US5377002A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for surface inspections
Assignee: Tencor Instruments Inc
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Filing: 1992-07-14
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Granted: 1994-12-27
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Expires: 2012-07-14
Abstract
Abstract This apparatus permits the non-destructive examination of entire surfaces for defects and contamination, and can detect microscopically small dot-shaped and linear defects and extremely fine macroscopic non-homogeneous areas. For this purpose, an adjustable lens system (5) is placed in the optical path between light source (2) and objective (9) which produces various intermediate images (31). A first cigar-shaped intermediate image is used for the first scan of the whole of the surface at a relatively large feed offset, and a second dot-shaped intermediate image is used for a second scan of partial areas of the surface at a small feed offset. A dark-field stop assembly (18) with an adjustable dark-field deflection system (8) is placed in the optical path between the lens system (5) and the objective (9), which projects the light beam (1) after deflection exactly centered at right angles through the objective (9) upon the surface of the object (10). The light reflected by the surface (10) and collected by the objective (9) is projected to a photo detector. An electronic analysis system (21) breaks down the amplified output signals from the photo detector (19) into measured values due to dot-shaped, linear, and planiform defects. The electronic analysis system (21) is connected via a computer unit (22) to peripheral equipment (23, 24, 25) which permits the representation of all the measured values obtained in a measuring cycle.
Inventors
- 👤 Comas Malin
- 👤 Edgar F. Steigmeier
- 👤 Thomas Nesensohn
- 👤 Harry L. Sawatzki
- 👤 Heinrich Auderset
- 👤 Gert Schmid
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:29
CPC Classifications
G; G01; G01M; G01M11/00; G01M11/02; G01M11/0242; G01M11/0278; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/9501; G01N21/8806; G01N2021/8822; G01N21/8851; G01N2021/8854; G01N2021/8867; G01N21/89; G01N21/8901; G01N2021/8905; G01N2021/8907; G01N21/93; G01N21/9503; G01N2201/00; G01N2201/10; G01N2201/104; G01N2201/1045
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
431 words
An apparatus for making high-sensitivity measurements of dot-shaped, linear, and planiform surface defects, comprising: a light source producing a light beam; a supporting disk on which an object having a surface to be inspected or examined is placed with the surface exposed; an objective passing the light beam from the source perpendicularly onto the surface of the object on the supporting disk; drive means connected to the supporting disk for moving the disk and the object thereon rotationally and translationally relative to the light beam so as to permit the light beam to scan the surface of the object along a spiral path; a photodetector positioned to receive light reflected by the surface of the object and collected by the objective and having an output providing a signal representative of the reflected light received; adjustable lens system means positioned on the optical path of the light beam between the light source and the objective for producing a first intermediate image of selected size and shape for a first scan of the surface of the object and a second intermediate image of selected size and shape for a second scan of the surface of the object; said drive means also being adjustable for changing the translational movement creating the spiral path and correspondingly changing the offset of each spiral forming the path in accordance with the selected one of the intermediate images used for a scan; a dark-field stop assembly positioned in the optical path of the light beam between the lens system means and the objective and having an adjustable dark-field deflection system whereby the light beam after deflection is centered exactly through the objective and at right angles onto the surface of the object, a confocal diaphragm placed before the photodetector to receive the light reflected by the surface of the object and collected by the objective, vignetting optics positioned along an image forming optical axis between said dark field stop assembly and said confocal diaphragm, said vignetting optics located to selectably introduce an optical asymmetry into said image forming optical axis to allow the apparatus to distinguish between the surface defects, electronic analysis means and a computer unit connected to receive output signals from the photo detector and for breaking down the output signal from the photo detector into measured values produced by dot-shaped, linear, and planiform defects in the surface of the object under inspection, and means for determining the effective scanning position of the light beam on the object surface at any time connected to the computer unit to associate the scanning positions with the measured values.
