US5270794A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fine structure evaluation apparatus and method
Assignee: Canon Inc
•
Filing: 1992-06-29
•
Granted: 1993-12-14
•
Expires: 2012-06-29
Abstract
Abstract In an apparatus and a method for evaluating the pattern structure of a fine structure, the presence of foreign particles, or the like, an object having a fine structure is scanned with a light beam, or the spot size of the light beam projected onto the object is changed, and extreme values in light scattered by the object are detected. The fine structure is evaluated according to changes in the positions, the number, the intensities or the like of the extreme values, that is, according to distribution characteristics of the extreme values caused by the scanning or the changes in the spot size of the light beam.
Inventors
- 👤 Toshihiko Tsuji
- 👤 Kenji Saito
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 18:37
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/9501; G01B; G01B11/00; G01B11/02; G01B11/028; G01N21/956; G01N21/95607; G01N2021/95676; G01N21/95623
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
119 words
An apparatus for evaluating a fine structure of an object to be inspected, said apparatus comprising: illumination means for irradiating the object with a light beam; irradiating state changing means for changing an irradiating state of the light beam irradiating the object by said illumination means; detection means for detecting those portions having extreme intensity values of light scattered by the illuminated object, and for producing a detection output; and calculation means for receiving the detection output from said detection means, and for evaluating the fine structure of the object according to changes in distribution characteristics of those portions having the extreme intensity values while changing the irradiating state of the light beam by said irradiating state changing means.
Claim 2
Independent Claim
119 words
An apparatus for evaluating a fine structure of an object to be inspected, said apparatus comprising: illumination means for irradiating the object with a light beam; irradiating state changing means for changing an irradiating state of the light beam irradiating the object by said illumination means; detection means for detecting those portions having extreme intensity values of light scattered by the illuminated object, and for producing a detection output; and calculation means for receiving the detection output from said detection means, and for evaluating the fine structure of the object according to changes in distribution characteristics of those portions having the extreme intensity values while changing the irradiating state of the light beam by said irradiating state changing means.
Claim 3
Dependent Claim
35 words
An apparatus according to claim 1, wherein said irradiating state changing means comprises means for scanning the object with the light beam from said illumination means to change the irradiating state of the light beam.
Claim 4
Dependent Claim
35 words
An apparatus according to claim 1, wherein said irradiating state changing means comprises means for changing the spot size of the light beam on the object to change the irradiating state of the light beam.
Claim 5
Dependent Claim
48 words
An apparatus according to claim 1, wherein said calculation means comprises means for evaluating the fine structure according to changes in at least one of the positions of the portions, the number of the portions and the intensity of scattered light at the portions having the extreme values.
Claim 6
Dependent Claim
24 words
An apparatus according to claim 1, wherein said calculation means comprises means for evaluating an outer shape of the fine structure of the object.
Claim 7
Dependent Claim
48 words
An apparatus according to claim 1, wherein said calculation means comprises means for detecting position information of the fine structure, and for producing a position signal, and wherein said apparatus further comprises positioning means for positioning the object according to the position signal produced by said calculation means.
Claim 8
Dependent Claim
27 words
An apparatus according to claim 1, wherein said calculation means comprises means for checking the presence of foreign particles on the object to evaluate the fine structure.
Claim 9
Independent Claim
79 words
A method of evaluating a fine structure of an object to be inspected, said method comprising the steps of: irradiating a light beam onto the object; changing an irradiating state of the light beam; detecting those portions of light scattered by the irradiated object having extreme intensity values; and evaluating the fine structure of the object according to changes in distribution characteristics of those detected portions having the extreme values, while changing the irradiating state of the light beam.
Claim 10
Independent Claim
79 words
A method of evaluating a fine structure of an object to be inspected, said method comprising the steps of: irradiating a light beam onto the object; changing an irradiating state of the light beam; detecting those portions of light scattered by the irradiated object having extreme intensity values; and evaluating the fine structure of the object according to changes in distribution characteristics of those detected portions having the extreme values, while changing the irradiating state of the light beam.
