results; and a routine for controlling the manufacturing monitoring system in response to the generated simulated profile.
Claim 17
Dependent Claim
158 words
An executable program code encoded on a computer-usable medium having computable readable code embodied therein controlling a manufacturing monitoring system, the manufacturing monitoring system including a fabrication equipment for performing a fabrication process step applied to a workpiece, a test equipment for acquiring a sample of a process test parameter sensed from the workpiece, a computer coupled to the test equipment to receive the process test parameter sample and having a memory, and the software program loadable into the memory and executable on the computer, the software program having a plurality of routines including: a routine for receiving the process test parameter sample; a routine for simulating a simulated fabrication process step which corresponds to the fabrication process step to generate a plurality of simulated fabrication process results; a routine for generating a simulated profile indicative of the simulated fabrication process results; and a routine for controlling the manufacturing monitoring system in response to the generated simulated profile.
Claim 18
Dependent Claim
25 words
An executable program code according to claim 14 further comprising: a Monte Carlo simulation routine for iteratively updating simulation results using a random seed value.
Claim 19
Dependent Claim
39 words
An executable program code according to claim 14 further comprising: a routine for formatting a plurality of process test parameter samples into a process data profile; and a routine for matching the process data profile to the simulated profile.
Claim 20
Dependent Claim
71 words
An executable program code according to claim 14 wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a subroutine for deriving an input parameter to the simulation from an actual fabrication process parameter, the input parameter being derived from a probability density function; and a subroutine for simulating an actual fabrication process, the actual fabrication process being modeled as a probability density function.
Claim 21
Dependent Claim
23 words
An executable program code according to claim 17 wherein the software program simulating routine is performed in parallel with the fabrication process step.
Claim 22
Dependent Claim
51 words
An executable program code according to claim 17 wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a subroutine for repeating a plurality of simulation steps, the repeated steps applying a varying random seed value that is varied using a Monte Carlo technique.
Claim 23
Dependent Claim
103 words
An executable program code according to claim 17 wherein the software program simulating routine is a statistical simulation of a semiconductor fabrication process further comprising: a simulation loop routine using single-step feedback in which a simulation step of a plurality of simulation steps uses input parameters that are supplied from actual in-line measured data and generates output data; a subroutine for matching output data generated by the simulation step against actual in-line measured data; and a subroutine for adjusting a probability density structure of the simulator after each simulator step so that the simulated data more closely matches the actual in-line measured data.
References Cited (Backward Citations)
GB2126374A
Cited
US4827395A
Cited
US5115502A
Cited
JPS63174331A
Cited
US5111404A
Cited
US4901242A
Cited
US5105362A
Cited
JPH01131470A
Cited
US4887218A
Cited
US4937765A
Cited
US5495417A
Cited
US5365463A
Cited
US5301118A
Cited
JPH05267421A
Cited
US5418974A
Cited
JPH06338552A
Cited
WO1995031003A1
Cited
US5539652A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-02-16 | 2001-08-18 | 2002-02-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-02-16 | 2005-08-18 | 2006-02-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-02-16 | 2009-08-18 | 2010-02-17 | $7700.00 | Window Closed / Lapsed |