US5162867A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface condition inspection method and apparatus using image transfer
Assignee: Canon Inc
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Filing: 1991-01-24
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Granted: 1992-11-10
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Expires: 2011-01-24
Abstract
Abstract An optical unit for inspecting the state of latent images or photochromic images on a wafer is mounted on an exposure apparatus. Before actually printing images on a product wafer, a reticle pattern is printed on the wafer using a wafer on which a resist for development is coated or a photochromic film for forming photochromic images is formed. Latent images or photochromic images of the reticle pattern thus obtained are inspected by the inspection unit. According to the result of inspection, it is determined whether or not any foreign particle of a level that would affect printing is present on the reticle.
Inventors
- 👤 Michio Kohno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:57
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/94
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
71 words
A method for inspecting a surface condition of an original having a pattern, comprising the steps of: illuminating the original; transferring images of the pattern on the original to a transfer member disposed at a position for pattern transfer; and inspecting the images transferred to the transfer member to determine the surface condition of the original, said image inspection being performed after said image transfer step without passing through developing processing.
Claim 2
Independent Claim
71 words
A method for inspecting a surface condition of an original having a pattern, comprising the steps of: illuminating the original; transferring images of the pattern on the original to a transfer member disposed at a position for pattern transfer; and inspecting the images transferred to the transfer member to determine the surface condition of the original, said image inspection being performed after said image transfer step without passing through developing processing.
Claim 3
Dependent Claim
39 words
A method according to claim 1, wherein the transfer member includes a photosensitive material, and wherein said inspecting step includes inspection of undeveloped images formed on the photosensitive material by the illumination of the original during said transferring step.
Claim 4
Dependent Claim
39 words
A method according to claim 1, wherein the transfer member includes a photochromic film, and wherein said inspecting step includes inspection of photochromic images formed on the photochromic film by the illumination of the original during said transferring step.
Claim 5
Dependent Claim
26 words
A method according to claim 1, wherein negative images of the pattern of the original are formed on the transfer member by said image transfer step.
Claim 6
Dependent Claim
24 words
A method according to claim 1, wherein said image inspection is performed by comparing the images with previously stored pattern information of the original.
Claim 7
Dependent Claim
41 words
A method according to claim 1, wherein said image inspection is performed by comparing a plurality of portions of the images corresponding to a plurality of identical pattern portions in patterns on one or a plurality of originals with one another.
Claim 8
Dependent Claim
41 words
A method according to claim 1, wherein said image inspection comprises the steps of illuminating light on the images, detecting light scattered from the images illuminated by the light, and inspecting image information obtained by said detection of the scattered light.
Claim 9
Dependent Claim
15 words
A method according to claim 1, wherein said illumination is performed using excimer laser light.
Claim 10
Dependent Claim
18 words
A method according to claim 1, wherein said illumination is performed using light from an extra-high-pressure mercury-vapor lamp.
Claim 11
Dependent Claim
15 words
A method according to claim 1, wherein said transfer is performed through a projection system.
Claim 12
Independent Claim
73 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: image detection means for detecting undeveloped images of the pattern of the original formed on a photosensitive material on a transfer member by the transfer apparatus; and surface condition inspection means for inspecting the surface condition of the original according to image detection by said image detection means.
Claim 13
Independent Claim
73 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: image detection means for detecting undeveloped images of the pattern of the original formed on a photosensitive material on a transfer member by the transfer apparatus; and surface condition inspection means for inspecting the surface condition of the original according to image detection by said image detection means.
Claim 14
Independent Claim
76 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: photochromic image detection means for detecting photochromic images of the pattern of the original formed on a transfer member having a photochromic film by said transfer apparatus; and surface condition inspection means for inspecting the surface condition of the original according to photochromic image detection by said photochromic image detection means.
Claim 15
Independent Claim
76 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: photochromic image detection means for detecting photochromic images of the pattern of the original formed on a transfer member having a photochromic film by said transfer apparatus; and surface condition inspection means for inspecting the surface condition of the original according to photochromic image detection by said photochromic image detection means.
Claim 16
Dependent Claim
82 words
A transfer apparatus for transferring a pattern on an original, comprising: exposure means for performing exposure in order to transfer the pattern of the original to a transfer member, undeveloped images of the pattern being capable of being formed by exposure by said exposure on a photosensitive material on the transfer member; and image inspection means for inspecting the undeveloped images formed on the photosensitive material, a surface condition of the original being inspected by image inspection by said image inspection means.