Claim 2
Independent Claim
431 words
An apparatus for making high-sensitivity measurements of dot-shaped, linear, and planiform surface defects, comprising: a light source producing a light beam; a supporting disk on which an object having a surface to be inspected or examined is placed with the surface exposed; an objective passing the light beam from the source perpendicularly onto the surface of the object on the supporting disk; drive means connected to the supporting disk for moving the disk and the object thereon rotationally and translationally relative to the light beam so as to permit the light beam to scan the surface of the object along a spiral path; a photodetector positioned to receive light reflected by the surface of the object and collected by the objective and having an output providing a signal representative of the reflected light received; adjustable lens system means positioned on the optical path of the light beam between the light source and the objective for producing a first intermediate image of selected size and shape for a first scan of the surface of the object and a second intermediate image of selected size and shape for a second scan of the surface of the object; said drive means also being adjustable for changing the translational movement creating the spiral path and correspondingly changing the offset of each spiral forming the path in accordance with the selected one of the intermediate images used for a scan; a dark-field stop assembly positioned in the optical path of the light beam between the lens system means and the objective and having an adjustable dark-field deflection system whereby the light beam after deflection is centered exactly through the objective and at right angles onto the surface of the object, a confocal diaphragm placed before the photodetector to receive the light reflected by the surface of the object and collected by the objective, vignetting optics positioned along an image forming optical axis between said dark field stop assembly and said confocal diaphragm, said vignetting optics located to selectably introduce an optical asymmetry into said image forming optical axis to allow the apparatus to distinguish between the surface defects, electronic analysis means and a computer unit connected to receive output signals from the photo detector and for breaking down the output signal from the photo detector into measured values produced by dot-shaped, linear, and planiform defects in the surface of the object under inspection, and means for determining the effective scanning position of the light beam on the object surface at any time connected to the computer unit to associate the scanning positions with the measured values.
Claim 3
Dependent Claim
93 words
An apparatus in accordance with claim 31, wherein the adjustable lens system means has two lenses adjustable in relation to each other, whereof the first lens is a cylindrical lens and the second lens is a spherical lens, both lenses having the same focal length, and wherein the first intermediate image produced by the first lens is cigar-shaped with a major axis aligned with the longest dimension of said first intermediate image and a minor axis perpendicular to the major axis, and the second intermediate image produced by the second lens is dot-shaped.
Claim 4
Dependent Claim
78 words
An apparatus in accordance with claim 2, wherein the first lens is so placed in the light beam that the major axis of the cigar-shaped first intermediate image projected upon the surface of the object lies radially and the minor axis is tangential relative to the rotation of the supporting disk, so that for the first scan a greater feed offset between two successive revolutions is used than for the second scan with the dot-shaped second intermediate image.
Claim 5
Dependent Claim
37 words
An apparatus in accordance with claim 2, wherein the lenses are fitted on an L-shaped carrier plate which is pivoted between limits or end positions defined by stops on a pivot placed perpendicularly to the light beam.
Claim 6
Dependent Claim
47 words
An apparatus in accordance with claim 2, wherein the lenses are fitted to a slide and are movable in a straight line to selectively place either lens in the light beam, and adjustable stops are provided to define the position of each lens in the light beam.
Claim 7
Dependent Claim
48 words
An apparatus in accordance with claim 2, wherein the lenses are fitted to a disk which is rotatable about an axis extending parallel to the light beam, whereby the lenses are be moved alternately into the light beam by rotation of the disk by a given angular amount.
Claim 8
Dependent Claim
39 words
An apparatus in accordance with claim 1, wherein the dark-field stop assembly has a dark-field stop directly integrated in a carrier plate which is so secured to a mount as to permit adjustment of the light beam by rotation.
Claim 9
Dependent Claim
82 words
An apparatus in accordance with claim 7, wherein the dark-field stop is formed by a coating of material reflective to the light beam and placed in the centre of the dark-field stop's carrier plate along said image forming optical axis, and wherein the shape of the area of reflecting material produces a circularly symmetrical projection of the dark-field stop assembly along the optical axis, and wherein the dark-field stop's carrier plate is made of a material that transmits the light beam's wavelengths.
Claim 10
Dependent Claim
33 words
An apparatus in accordance with patent claim 8, wherein for any angle of inclination of the dark-field stop's carrier plate greater than 0°, the shape of the area of reflecting material is elliptical.
Claim 11
Dependent Claim
83 words
An apparatus in accordance with claim 1, wherein the dark-field stop assembly has a dark-field stop in the form of a prism fixed to a prism mount, the prism mount is cylindrical in shape so that the projection of the prism mount along the imaging forming optical axis is circularly symmetric, and the prism mount is fixed to a carrier plate which is adjustable and has a first opening for the entry and a second opening for the exit of the light beam.
Claim 12
Dependent Claim
47 words
An apparatus in accordance with claim 1, wherein the dark-field stop assembly has a dark-field stop in the form of a cylindrical body with an oblique surface which is silvered, and the cylindrical body is fixed to a carrier plate for the dark-field stop which is adjustable.
Claim 13
Dependent Claim
26 words
An apparatus in accordance with claim 1, wherein the vignetting optics is provided in form of a longitudinally displaceable rod to introduce asymmetry in the image.
