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US5703989A
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US
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Single-mode waveguide structure for optoelectronic integrated circuits and method of making same
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1995-12-29
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Granted: 1997-12-30
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Expires: 2015-12-29
Abstract
Abstract An optical waveguide for use in an optoelectronic integrated circuit and the associated method of manufacturing such a waveguide. The waveguide is formed by the successive layering of varied waveguide materials on a III-V semiconductor substrate, thereby producing a slab waveguide. The various layers within the slab waveguide are relatively thick, thereby producing a slab waveguide that is sized to be more compatible with an optical fiber and therefore more readily coupled to an optical fiber. The larger slab waveguide structure broadens the fundamental mode of the optical signal. However, multiple modes are also produced in the thicker slab waveguide that include higher order modes. A ridge structure is etched into the slab waveguide, wherein the width and height of the ridge structure are selected to impose lateral confinements on the higher order slab modes. The result is a waveguide that has a broadened fundamental mode yet is essentially single-mode. The resulting broadened fundamental mode is closer in symmetry to the mode of standard optical fibers, thereby enabling the waveguide to be more efficiently coupled to an optical fiber.
Inventors
- 👤 Mujibun Nisa Khan
- 👤 Jane Elisa Zucker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:24
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/136; G02B6/132; G02B2006/12035; G02B2006/12078; G02B2006/12083; G02B2006/12097
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
224 words
An optical waveguide, disposed on a substrate, comprising: a core layer having a first index of refraction; a first reflective high index cladding layer and a second reflective high index cladding layer bounding said core layer, wherein said core layer is interposed between said first reflective high index cladding layer and said second reflective high index cladding layer, said first reflective high index cladding layer and said second reflective high index cladding layer having a common second index of refraction that is greater than said first index of refraction; a first low index cladding layer and a second low index cladding layer bounding said first and second reflective high index cladding layer, wherein said first reflective high index cladding layer and said second reflective high index cladding layer are interposed between said first and second low index cladding layer, said first low index cladding layer and said second low index cladding layer having a common third index of refraction that is less than said second index of refraction; wherein said optical waveguide includes a ridge structure that contains said first low index cladding layer, said first reflective high index cladding layer and at least a portion of said core layer therein, said ridge structure being sized to impose lateral confinement for suppressing higher order slab modes and producing an essentially single-mode optical waveguide structure.
Claim 2
Dependent Claim
224 words
An optical waveguide, disposed on a substrate, comprising: a core layer having a first index of refraction; a first reflective high index cladding layer and a second reflective high index cladding layer bounding said core layer, wherein said core layer is interposed between said first reflective high index cladding layer and said second reflective high index cladding layer, said first reflective high index cladding layer and said second reflective high index cladding layer having a common second index of refraction that is greater than said first index of refraction; a first low index cladding layer and a second low index cladding layer bounding said first and second reflective high index cladding layer, wherein said first reflective high index cladding layer and said second reflective high index cladding layer are interposed between said first and second low index cladding layer, said first low index cladding layer and said second low index cladding layer having a common third index of refraction that is less than said second index of refraction; wherein said optical waveguide includes a ridge structure that contains said first low index cladding layer, said first reflective high index cladding layer and at least a portion of said core layer therein, said ridge structure being sized to impose lateral confinement for suppressing higher order slab modes and producing an essentially single-mode optical waveguide structure.
Claim 3
Dependent Claim
21 words
The waveguide according to claim 1, wherein said first index of refraction is substantially equivalent to said third index of refraction.
Claim 4
Dependent Claim
28 words
The waveguide according to claim 1, wherein said first reflective cladding layer and said second reflective high index cladding layer have a layer thickness that is substantially equivalent.
Claim 5
Dependent Claim
28 words
The waveguide according to claim 1, wherein said first low index cladding layer and said second low index cladding layer have a layer thickness that is substantially equivalent.
