US5701174A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Template mask for assisting in optical inspection of oxidation induced stacking fault (OISF)
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-07-15
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Granted: 1997-12-23
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Expires: 2016-07-15
Abstract
Abstract A method for optically inspecting a semiconductor substrate for defects such as oxidation induced stacking faults, and a template mask which assists in practicing the optical inspection method. There is first provided a semiconductor substrate which has a surface to be inspected for defects such as oxidation induced stacking faults. Aligned then upon the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults is a template mask. The template mask has a minimum of one aperture which leaves exposed a portion of the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults. Finally, there is inspected optically the portion of the surface of the semiconductor substrate exposed through the aperture.
Inventors
- 👤 Ching Hua Yeh
- 👤 Shun-Long Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:06
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/94; G01N21/95; G01N21/9501
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
119 words
A method for optically inspecting a semiconductor substrate for defects such as oxidation induced stacking faults comprising: providing a semiconductor substrate, the semiconductor substrate having a surface to be inspected for defects such as oxidation induced stacking faults; aligning the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults a template mask, the template mask having a minimum of one aperture which leaves exposed a portion of the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults; and inspecting optically the portion of the surface of the semiconductor substrate exposed through the aperture, while the semiconductor substrate remains fixed with respect to the template mask.
Claim 2
Independent Claim
119 words
A method for optically inspecting a semiconductor substrate for defects such as oxidation induced stacking faults comprising: providing a semiconductor substrate, the semiconductor substrate having a surface to be inspected for defects such as oxidation induced stacking faults; aligning the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults a template mask, the template mask having a minimum of one aperture which leaves exposed a portion of the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults; and inspecting optically the portion of the surface of the semiconductor substrate exposed through the aperture, while the semiconductor substrate remains fixed with respect to the template mask.
Claim 3
Dependent Claim
18 words
The method of claim 1 where the template mask is from about 0.3 to about 1 millimeters thick.
Claim 4
Dependent Claim
14 words
The method of claim 1 wherein the template mask is formed from stainless steel.
Claim 5
Dependent Claim
41 words
The method of claim 1 wherein the template mask has a diameter designed to align upon a six inch diameter semiconductor substrate placed beneath the template mask, the six inch diameter semiconductor substrate having a flat edge of about 57.5 min.
Claim 6
Dependent Claim
174 words
The method of claim 4 wherein the template mask has a series of nine circular apertures formed therein wherein: a first one of the nine circular apertures exposes approximately the center of the six inch diameter semiconductor substrate placed beneath the template mask; a first group of four additional circular apertures exposes a first group of four other portions of the six inch diameter semiconductor substrate whose centers are located about 32.5 mm from the edge of the six inch diameter semiconductor substrate placed beneath the template mask; and a second group of four additional circular apertures exposes a second group of four other portions of the six inch diameter semiconductor substrate whose centers are located about 10 mm from the edge of the six inch diameter semiconductor substrate placed beneath the template mask where the series of nine circular apertures forms an X where both portions of the X are perpendicular to each other and where the flat edge of the semiconductor substrate is centered between two adjoining terminal portions of the X.
Claim 7
Dependent Claim
21 words
The method of claim 5 wherein each aperture within the series of nine apertures has a diameter of about 5 mm.
Claim 8
Dependent Claim
40 words
The method of claim 1 wherein the template mask has a diameter designed to align upon an eight inch diameter semiconductor substrate placed beneath the template mask, the eight inch diameter semiconductor substrate having a notch formed within its perimeter.
Claim 9
Dependent Claim
94 words
The method of claim 7 wherein the template mask has a single aperture formed therein, the single aperture formed in an X shape where the two portions of the X shape are perpendicular to each other, each of the two portions of the X shape exposing a portion of the eight inch diameter semiconductor substrate placed beneath the template mask, the portion of the eight inch diameter semiconductor substrate ending about 7.5 mm from the edge of the semiconductor substrate, the notch being centered between an adjoining pair of end portions of the X.
Claim 10
Dependent Claim
20 words
The method of claim 8 wherein each of the portions of the X has a width of about 10 mm.
Claim 11
Dependent Claim
26 words
The method of claim 1 wherein the optical inspection is undertaken employing an optical microscope at a magnification of from about 20 to about 50 times.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-22 | 2001-06-23 | 2001-12-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-22 | 2005-06-23 | 2005-12-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-22 | 2009-06-23 | 2009-12-23 | $7700.00 | Window Closed / Lapsed |