Claim 14
Dependent Claim
207 words
An apparatus in accordance with claim 31, wherein the means for determining the scanning position has a rotation-pulse emitter connected to a shaft of the drive means and a translation-pulse emitter connected to the computer unit, and the rotation-pulse emitter produces angular data and the translation-pulse emitter produces radial data which permit the determination of the scanning positions by polar coordinates, a look-up table is provided which has a number of storage positions for Cartesian coordinate addresses that correspond to the number of all pulses of the rotation-pulse emitter during a measurement, whereby addresses are stored in the storage positions to permit the determination of the XY coordinates in a Cartesian coordinate system, a pointer is provided in the form of an address register that is automatically incremented whenever a pulse from the rotation-pulse emitter is received, so that the pointer at all times points to the currently used address in the table, whereby the current address at any time is the address of a pixel of a Cartesian coordinate system, all of which make up a pixel area that produces the result of all measurements, and the position of each pixel in the pixel area corresponds to the position of the light spot on the surface.
Claim 15
Dependent Claim
33 words
An apparatus in accordance with claim 1, wherein the drive means has means for causing the beam to scan the surface from the center of the object towards an edge of the object.
Claim 16
Dependent Claim
67 words
An apparatus in accordance with claim 13, wherein a pulse generator is provided to generate index pulses at a selectable frequency and is connected via the computer unit to the rotation-pulse emitter, the index pulses are generated synchronously with the rotation pulses of the rotation-pulse emitter, and the number of index pulses per revolution are adjustable in accordance with the speed of rotation of the drive means.
Claim 17
Dependent Claim
16 words
An apparatus in accordance with claim 15, wherein the pulse generator is an electronic rectangular-pulse oscillator.
Claim 18
Dependent Claim
64 words
An apparatus in accordance with claim 15, wherein the electronic analysis means further including means for identifying the measured values obtained within a ring segment of the surface; and outside to be measured during the second scan for the computation of the look-up table, and means for storing the measured values that lie within the ring segment area of the surface for further processing.
Claim 19
Dependent Claim
39 words
An apparatus in accordance with claim 15, wherein the number of index pulses is greater than the number of rotation pulses, and the second scan is made at a smaller feed offset than that used for the first scan.
Claim 20
Dependent Claim
42 words
An apparatus in accordance with claim 13, wherein display means are connected with the computer unit for displaying the measured values in a color-coded two-dimensional graph and include means for selectively displaying a haze graph and an LPD (light point defect) graph.
Claim 21
Dependent Claim
24 words
An apparatus in accordance with claim 19, wherein the display means assigns specific colors to various diffused-light amplitudes that correspond to certain measured values.
Claim 22
Dependent Claim
41 words
An apparatus in accordance with claim 20, wherein the display means has means for selecting a window of the dynamic range of the measurements to be displayed and represented in color, and the assignment of colors is effective within said window.
Claim 23
Dependent Claim
25 words
An apparatus in accordance with claim 19, wherein the colour scale used for the LPD graphs is the inverse colour scale for the haze graphs.
Claim 24
Dependent Claim
18 words
An apparatus in accordance with claim 19, wherein the measured values assigned to each colour also shown numerically.
Claim 25
Dependent Claim
34 words
An apparatus in accordance with claim 1, wherein display means are provided for displaying the size of the defects in the surface of the object within a selected range by means of a histogram.
Claim 26
Dependent Claim
28 words
An apparatus for surface inspections as defined in claim 1, wherein peripheral recording means is connected to the computer unit for storing the measured values obtained during measurement.
Claim 27
Independent Claim
508 words
An apparatus for making high-sensitivity measurements of dot-shaped, linear, and planiform surface defects comprising: a light source producing a light beam; a supporting disk on which an object having a surface to be inspected or examined is placed with the surface exposed; an objective passing the light beam from the source perpendicularly onto the surface of the object on the supporting disk: drive means connected to the supporting disk for moving the disk and the object thereon rotationally and translationally relative to the light beam so as to permit the light beam to scan the surface of the object along a spiral path; a photodetector positioned to receive light reflected by the surface of the object and collected by the objective and having an output providing a signal representative of the reflected light received; adjustable lens system means positioned on the optical path of the light beam between the light source and the objective for producing a first intermediate image of selected size and shape for a first scan of the surface of the object and a second intermediate image of selected size and shave for a second scan of the surface of the object; said drive means also being adjustable for changing the translational movement creating the spiral path and correspondingly changing the offset of each spiral forming the path in accordance with the selected one of the intermediate images used for a scan; a dark-field stop assembly positioned in the optical path of the light beam between the lens system means and the objective and having an adjustable dark-field field deflection system whereby the light beam after deflection is directed exactly centered through the objective and at right angles onto the surface of the object, electronic analysis means and a computer unit connected to receive output signals from the photo detector and for breaking down the output signals from the photo detector into measured values produced by dot-shaped, linear, and planiform defects in the surface of the object under inspection, and means for determining the effective scanning position of the light beam on the object surface at any time connected to the computer unit to associate the scanning positions with the measured values, wherein the electronic analysis means has a signal input connected with an output of the photo detector and to a haze channel having a haze filter and a peak suppressor, the signal input is connected to a particle channel which has a subtraction circuit and a peak detector with a digital output, a haze-filter output is connected to the input of an analog-digital converter which has an output; and the haze filter is connected to a nominal-bandwidth input and the peak detector is connected to a second input of the electronic analysis means, whereby the measurements due to planiform defects (haze) are available at the output of the analog-digital converter, the measurements due to dot-shaped defects (LPDs) and linear defects are available at the digital output of the peak detector, and all these measurements are then loaded and stored in the computer unit.