Claim 17
Dependent Claim
82 words
A transfer apparatus for transferring a pattern on an original, comprising: exposure means for performing exposure in order to transfer the pattern of the original to a transfer member, undeveloped images of the pattern being capable of being formed by exposure by said exposure on a photosensitive material on the transfer member; and image inspection means for inspecting the undeveloped images formed on the photosensitive material, a surface condition of the original being inspected by image inspection by said image inspection means.
Claim 18
Dependent Claim
32 words
A transfer apparatus according to claim 13, further comprising a projection system for projecting the pattern of the original illuminated by said exposure means onto the photosensitive material on the transfer member.
Claim 19
Dependent Claim
19 words
A transfer apparatus according to claim 14, wherein said exposure means includes an excimer laser as a light source.
Claim 20
Dependent Claim
25 words
A transfer apparatus according to claim 13, wherein said image inspection means discrimination foreign particles on the original from foreign particles on the photosensitive material.
Claim 21
Dependent Claim
89 words
A transfer apparatus for transferring a pattern of an original, comprising: exposure means for performing exposure in order to transfer the pattern of the original to a transfer member, photochromic image of the pattern being capable of being formed on a photochromic film on a member having the photochromic film by exposure by said exposure means; and photochromic image inspection means for inspecting the photochromic images formed on the photochromic film, a surface condition of the original being inspected by photochromic image inspection by said photochromic image inspection means.
Claim 22
Dependent Claim
89 words
A transfer apparatus for transferring a pattern of an original, comprising: exposure means for performing exposure in order to transfer the pattern of the original to a transfer member, photochromic image of the pattern being capable of being formed on a photochromic film on a member having the photochromic film by exposure by said exposure means; and photochromic image inspection means for inspecting the photochromic images formed on the photochromic film, a surface condition of the original being inspected by photochromic image inspection by said photochromic image inspection means.
Claim 23
Dependent Claim
28 words
A transfer apparatus according to claim 17, further comprising a projection system for projecting the pattern of the original illuminated by said exposure means onto the transfer member.
Claim 24
Dependent Claim
19 words
A transfer apparatus according to claim 18, wherein said exposure means includes an excimer laser as a light source.
Claim 25
Dependent Claim
30 words
A transfer apparatus according to claim 17, wherein said photochromic image inspection means has a function to discriminate foreign particles on the original from foreign particles on the photochromic film.
Claim 26
Independent Claim
82 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: a photosensor for detecting undeveloped images of the pattern of the original formed on a photosensitive material on a transfer member by the transfer apparatus, said photosensor generating output on the basis of detection of the undeveloped images; and a processing system for inspecting the surface condition of the original according to the output from said photosensor.
Claim 27
Independent Claim
82 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: a photosensor for detecting undeveloped images of the pattern of the original formed on a photosensitive material on a transfer member by the transfer apparatus, said photosensor generating output on the basis of detection of the undeveloped images; and a processing system for inspecting the surface condition of the original according to the output from said photosensor.
Claim 28
Dependent Claim
23 words
An apparatus according to claim 21, wherein said processing system processes the output from said photosensor to detect foreign particles on the original.
Claim 29
Independent Claim
82 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: a photosensor for detecting photochromic images of the pattern of the original formed on a transfer member having a photochromic film by the transfer apparatus, said photosensor generating output on the basis of detection of the photochromic images; and a processing system for inspecting the surface condition of the original according to the output from said photosensor.
Claim 30
Independent Claim
82 words
An apparatus for inspecting a surface condition of an original having a pattern to be transferred using a transfer apparatus, said apparatus for inspecting comprising: a photosensor for detecting photochromic images of the pattern of the original formed on a transfer member having a photochromic film by the transfer apparatus, said photosensor generating output on the basis of detection of the photochromic images; and a processing system for inspecting the surface condition of the original according to the output from said photosensor.
Claim 31
Dependent Claim
23 words
An apparatus according to claim 23, wherein said processing system processes the output from said photosensor to detect foreign particles on the original.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-10 | 1996-05-11 | 1996-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-10 | 2000-05-11 | 2000-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-10 | 2004-05-11 | 2004-11-10 | $7700.00 | Window Closed / Lapsed |