Patent JPS583273A successfully refreshed from Google Patents.
US5693239A
Expired / Lapsed
US
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Polishing slurries comprising two abrasive components and methods for their use
Assignee: DuPont Electronic Materials Holding Inc
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Filing: 1995-10-10
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Granted: 1997-12-02
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Expires: 2015-10-10
Abstract
Abstract An aqueous slurry is provided for polishing or planarizing a work piece which contains a metal, the solids portion of said slurry being comprised of 1 to 50 percent by weight of submicron alpha-alumina, the remainder of the solids being of a substantially less abrasive composition chosen from the group consisting of aluminum hydroxides, gamma-alumina, delta-alumina, amorphous alumina, and amorphous silica. Also provided is a method for polishing the surface of a work piece which contains a metal wherein said aqueous slurry is used as the polishing composition during chemical-mechanical polishing.
Inventors
- 👤 Jiun-Fang Wang
- 👤 Anantha Sethuraman
- 👤 Huey-Ming Wang
- 👤 Lee Melbourne Cook
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:33
CPC Classifications
C; C09; C09K; C09K3/00; C09K3/14; C09K3/1454; C09K3/1463; C23; C23F; C23F1/00; C03; C03C; C03C15/00; C09G; C09G1/00; C09G1/02; C09K3/1409; C23F3/00
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
63 words
An aqueous slurry, useful for the chemical-mechanical polishing of substrates which contain a metal, comprising: water, submicron alpha-alumina particles, and one or more of a substantially less abrasive submicron solid particle chosen from the group consisting of gamma-alumina, delta-alumina, amorphous alumina, and amorphous silica, wherein said alpha-alumina constitutes 1 to 50 percent by weight of the total solids in said slurry as used.
Claim 2
Dependent Claim
63 words
An aqueous slurry, useful for the chemical-mechanical polishing of substrates which contain a metal, comprising: water, submicron alpha-alumina particles, and one or more of a substantially less abrasive submicron solid particle chosen from the group consisting of gamma-alumina, delta-alumina, amorphous alumina, and amorphous silica, wherein said alpha-alumina constitutes 1 to 50 percent by weight of the total solids in said slurry as used.
Claim 3
Dependent Claim
24 words
An aqueous slurry according to claim 1 wherein said alpha-alumina constitutes 5 to 25 percent by weight of the total solids in said slurry.
Claim 4
Dependent Claim
12 words
An aqueous slurry according to claim 1 further comprising an oxidizing agent.
Claim 5
Dependent Claim
12 words
An aqueous slurry according to claim 2 further comprising an oxidizing agent.
Claim 6
Dependent Claim
19 words
An aqueous slurry according to claim 3 further comprising an agent to suppress the rate of removal of silica.
Claim 7
Dependent Claim
19 words
An aqueous slurry according to claim 4 further comprising an agent to suppress the rate of removal of silica.
Claim 8
Dependent Claim
25 words
An aqueous slurry according to claim 1, 2, 3, 4, 5 or 6 wherein said alpha-alumina is employed in combination with submicron particles of gamma-alumina.
Claim 9
Dependent Claim
26 words
An aqueous slurry according to claim 1, 2, 3, 4, 5 or 6 wherein said alpha-alumina is employed in combination with submicron particles of amorphous alumina.
Claim 10
Dependent Claim
26 words
An aqueous slurry according to claim 1, 2, 3, 4, 5 or 6 wherein said alpha-alumina is employed in combination with submicron particles of amorphous silica.
Claim 11
Independent Claim
91 words
A method for polishing or planarizing the surface of a work piece which contains a metal comprising (a) applying an aqueous slurry comprising: water, submicron alpha-alumina particles, and one or more of a substantially less abrasive submicron solid particle chosen from the group consisting of gamma-alumina, delta-alumina, amorphous alumina, and amorphous silica, where said alpha-alumina constitutes 1 to 50 percent by weight of the total solids in said slurry, to the surface of said work piece and (b) polishing or planarizing the surface of said work piece by chemical-mechanical polishing means.
Claim 12
Independent Claim
91 words
A method for polishing or planarizing the surface of a work piece which contains a metal comprising (a) applying an aqueous slurry comprising: water, submicron alpha-alumina particles, and one or more of a substantially less abrasive submicron solid particle chosen from the group consisting of gamma-alumina, delta-alumina, amorphous alumina, and amorphous silica, where said alpha-alumina constitutes 1 to 50 percent by weight of the total solids in said slurry, to the surface of said work piece and (b) polishing or planarizing the surface of said work piece by chemical-mechanical polishing means.
Claim 13
Dependent Claim
23 words
A method according to claim 10 wherein said alpha-alumina constitutes 5 to 25 percent by weight of the total solids in said slurry.
Claim 14
Dependent Claim
14 words
A method according to claim 10 wherein said slurry further comprises an oxidizing agent.
Claim 15
Dependent Claim
14 words
A method according to claim 11 wherein said slurry further comprises an oxidizing agent.
Claim 16
Dependent Claim
21 words
A method according to claim 12 wherein said slurry further comprises an agent to suppress the rate of removal of silica.
Claim 17
Dependent Claim
21 words
A method according to claim 13 wherein said slurry further comprises an agent to suppress the rate of removal of silica.
Claim 18
Dependent Claim
23 words
A method according to claim 10, 11, 12, 13, 14 or 15 in which said metal contained in said work piece is tungsten.
Claim 19
Dependent Claim
23 words
A method according to claim 10, 11, 12, 13, 14 or 15 in which said metal contained in said work piece is aluminum.
Claim 20
Dependent Claim
23 words
A method according to claim 10, 11, 12, 13, 14 or 15 in which said metal contained in said work piece is copper.
Claim 21
Dependent Claim
23 words
A method according to claim 10, 11, 12, 13, 14 or 15 in which said metal contained in said work piece is nickel.
Claim 22
Dependent Claim
23 words
A method according to claim 10, 11, 12, 13, 14 or 15 in which said metal contained in said work piece is tantalum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-01 | 2001-06-02 | 2001-12-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-01 | 2005-06-02 | 2005-12-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-01 | 2009-06-02 | 2009-12-02 | $7700.00 | Window Closed / Lapsed |