Claim 11
Dependent Claim
18 words
A method according to claim 8, wherein said changing step comprises scanning the object with the light beam.
Claim 12
Dependent Claim
22 words
A method according to claim 8, wherein said changing step comprises changing the spot size of the light beam on the object.
Claim 13
Dependent Claim
43 words
A method according to claim 8, further comprising performing said evaluating step according to changes in at least one of the positions of the portions, the number of the portions and the intensity of scattered light at the portions having the extreme values.
Claim 14
Dependent Claim
23 words
A method according to claim 8, wherein an outer shape of the fine structure is evaluated as the evaluation of the fine structure.
Claim 15
Dependent Claim
39 words
A method according to claim 8, wherein said evaluating step comprises detecting position information of the fine structure on the object, and further comprising positioning the object according to the detection of the position information in said detecting step.
Claim 16
Dependent Claim
21 words
A method according to claim 8, wherein said evaluating step comprises checking for the presence of foreign particles on the object.
Claim 17
Independent Claim
127 words
An apparatus for evaluating a fine structure of an object to be inspected, said apparatus comprising: a light source for emitting a light beam; an illuminating optical system for receiving the light beam emitted from said light source and for irradiating a light beam a predetermined position of the object, said illuminating optical system being capable of changing an irradiating state of the light beam onto the object; a photoelectric transducer for detecting those portions of light scattered by the irradiated object having extreme intensity values; and a signal processing system for evaluating the fine structure of the object according to changes in distribution characteristics of those detected portions having the extreme values, while changing the irradiating state of the light beam by said illuminating optical system.
Claim 18
Independent Claim
127 words
An apparatus for evaluating a fine structure of an object to be inspected, said apparatus comprising: a light source for emitting a light beam; an illuminating optical system for receiving the light beam emitted from said light source and for irradiating a light beam a predetermined position of the object, said illuminating optical system being capable of changing an irradiating state of the light beam onto the object; a photoelectric transducer for detecting those portions of light scattered by the irradiated object having extreme intensity values; and a signal processing system for evaluating the fine structure of the object according to changes in distribution characteristics of those detected portions having the extreme values, while changing the irradiating state of the light beam by said illuminating optical system.
Claim 19
Dependent Claim
27 words
An apparatus according to claim 15, wherein said illuminating optical system scans the object with the light beam to change the irradiating state of the light beam.
Claim 20
Dependent Claim
31 words
An apparatus according to claim 15, wherein said illuminating optical system changes the spot size of the light beam on the object to change the irradiating state of the light beam.
Claim 21
Dependent Claim
46 words
An apparatus according to claim 15, wherein said signal processing system evaluates the fine structure according to changes in at least one of the positions of the portions, the number of the portions and the intensity of scattered light at the portions having the extreme values.
Claim 22
Dependent Claim
19 words
An apparatus according to claim 15, wherein said signal processing system evaluates an outer shape of the fine structure.
Claim 23
Dependent Claim
47 words
An apparatus according to claim 15, wherein said signal processing system detects position information of the fine structure and produces a position signal, and wherein said apparatus further comprises a driving unit for positioning the object according to the position signal produced by said signal processing system.
Claim 24
Dependent Claim
26 words
An apparatus according to claim 15, wherein said signal processing system checks for the presence of foreign particles on the object to evaluate the fine structure.
References Cited (Backward Citations)
US3782834A
Cited
US4859062A
Cited
FR2508160A1
Cited
US4479717A
Cited
US4579453A
Cited
US4728196A
Cited
GB2144537A
Cited
US4632557A
Cited
JPS62118206A
Cited
US4827141A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-12-13 | 1997-06-14 | 1997-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-12-13 | 2001-06-14 | 2001-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-12-13 | 2005-06-14 | 2005-12-14 | $7700.00 | Window Closed / Lapsed |