Claim 28
Independent Claim
508 words
An apparatus for making high-sensitivity measurements of dot-shaped, linear, and planiform surface defects comprising: a light source producing a light beam; a supporting disk on which an object having a surface to be inspected or examined is placed with the surface exposed; an objective passing the light beam from the source perpendicularly onto the surface of the object on the supporting disk: drive means connected to the supporting disk for moving the disk and the object thereon rotationally and translationally relative to the light beam so as to permit the light beam to scan the surface of the object along a spiral path; a photodetector positioned to receive light reflected by the surface of the object and collected by the objective and having an output providing a signal representative of the reflected light received; adjustable lens system means positioned on the optical path of the light beam between the light source and the objective for producing a first intermediate image of selected size and shape for a first scan of the surface of the object and a second intermediate image of selected size and shave for a second scan of the surface of the object; said drive means also being adjustable for changing the translational movement creating the spiral path and correspondingly changing the offset of each spiral forming the path in accordance with the selected one of the intermediate images used for a scan; a dark-field stop assembly positioned in the optical path of the light beam between the lens system means and the objective and having an adjustable dark-field field deflection system whereby the light beam after deflection is directed exactly centered through the objective and at right angles onto the surface of the object, electronic analysis means and a computer unit connected to receive output signals from the photo detector and for breaking down the output signals from the photo detector into measured values produced by dot-shaped, linear, and planiform defects in the surface of the object under inspection, and means for determining the effective scanning position of the light beam on the object surface at any time connected to the computer unit to associate the scanning positions with the measured values, wherein the electronic analysis means has a signal input connected with an output of the photo detector and to a haze channel having a haze filter and a peak suppressor, the signal input is connected to a particle channel which has a subtraction circuit and a peak detector with a digital output, a haze-filter output is connected to the input of an analog-digital converter which has an output; and the haze filter is connected to a nominal-bandwidth input and the peak detector is connected to a second input of the electronic analysis means, whereby the measurements due to planiform defects (haze) are available at the output of the analog-digital converter, the measurements due to dot-shaped defects (LPDs) and linear defects are available at the digital output of the peak detector, and all these measurements are then loaded and stored in the computer unit.
Claim 29
Dependent Claim
186 words
An apparatus in accordance with claim 14, wherein the haze channel further comprises a low-pass filter which consists of filter condensers, resistors, and first and second switch systems, and each resistor is connected at one end via the first and second switch systems to the filter condensers and the haze-filter output, the haze-filter output is connected via a diode, which acts as a peak suppressor, to the other ends of the resistors and an output of a first amplifier, an input of a first amplifier is connected to the signal input and the non-inverting input of a second amplifier which acts as a subtraction circuit, an inverting input of the second amplifier is connected to the haze-filter output and the output of the second amplifier is connected to the input of the peak detector, for the purposes of control, the switch systems are connected to the nominal-bandwidth input, and the switch systems switch off condensers and resistors to reduce the time constant of the low-pass filter in proportion to the speed of rotation and the radial scanning position from the center of the object under inspection.
Claim 30
Dependent Claim
64 words
An apparatus in accordance with claim 26, wherein the computer unit has means for loading the measured values whenever the pulses of the rotation-pulse emitter occur and a programmable frequency-divider circuit by means whereof the number of pulses per revolution is reduced in relation to the radial distance to the center of the object surface from a surface location which receives the light beam.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-12-26 | 1998-06-27 | 1998-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-26 | 2002-06-27 | 2002-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-26 | 2006-06-27 | 2006-12-27 | $7700.00 | Window Closed / Lapsed |