Claim 6
Dependent Claim
35 words
The waveguide according to claim 1, wherein said core layer is symmetrically clad first by said first and second reflective high index cladding layer and then by said first and second low index cladding layer.
Claim 7
Dependent Claim
14 words
The waveguide according to claim 1, wherein said core layer includes multiple BRAQWET repeats.
Claim 8
Dependent Claim
24 words
The waveguide according to claim 1, wherein said first reflective high index cladding layer and said second reflective high index cladding layer contain InGaAlAs.
Claim 9
Dependent Claim
11 words
The waveguide according to claim 1, wherein said substrate includes n-InP.
Claim 10
Dependent Claim
28 words
The waveguide according to claim 1, wherein said first low index cladding layer and said second low index cladding layer are superlattice layers that contain InAlAs and InGaAlAs.
Claim 11
Dependent Claim
22 words
The waveguide according to claim 1, wherein said ridge structure has a width of approximately 3μm and a height of approximately 1.3μm.
Claim 12
Independent Claim
178 words
A method of manufacturing an optical waveguide on a substrate, comprising the steps of: depositing a first low index cladding layer on said substrate, having a first index of refraction; depositing a first reflective high index cladding layer on said first low index cladding layer, having a second index of refraction; depositing a core layer on said first reflective high index cladding layer, having a third index of refraction; depositing a second reflective high index cladding layer on said core layer, having an index of refraction substantially equivalent to said first reflective high index cladding layer; depositing a second low index cladding layer on said second reflective high index cladding layer, having an index of refraction substantially equivalent to said first low index cladding layer; and selectively etching said second low index cladding layer, said second reflective high index cladding layer and at least a portion of said core layer to produce a ridge structure, said ridge structure being sized to impose lateral confinement for suppressing higher order slab modes and producing an essentially single-mode optical waveguide structure.
Claim 13
Independent Claim
178 words
A method of manufacturing an optical waveguide on a substrate, comprising the steps of: depositing a first low index cladding layer on said substrate, having a first index of refraction; depositing a first reflective high index cladding layer on said first low index cladding layer, having a second index of refraction; depositing a core layer on said first reflective high index cladding layer, having a third index of refraction; depositing a second reflective high index cladding layer on said core layer, having an index of refraction substantially equivalent to said first reflective high index cladding layer; depositing a second low index cladding layer on said second reflective high index cladding layer, having an index of refraction substantially equivalent to said first low index cladding layer; and selectively etching said second low index cladding layer, said second reflective high index cladding layer and at least a portion of said core layer to produce a ridge structure, said ridge structure being sized to impose lateral confinement for suppressing higher order slab modes and producing an essentially single-mode optical waveguide structure.
Claim 14
Dependent Claim
21 words
The method according to claim 11, wherein said first index of refraction is substantially equivalent to said third index of refraction.
Claim 15
Dependent Claim
30 words
The method according to claim 11, wherein said first reflective high index cladding layer and said second reflective high index cladding layer have a layer thickness that is substantially equivalent.
Claim 16
Dependent Claim
28 words
The method according to claim 11, wherein said first low index cladding layer and said second low index cladding layer have a layer thickness that is substantially equivalent.
Claim 17
Dependent Claim
21 words
The method according to claim 11, said step of depositing said core layer includes depositing multiple BRAQWET repeats in successive layers.
Claim 18
Dependent Claim
28 words
The method according to claim 11, wherein said first reflective high index cladding layer and said second reflective high index cladding layer are deposited at substantially equal thicknesses.
Claim 19
Dependent Claim
26 words
The method according to claim 11, wherein said first low index cladding layer and said second low index cladding layer are deposited at substantially equal thicknesses.
