US5585918A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Foreign particle inspecting system
Assignee: Canon Inc
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Filing: 1995-06-26
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Granted: 1996-12-17
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Expires: 2015-06-26
Abstract
Abstract An inspecting system includes a light source, an irradiating optical system for irradiating a surface of an object such as a reticle or photomask with light from the light source, a detection optical system for detecting scattered light from the surface of the object, and a light blocking device provided substantially parallel to the surface of the object, the light blocking device having a first light transmitting portion for passing light coming from the light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward the detection optical system.
Inventors
- 👤 Seiji Takeuchi
- 👤 Kyoichi Miyazaki
- 👤 Toshihiko Tsuji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:41
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604; G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/94; G03; G03F; G03F1/00; G03F1/68; G03F1/82; G03F1/84; G01N21/95; G01N21/956; G01N2021/95676
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
121 words
An inspecting system, comprising: a light source; an irradiating optical system for irradiating a surface of an object with light from said light source; a detection optical system for detecting scattered light from the surface of the object; and light blocking means provided substantially parallel to the surface of the object, said light blocking means having a first light transmitting portion for passing light coming from said light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward said detection optical system, said light blocking means having a surface, facing the surface of the object, having been processed by a reflection reducing treatment.
Claim 2
Dependent Claim
121 words
An inspecting system, comprising: a light source; an irradiating optical system for irradiating a surface of an object with light from said light source; a detection optical system for detecting scattered light from the surface of the object; and light blocking means provided substantially parallel to the surface of the object, said light blocking means having a first light transmitting portion for passing light coming from said light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward said detection optical system, said light blocking means having a surface, facing the surface of the object, having been processed by a reflection reducing treatment.
Claim 3
Dependent Claim
25 words
A system according to claim 1, wherein said irradiating optical system comprises a scanning optical system for scanning the surface of the object with light.
Claim 4
Dependent Claim
35 words
A system according to claim 1, wherein said light blocking means comprises a light blocking plate and wherein said first and second light transmitting portions each comprises an opening formed in said light blocking plate.
Claim 5
Dependent Claim
27 words
A system according to claim 3, wherein said light blocking plate has a surface, facing the surface of the object, having been treated by an anti-reflection treatment.
Claim 6
Dependent Claim
113 words
An inspecting system, comprising: a light source; an irradiating optical system for irradiating a surface of an object with light from said light source; a detection optical system for detecting scattered light from the surface of the object; light blocking means provided substantially parallel to the surface of the object, said light blocking means having a first light transmitting portion for passing light coming from said light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward said detection optical system; and exposure means for exposing the object having been inspected by said inspecting system.
Claim 7
Dependent Claim
113 words
An inspecting system, comprising: a light source; an irradiating optical system for irradiating a surface of an object with light from said light source; a detection optical system for detecting scattered light from the surface of the object; light blocking means provided substantially parallel to the surface of the object, said light blocking means having a first light transmitting portion for passing light coming from said light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward said detection optical system; and exposure means for exposing the object having been inspected by said inspecting system.
Claim 8
Dependent Claim
113 words
An inspecting system, comprising: a light source; an irradiating optical system for irradiating a surface of an object with light from said light source; a detection optical system for detecting scattered light from the surface of the object; light blocking means provided substantially parallel to the surface of the object, said light blocking means having a first light transmitting portion for passing light coming from said light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward said detection optical system; and cleaning means for cleaning the object having been inspected by said inspecting system.
Claim 9
Dependent Claim
113 words
An inspecting system, comprising: a light source; an irradiating optical system for irradiating a surface of an object with light from said light source; a detection optical system for detecting scattered light from the surface of the object; light blocking means provided substantially parallel to the surface of the object, said light blocking means having a first light transmitting portion for passing light coming from said light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward said detection optical system; and cleaning means for cleaning the object having been inspected by said inspecting system.
Claim 10
Dependent Claim
23 words
A system according to claim 5, wherein the object comprises one of an original having a pattern to be transferred and a wafer.
Claim 11
Dependent Claim
23 words
A system according to claim 6, wherein the object comprises one of an original having a pattern to be transferred and a wafer.
Claim 12
Dependent Claim
32 words
A system according to claim 3, wherein said first light transmitting portion and said second light transmitting portion are defined by one and the same opening formed in said light blocking plate.
Claim 13
Dependent Claim
29 words
A system according to claim 3, wherein said first light transmitting portion and said second light transmitting portion are defined by different openings formed in said light blocking plate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-17 | 2000-06-17 | 2000-12-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-17 | 2004-06-17 | 2004-12-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-17 | 2008-06-17 | 2008-12-17 | $7700.00 | Window Closed / Lapsed |