Claim 20
Independent Claim
104 words
A method of manufacturing an integrated waveguide structure capable of being efficiently coupled to a fiber optic of a predetermined size, comprising the steps of: forming a slab waveguide containing a plurality of layers, wherein said slab waveguide produces multiple slab modes that include higher order slab modes; and forming a ridge structure in said slab waveguide, wherein said ridge structure has a predetermined height and width that impose lateral confinement to said multiple slab modes, thereby suppressing said higher order slab modes and producing an essentially single-mode waveguide structure having a size that generally corresponds to the predetermined size of the fiber optic.
Claim 21
Independent Claim
104 words
A method of manufacturing an integrated waveguide structure capable of being efficiently coupled to a fiber optic of a predetermined size, comprising the steps of: forming a slab waveguide containing a plurality of layers, wherein said slab waveguide produces multiple slab modes that include higher order slab modes; and forming a ridge structure in said slab waveguide, wherein said ridge structure has a predetermined height and width that impose lateral confinement to said multiple slab modes, thereby suppressing said higher order slab modes and producing an essentially single-mode waveguide structure having a size that generally corresponds to the predetermined size of the fiber optic.
Claim 22
Dependent Claim
125 words
The method according to claim 18, wherein said step of forming a ridge structure includes the substeps of: depositing a first low index cladding layer on said substrate, having a first index of refraction; depositing a first high index cladding layer on said first low index cladding layer, having a second index of refraction; depositing a core layer on said first high index cladding layer, having a third index of refraction; depositing a second high index cladding layer on said core layer, having an index of refraction substantially equivalent to said first high index cladding layer; and depositing a second low index cladding layer on said second high index cladding layer having an index of refraction substantially equivalent to said first low index cladding layer.
Claim 23
Dependent Claim
41 words
The method according to claim 18, wherein said step of forming a ridge structure in said slab waveguide includes etching said second low index cladding layer, said second high index cladding layer and at least a portion of said core layer.
Claim 24
Dependent Claim
93 words
An optical waveguide, comprising: a core layer; a first reflective cladding layer and a second reflective cladding layer bounding said core layer, wherein said first reflective cladding layer and said second reflective cladding layer have indices of refraction greater than that of said core layer; wherein said optical waveguide includes a ridge structure that contains said first reflective cladding layer and at least a portion of said core layer therein, said ridge structure being sized to impose lateral confinement for suppressing higher order slab modes and producing an essentially single-mode optical waveguide structure.
Claim 25
Dependent Claim
93 words
An optical waveguide, comprising: a core layer; a first reflective cladding layer and a second reflective cladding layer bounding said core layer, wherein said first reflective cladding layer and said second reflective cladding layer have indices of refraction greater than that of said core layer; wherein said optical waveguide includes a ridge structure that contains said first reflective cladding layer and at least a portion of said core layer therein, said ridge structure being sized to impose lateral confinement for suppressing higher order slab modes and producing an essentially single-mode optical waveguide structure.
Claim 26
Dependent Claim
56 words
The waveguide according to claim 21, further including at least one subsequent cladding layer bounding said first reflective cladding layer and said second reflective cladding layer, wherein said at least one subsequent cladding layers has an index of refraction that is lower than those of said first reflective cladding layer and said second reflective cladding layer.
Claim 27
Dependent Claim
25 words
The waveguide according to claim 22, wherein said core layer is symmetrically clad between said first reflective cladding layer and said second reflective cladding layer.
Claim 28
Dependent Claim
26 words
The waveguide according to claim 23, wherein said first reflective cladding layer and said second reflective cladding layer have indices of refraction that are substantially equal.
References Cited (Backward Citations)
US5206925A
Cited
US5078516A
Cited
US5237639A
Cited
US5165105A
Cited
US5278926A
Cited
US5311539A
Cited
US5303319A
Cited
US5319727A
Cited
US5468689A
Cited
US5490226A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-29 | 2001-06-30 | 2001-12-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-29 | 2005-06-30 | 2005-12-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-29 | 2009-06-30 | 2009-12-30 | $7700.00 | Window Closed / Lapsed |